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9. Storage
Use the following procedure to store the pumping system.
1.
Shut down the pumping system as described in
screen.
2.
Isolate the pumping system from the electrical supply and disconnect it from the
vacuum system.
3.
Drain the oil from the backing pump (only applicable to the E2M1.5 rotary vane
pump) as described in the instruction manual. Refer to
8.
4.
Place protective covers over the inlet and outlet flanges.
5.
For the fastest pump down after the pumping system is reinstalled, seal the
turbomolecular pump inside a plastic bag together with a suitable desiccant.
6.
Store the pumping system in cool, dry conditions until required for use.
D39595880_A
D39595880_A - Storage
Page 38
Stop the pump with the turbo
General description
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