Alignments List - Thermo Scientific Apreo User's Operation Manual

Alignments List

Grouped alignments lists are possible to roll down / up by clicking
the + / – sign. The alignments accessible for a Supervisor are
presented. The user-accessible alignments (a reduced list) are
marked by the (U) sign in the following list:
Electron Beam
• E-column: Emitter Startup
Enables IGP's and electron source - emitter switching On / Off.
• Magnification Correction
User magnification calibration (see Beam menu item).
• E-Column: Aperture Selection
Enables setting a second set of final lens apertures in case the
image quality deteriorates (one or more actually used
apertures are worn out).
• E-Column: Preventive Maintenance
– Source Tilt – electron beam adjustment procedure.
• E-Column: Supervisor Alignments
– Sample Alignment – 
– Aperture Alignment – 
– Source DPA and Tilt and Shift – 
Set of Supervisor level electron beam adjustment procedures.
• E-Column: LoVac Alignments
Stages
• Stage Alignments – set of utilities:
– Stage Rotation Center – sets the stage rotation center for the compucentric rotation.
Others
• 154 - Water Bottle Venting
Enables venting the water bottle to allow refilling it.
• External Plasma Cleaning / Plasma Cleaning
Enables chamber plasma cleaning and sets the duration of the specimen plasma cleaning.
• Vacuum Actions – set of utilities:
– Start / Stop IGPs – enables starting / stopping vacuum pumps in case of power failure, emergency or service
actions 
– Pump / Vent Actions – enables pumping / venting particular vacuum system sections 
– Pump Buffer – enables immediately pumping down the vacuum buffer
• GIS Alignment (option)
Resets the GIS crucible filling lifetime counter after its exchange, sets the GIS heating temperature, and
performs GIS mechanical alignment.
• Quick Loader Alignments (option - see Chapter 7)
Recommendation
Some procedures may influence others. Therefore care should be taken to monitor the influence of any actions
taken. Alignment procedures should be carried out whenever necessary during normal operation:
• Stage Alignments / Stage Rotation Center
• E-Column: Preventive Maintenance / Source Tilt
Model difference
Apreo High Vacuum has a slightly modified alignments list.
4-2 User Manual
Alignments:
C O N F I D E N T I A L – limited rights
Feb 2018 Revision A