Edwards EXT400/200/30H Manuals

Manuals and User Guides for Edwards EXT400/200/30H. We have 1 Edwards EXT400/200/30H manual available for free PDF download: Instruction Manual

Edwards EXT400/200/30H Instruction Manual

Edwards EXT400/200/30H Instruction Manual (34 pages)

Split Flow Compound Turbomolecular Vacuum Pump

Brand: Edwards | Category: Water Pump | Size: 0.92 MB

Table of Contents

Declaration of Conformity
2
Table of Contents
3
Introduction

5
- Scope and Definitions
  5
Technical Data

7
Installation

13
Operation

21
- Start-Up
  21
- Shut-Down
  21
- Safety Interlocks and Control System
  22
- EXDC Controllers
  22
- EXC Controllers
  22
Maintenance

23
- Introduction
  23
- Bearing Maintenace
  23
- Rotor Life
  23
- Cleaning the Pump
  24
- Fault Finding
  24
Storage and Disposal

27
- Storage
  27
- Disposal
  27
Service, Spares and Accessories

29
- Introduction
  29
- Service
  29
- Spares
  29
- Inlet-Screens
  29
- Inlet-Flange Seals
  29
- Accessories
  29
- Installation
  29
- EXDC Drive Modules
  30
- EXC Controllers
  30
- Pump-To-Controller Cables
  30
- TAV Vent-Valve and Vent-Port Adaptor
  30
- Pump-To-Controller Cable
  30
- ACX Air-Cooler
  31
- VRX Vent-Restrictor
  31
- AXC Air-Cooler
  31
- Installation of Optional Accessories
  32
- Index
  33

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