176183-1CD
Table of Contents
MH5S
(II)
/MH5F
11 Parts List ..................................................................................................................................... 11-1
11.1 S-Axis Unit ..................................................................................................................... 11-1
11.2 L-, U-Axes Unit .............................................................................................................. 11-4
11.3 R-Axis Unit..................................................................................................................... 11-7
11.4 Wrist Unit ....................................................................................................................... 11-9
HW1483638
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