Thermo Scientific Apreo User's Operation Manual page 10

Image viewing and capture
Because the amplified detector signal is shown synchronously with the beam scanning, there is a relationship
between brightness of an image point on the monitor screen and the signal detected at the corresponding point on
the specimen.
Magnification is the ratio of the size of the viewing monitor screen to the size of the area scanned on the specimen.
Higher magnification is achieved by reducing the size of the area scanned on the specimen.
Gas injection system (GIS)
Multiple GIS (option) can be installed for material deposition in conjunction with electron beam pattern definition.
Electron beam-induced deposition offers the advantage of not sputtering of the deposited material.
Several GIS chemistries can be installed on the instrument, depending on system configuration. This self-contained
apparatus allows the material to be contained entirely within the vacuum system for simple, flexible, and safe
operation.
Analysis capability
Convergence of the SEM and X-ray detection system (e.g.
EDX – Energy Dispersive X-ray – option) at a short
working distance allows precision chemical analysis at
high resolution of surface and subsurface features.
Various vendor options are compatible with the
instrument (see Chapter 7).
1-4 User Manual
System overview: System capabilities
C O N F I D E N T I A L – limited rights
Feb 2018 Revision A