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Maintenance 3. Covers
3. Install the connecter plate to the Manipulator.
NOTE
NOTE
4. Install the heat sink.
5. Install the fan.
128
Hexagon socket head cap bolts: 11-M4×10
Tightening torque: 4.0 ± 0.2 N·m
Be careful not to get the gasket and cables caught
between the cover and the Manipulator.
Replace the gasket if there are flaws or deteriorations.
For cleanroom and protection models, install the gasket
between the heat sink and the connector plate.
Hexagon socket head cap bolts: 4-M4×15
Tightening torque: 4.0 ± 0.2 N·m
For details, refer to Maintenance 15. Replacing the Fan.
C8 Rev.13
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