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Mounting the valve plate
Mount the valve plate to the manifold valve with valve fixing screws.
(Tightening torque: 0.6 to 0.7 N•m)
Set screw mountings
SV:
2 places
S070:
VQC1000:
VQC2000:
3 places
VQC4000:
4 places
Connect the SI unit to the manifold valves.
Insert the valve plate into the valve plate mounting groove at the side of the SI unit. Fix using the valve plate
fixing screws. (Tightening torque: 0.7 to 0.8 N•m)
Please do not connect the unit while the power supply is ON.
It will cause equipment damage
Note
- 10 -
No.EX##-OML0007
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