Fault Finding - Edwards T-Station 300 Instruction Manual

8. Fault finding

Fault The pumping system has failed to start
Cause The electrical supply fuse has blown
Remedy Replace the fuse. Refer to
Cause The operating voltage is incorrect
Check the voltage supply matches the pumping system voltage requirements. Refer
Remedy
to the electrical rating label located at the rear of the pumping system.
Fault Ultimate pressure cannot be reached
Cause Pressure is limited by water vapour
Remedy Bake the chamber or run the system for a duration until the vacuum improves.
Cause The vacuum gauges are contaminated
Remedy Clean or replace the vacuum gauges.
Pumping speed is insufficient due to poor conductance between the pump and
Cause
the gauge or the chamber is too large
Remedy Increase the conductance or reduce the volume.
Cause
The backing pressure is greater than 10 mbar (1x10
The backing pressure may be too high. Check for backing pipeline leaks. If the
Remedy
throughput is high, a larger backing pump may be required.
Cause The high vacuum area of the system is contaminated
Remedy Clean the high vacuum system.
Cause Check the rest of the system for leaks and contamination
Remedy If found, repair the leaks and clean the contamination.
Cause The inlet pressure is poor
If inlet pressure is poor, check the turbo pump for contamination and refer to the
Troubleshooting section of the turbo pump manual.
Remedy
Leak test the pump. If the leak rate is greater than 1x10
contact us or the supplier.
Fault The backing pump is noisy
Cause The pump is noisy.
Refer to the Fault Finding section of the backing pump manual. See
Remedy
description
Fault The backing pump is leaking oil
Cause There is oil leak in the backing pump
D39595880_A
D39595880_A - Fault finding
Table: Electrical
on page 8.
Page 36
connections.
3
Pa)
-7
mbar l s
10/2020 - ©Edwards Limited
-1 -5 -1
(1x10 Pa l s ),
General