Equipment
Detector types and application
There are several either standard or optional system detectors. The Detectors menu
shows all installed detectors. The accessibility / inaccessibility of detectors (black /
gray label) depends on actual system conditions.
Note
For settings and handling of particular standard / optional detectors, see Chapters 5 and 7.
Apreo detectors list
Table 2-2:
Detector name
Everhart-Thornley
T1
T2
Low Vacuum
CCD camera
External
T3
RGB Cathodeluminescence
Directional Gaseous
Analytical
Directional Backscattered
(DBS)
Retractable Directional
Backscattered (DBS)
Retractable Annular STEM
SE = secondary electrons, BSE = back scattered electrons, TE = transmitted electrons,
S = standard, O = optional, LM = lens mounted version
Note
In case the vacuum safety interlock is activated, it is necessary to confirm switching the detector voltage on after pumping
the system.
C O N F I D E N T I A L – limited rights
Revision A
Feb 2018
System control: Equipment
Tag
Vacuum mode
ETD
HiVac
T1
HiVac / LoVac
T2
HiVac / LoVac
LVD
LoVac
CCD
EXT
T3
HiVac
CLD
HiVac / LoVac
GAD–ABS /
LoVac
GAD–CBS
ABS / CBS
HiVac / LoVac
ABS / CBS
HiVac
STEM 3
HiVac
STEM 3+
Detected signal
SE (tunable energy) / BSE
SE (for OptiPlan and Immersion
Use cases)
SE (for OptiPlan and Immersion
Use cases)
SE
light, infra-red light
detector-dependent
SE (for OptiPlan and Immersion
Use cases)
Light
BSE
BSE
BSE
TE
User Manual
Note
S
S
S
S
S
O
O
O, LM
O, LM
O
O
2-13