Pump Performance Data; Figure 3 Dimensions (T-Station With Xdd1 Backing Pump Option) - Edwards T-Station 300 Instruction Manual

Figure 3 Dimensions (T-Station with XDD1 backing pump option)

All measurements indicated are shown in mm (inches)

3.3 Pump performance data

Table 3 Pump performance data - nEXT300
Parameter
Inlet pumping speed:
▪ Nitrogen
▪ Helium
▪ Hydrogen
Inlet compression ratio:
▪ Nitrogen
▪ Helium
▪ Hydrogen
D39595880_A
D39595880_A - Technical data
nEXT300D
ISO100
300 ls
340 ls
280 ls
> 1 x 10
1 x 10
5 x 10
Page 12
nEXT300D
CF100
-1
-1
-1
11
> 1 x 10
6
4
10/2020 - ©Edwards Limited
-1
300 ls
-1
340 ls
-1
280 ls
11
6
1 x 10
4
5 x 10