Pumped Media - Edwards T-Station 300 Instruction Manual

Parameter
Ultimate pressure*
* Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO
version with 2-stage rotary vane backing pump.

3.4 Pumped media

WARNING: DANGEROUS GASES
Risk of injury or damage to equipment. Vent dangerous gases and gas mixtures safely.
Do not expose people to these gases. If pumping hazardous gases or vapours,
observe the safety recommendations of the supplier of the gas/vapour.
WARNING: RISK OF EXPLOSION
Risk of injury or damage to equipment. Do not use the pump to pump pyrophoric or
explosive gas mixtures as it is not suitable for this purpose. The pump and its
connections are not designed to contain an explosion.
WARNING:
Risk of injury or death of people. Do not expose any part of the human body to the
vacuum.
CAUTION: CONDENSABLE MEDIA
Risk of damage to equipment. Do not use the pump to pump particulates or
condensable media. Deposition may occur within the pump which will degrade pump
performance and reduce the pump life.
CAUTION: FAILURE OF PUMP
Risk of damage to equipment. Do not use the pump to pump gases containing more
than 20% oxygen. This will cause the lubricant to polymerise and the pump to fail
prematurely.
The turbo pump is designed to pump the following residual gases normally used in high
vacuum systems:
D39595880_A
D39595880_A - Technical data
nEXT300D
ISO100
< 6 x 10
Page 13
nEXT300D
CF100
-8
mbar < 5 x 10
10/2020 - ©Edwards Limited
-10
mbar