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• Type
• Type
• Type
• Close all access panels.
From the
c.
Select
d.
(11950 for the older panel). Repeat the measurement procedure again
until the measurements all meet the
older panel) specification.
XYZ Axis Checks
5.
Load the confirmation and adjustment board.
a.
From the
b.
Test. The prompts will step you through the setup test parameters.
The results should be contained in four graphs. There should be no
more than 5 mil. difference (Z coordinates only) between the four.
(Passing means a sigma of equal to or less than
second laser, repeat the test for it.)
Unload the confirmation board.
c.
Bring up X-ray High Voltage
6.
slowly without drive current (no X-ray generation at this time).
The 5DX produces X-rays. Do not operate the 5DX unless all
WARNING
shielding is in place. Exposure to X-rays can result in serious
bodily injury.
Use a voltmeter to recheck the Vacion Power Supply at test point
a.
J04000. (Figure 12 on page 26) The reading should now be less than
20 mv. If it is not, or has risen since your last reading, there is a
Agilent 5DX Installation
to return to the master directory.
ma
and press
loadinit
and press
Enter
auto
menu select
Utilities
Manual Panel Load
— Verify the stage operation as follows:
Utilities Menu,
select
.
Enter
to return to
User
Panel Handling > Home Rails
. At the prompt enter
11.480 (±0.005)
Service > XYZ Stage > Z Stage
(±0.5)
— This step ramps the high voltage up
Interface.
.
again
11450
(11.980 for the
.) (If there is a
33
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