Thermo Scientific Apreo User's Operation Manual page 88

Alignments: E-Column: Preventive Maintenance
E-Column: Preventive Maintenance
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Source Tilt & Shift (Fast)
This user level alignment ensures centering the electron beam in the column. It should be executed regularly (on a
weekly basis). It takes around 15 to 20 minutes. If it is not successful, run the supervisor level alignment Source DPA
& Tilt & Shift.
4-8 User Manual C O N F I D E N T I A L – limited rights
Feb 2018 Revision A