Thermo Scientific Apreo User's Operation Manual page 40

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Software control: Microscope Control
Patterning menu
opens the Patterning menu functions (see Chapter 5):
Start / Pause / Resume Patterning
in Display # (Pause button)
starts / pauses patterning of the enabled pattern(s) in the active
display. The menu item and the corresponding toolbar icon
change according to the actual condition.
Reset Patterning in Display # (Ctrl + Pause button)
cancels the patterning procedure.
Next Pattern (Shift + P)
In the serial patterning mode the actual patterning is stopped and the procedure continues with the next pattern (if
present).
Autostart Real Time Monitor
When selected, it releases the pause function for the display with patterns, enabling an automatic start of the real
time monitoring (RTM) of the milling process.
Live RTM after Snapshot
After acquiring a snapshot, the RTM feature continues automatically.
Blackout Pattern Area for RTM
In case the Real Time Monitor is running, the area not milled is darkened to enhance the visibility of the RTM
information. The visibility of the individual patterning pixels is greatly enhanced (this is especially important for
patterns with extremely large pitch or very thin lines).
Imaging with / without Blackout Pattern Area
FIGURE 3-7:
3-14
User Manual
C O N F I D E N T I A L – limited rights
Feb 2018
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