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Ulvac UTM-MS Series Instruction Manual

Turbo molecular pump
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SK00-2200-AI-145-00(263-13238W)
INSTRUCTION MANUAL
Turbo Molecular Pump
UTM-MS Series
Model
UTM300A-MS
UTM400A-MS
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC KIKO, Inc.

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  • Page 1 SK00-2200-AI-145-00(263-13238W) INSTRUCTION MANUAL Turbo Molecular Pump UTM-MS Series Model UTM300A-MS UTM400A-MS Before using this product, be sure to read this operation manual. Keep this manual with care to use at any time. ULVAC KIKO, Inc.
  • Page 2 No Text...

  • Page 3: Copyrights And Disclaimers

    Every effort has been made to prepare an accurate and complete manual, but if an error or omission should be discovered, revisions might not be possible immediately. ULVAC KIKO does not take responsibility for any effects that may result from the use of this manual.

  • Page 4: Precautions For Safe Operation

    WARNING Turbo molecular pump repair and/or controller repair can be very hazardous. Only trained technicians who are authorized by ULVAC KIKO may do service of products. WARNING Neither overhaul nor modify the pump proper and controller without admission.
  • Page 5 ・Improper turbo molecular pump use may be hazardous to operator's health in applications not recommended or approved by ULVAC KIKO. In the event removal of the turbo molecular pump from an application is required, full protective measures including purging of the turbo...
  • Page 6 Introduction WARNING If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment may be impaired. CAUTION After having operated the turbo molecular pump for evacuation of corrosive gas, keep the pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump internal would cause rapid corrosion trouble of the pump internals.

  • Page 7: Operating Precautions

    Introduction CAUTION When pump is removed from a equipment, drain the water from water pipe. If remained water leak from water pipe, pump body will be corroded. After the water drained, shut water pipe by the cap which is attached at shipment. CAUTION The following "CAUTIONS"...

  • Page 8: Explanation Of Label

    Section 5.1.2 "Installation of the Pump". (3) SECURITY Seal This label certificates that the product was made or maintenanced by ULVAC KIKO or by ULVAC KIKO authorized facility. In case "this label is removed" or "there is a mark showing once this label has been removed", ULVAC KIKO warranty shall not be applied to the product.

  • Page 9: Location Of Label

    Introduction ○ Location of Label...

  • Page 10: Installation Precautions

    The lifetime of parts are specified as below. The request for changing parts exceeding the estimated lifetime should be made to ULVAC KIKO or an approved service company in order for safety and adequate performance of the pump and controller.

  • Page 11: Air Cooled Turbo Molecular Pump

    For the air cooled turbo molecular pumps, it is necessary to clean the cooling fan periodically because of the cooling fan collecting dust, debris, etc. ULVAC KIKO recommends removal of the cooling fan for all methods of cleaning (compressed air, etc.) to prevent the particles, cleaning debris, from accumulating in or on the turbo molecular pump.
  • Page 12 No Text...

  • Page 13: Table Of Contents

    Table of contents Introduction Copyrights and Disclaimers ........i Precautions for Safe Operation .
  • Page 14 Section 3 CONSTRUCTION AND PRINCIPLE Pump Construction......... . .12 Principle of Turbo Molecular Pumping .
  • Page 15 Section 7 GAS PURGE Section 8 TURBO MOLECULAR PUMP RECONDITION Recommended Maintenance Intervals......38 Turbo Molecular Pump Decontamination.
  • Page 16 No Text...

  • Page 17: Section 1 Outline And Descriptions

    OUTLINE AND DESCRIPTIONS ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 1.1 Outline 1.2 Descriptions 1.2.1 Outside Drawing 1.2.2 Standard Accessories...

  • Page 18: Outline

    SECTION 1 OUTLINE AND DESCRIPTIONS Outline The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a backing vacuum pump to create a high vacuum in a vacuum chamber. Typical Applications; Semiconductor equipments, Industrial equipments, R&D applications, The other ultra high vacuum applications.

  • Page 19: Descriptions

    1.2 Descriptions Descriptions 1.2.1 Outside Drawing 1.2.1.1 Outside Drawing of UTM300A-MS series Inlet flange φD φE n-φd VG100 φ185 φ160 8-φ12 ICF152 φ152 φ130.3 16-φ8.4 Fig.1-1 UTM300A-MS（Air cooled）...
  • Page 20 SECTION 1 OUTLINE AND DESCRIPTIONS Inlet flange φD φE n-φd VG100 φ185 φ160 8-φ12 ICF152 φ152 φ130.3 16-φ8.4 Fig.1-2 UTM300A-MS（Water cooled）...
  • Page 21 1.2 Descriptions 1.2.1.2 Outside Drawing of UTM400A-MS series Inlet flange φD φE n-φd VG150 φ235 φ210 8-φ12 ICF203 φ203 φ181 20-φ8.4 Fig.1-1 UTM400A-MS（Air cooled）...
  • Page 22 SECTION 1 OUTLINE AND DESCRIPTIONS Inlet flange φD φE n-φd VG150 φ235 φ210 8-φ12 ICF203 φ203 φ181 20-φ8.4 Fig.1-2 UTM400A-MS（Water cooled）...

  • Page 23: Standard Accessories

    1.2 Descriptions 1.2.2 Standard Accessories Description Q'ty Notes VG：O-ring gasket Gasket（inlet flange）(Note) １ ICF：Copper gasket Dust cap（outlet flange） KF40 １ Instruction manual １ (Note) One of followings.
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  • Page 25: Section 2 Identification And Function

    IDENTIFICATION AND FUNCTION ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 2.1 Pump Main Unit...

  • Page 26: Pump Main Unit

    SECTION 2 IDENTIFICATION AND FUNCTION Pump Main Unit Water cooled type Air cooled type Fig.2-1 Pump Main Unit (1) INLET FLANGE......Inlet flange, joint the turbo molecular pump (2) PORT FOR GAS PURGE... Gas purge adapter port （Refer to Section 7 "GAS PURGE".） (3) OUTLET FLANGE.......

  • Page 27: Section 3 Construction And Principle

    CONSTRUCTION AND PRINCIPLE ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 3.1 Pump Construction 3.2 Principle of Turbo Molecular Pumping...

  • Page 28: Pump Construction

    SECTION 3 CONSTRUCTION AND PRINCIPLE Pump Construction Fig. 3-1 is a sectional drawing of UTM-MS series magnetic bearing type turbo molecular pump. The built-in high frequency motor (1) is accelerated to the specified revolutions (speed) by the high frequency controller. Rotor blades (4) are fitted onto the drive shaft (3) and the stator blades (5) are arranged in between the rotor blades.
  • Page 29 3.2 Principle of Turbo Molecular Pumping Fig. 3-1 Pump Sectional Drawing (1) High frequency motor (6) Spacer (11) Inlet flange (2) Receptacle (7) Radial magnetic bearing (12) Outlet flange (3) Drive shaft (8) Axial magnetic bearing (13) Protective net (4) Rotor blade (9) Touch-down bearing (14) Cooling water pipeline (5) Stator blade...
  • Page 30 SECTION 3 CONSTRUCTION AND PRINCIPLE The movement of an object has 6 degrees of freedom. Levitation can be achieved in a turbo molecular pump by controlling the following 5 degrees of freedom (excluding the rotational degree (Z axis) of freedom). Fig.

  • Page 31: Section 4 Specifications

    SPECIFICATIONS ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 4.1 Standard Specifications for Pump Unit...

  • Page 32: Standard Specifications For Pump Unit

    Mounting position In any desired direction (Refer to Section 5) Bake-out temperature at an inlet flange 120 degrees C. or less Vibration level (by ULVAC KIKO's method) 0.012 μm or less (0-peak) Noise 60 dB(A) or less Recommended flow rate of purge gas...
  • Page 33 Mounting position In any desired direction (Refer to Section 5) Bake-out temperature at an inlet flange 120 degrees C. or less Vibration level (by ULVAC KIKO's method) 0.012 μm or less (0-peak) Noise 60 dB(A) or less Recommended flow rate of purge gas...
  • Page 34 No Text...

  • Page 35: Section 5 Installation

    INSTALLATION ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 5.1 Installation 5.1.1 Pump Mounting Direction 5.1.2 Installation of the Pump 5.1.3 Example of Piping Connection 5.1.4 Center of Gravity of the Pump...

  • Page 36: Installation

    SECTION 5 INSTALLATION Installation 5.1.1 Pump Mounting Direction This turbo molecular pump can be installed in vertical, horizontal, inverted, or oblique position. The outlet port of the turbo molecular pump should face horizontally or vertically when installing the pump horizontally and obliquely. When an installation direction is non-appropriate, reliability of operation may deteriorate (Refer to Fig.

  • Page 37: Installation Of The Pump

    5.1 Installation 5.1.2 Installation of the Pump WARNING Do not operate the turbo molecular pump until safety is confirmed. ・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown torque should be generated when abnormality occurs in the pump by any chance. Incidental accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by insufficient method.
  • Page 38 SECTION 5 INSTALLATION CAUTION The pump surface may get hot, there are risk of burn. Prevent the installation, operation, maintenance, and service personnel from contacting the pump surface in all tasks that they are intended to perform. NOTICE Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without fail.
  • Page 39 UTM300A-MS / UTM400A-MS 6,700 (Note)Rapid shutdown torque is the typical valve measured by the ULVAC KIKO’s test condition. The torque to transmit to host equipment might be different according to the rigidity of host equipment. Host equipment should be designed to have enough margins in strength.
  • Page 40 SECTION 5 INSTALLATION Table 5-1 The Recommended Fixing Bolt ■ Both by the inlet flange and the base (recommended method) Bolt-Nut (Half thread・All thread)・Tap Both by the inlet flange and the base Fixing method (recommended method) ICF152 Inlet flange VG100 VG150 ICF203 （Note）...

  • Page 41: Example Of Piping Connection

    5.1 Installation 5.1.3 Example of Piping Connection Connect a backing vacuum pump or its related pipe connection flange to the outlet flange of the pump (Refer to Fig. 5-5) Fig. 5-5 Example of Exhaust Line When gas purge required, connect the gas purge pipeline to the gas purge port (For the gas purge detail, refer to Section 7 "GAS PURGE").

  • Page 42: Center Of Gravity Of The Pump

    SECTION 5 INSTALLATION Connection of Cooling Water Line: Connect cooling water pipes to these pumps. When connecting the cooling water pipes, screw the pipe joint while also holding the nozzle of the pump with a spanner in order to avoid deforming the cooling water pipe, as illustrated in Fig.

  • Page 43: Connection Of The Pump To The Controller

    Connection of the Pump to the Controller Connection of the Pump to the Controller CAUTION Insert straight the control cable connector after checking its key direction. Inserting it in oblique direction would cause damage of the connector pins. After the insertion, turn the cable connector clockwise until the rotation lock clicks.

  • Page 44: Interlock For Vacuum System

    (an air suspension truck, for example). Especially when passing by rough road, we recommend that the product is transported keeping the packing condition when it ships from ULVAC KIKO. When the product is put on the high temperature / humidity environment for a long time, it causes the breakdown of the product due to corrosion of mechanical parts or performance loss of electrical parts.

  • Page 45: Section 6 Operation

    OPERATION ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 6.1 Outline 6.1.1 Introduction 6.2 Start-up Preparation 6.2.1 Start-up Preparation 6.3 Start-up 6.3.1 Start-up Sequence...

  • Page 46: Outline

    SECTION 6 OPERATION Outline CAUTION Neither disconnect and reconnect each cable while the pump is running. Particularly for unplugging the control cable from the receptacle, check complete shutdown of the pump by ROTATION lamp goes out and, thereafter, turn off the POWER switch. CAUTION Do not turn the power off while the pump is running.

  • Page 47: Start-Up Preparation

    6.2 Start-up Preparation Start-up Preparatio Please select "LOCAL" or "REMOTE" at the switch of the controller. For more information regarding operation, please refer to the controller Instruction Manual. 6.2.1 Start-up Preparation (1) Feed the cooling water into the cooling line (for cooling water method). (2) Turn on the POWER switch of the controller and check if the POWER lamp lights.

  • Page 48: Shutting Down

    SECTION 6 OPERATION Shutting Down CAUTION After having operated the turbo molecular pump for evacuation of corrosive gas, keep the pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by stopping the pump and dispersal of parts.

  • Page 49: Baking Operation

    6.4 Shutting Down REFERENCE ROTATION lamp goes out or "ROTATION" signal turns off when the pump rotational speed is 60 rpm or less. Turning off the POWER switch permits the pump rotor to be supported by the touch-down bearings. Baking Operation CAUTION During baking operation, cool down the turbo molecular pump in either cooling water or cooling fan.
  • Page 50 No Text...
  • Page 51 GAS PURGE ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●...
  • Page 52 SECTION 7 GAS PURGE This turbo molecular pump incorporates a gas purge port (Fig. 2-1 (2)). This turbo molecular pump need to flow the purge gas for protection of the bearings, when it evacuates a lot of corrosive gas. The proper purge gas flow rate is between 20 and 30 mL/min. Joint Orifice size φ0.5mm...

  • Page 53: Section 8 Turbo Molecular Pump Recondition

    ８ TURBO MOLECULAR PUMP RECONDITION ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 8.1 Recommended Maintenance Intervals 8.2 Turbo Molecular Pump Decontamination 8.3 Touch-down Bearing Replacement 8.4 Check of the Rotor Blades...

  • Page 54: Recommended Maintenance Intervals

    SECTION 8 TURBO MOLECULAR PUMP RECONDITION Recommended Maintenance Intervals It is different for deterioration progress speed of each part changes greatly by pump condition (Magnetic-bearings, sensors and motor need to change new ones per 3-5 years in addition in using corrosive gas, rotor temperature rises up depending on process, therefore it’s possible the rotor life is short).

  • Page 55: Turbo Molecular Pump Decontamination

    Repeated and/or frequent rotor touch down will cause wear and bigger rotational resistance and require replacement of touch down bearings. The replacement of the touch-down bearing is done only by ULVAC KIKO or an approved service company. Check of the Rotor Blades Rotor blades of turbo molecular pump are high-speed rotor made of aluminum alloy.

  • Page 56: Turbo Molecular Pump Return Request

    ULVAC KIKO will accept and perform service only on turbo molecular pumps that have been properly prepared as stated in (1) and (2) above. ULVAC KIKO will advice the customer of any failure precaution/prevention procedures that are appropriate to each individual turbo molecular pump service...
  • Page 57 When the pump is returned, please pack it surely so as not to damage it by the impact, the vibration, and the high temperature and humidity environment, etc. from the outside. Please use the packing materials which were used at shipment from ULVAC KIKO, or use the packing materials having a same quality or better.
  • Page 58 No Text...

  • Page 59: Section 9 Troubleshooting

    ９ TROUBLESHOOTING ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● 9.1 Vacuum Pressure Rise 9.2 Abnormal Noise and/or Vibration...

  • Page 60: Vacuum Pressure Rise

    SECTION 9 TROUBLESHOOTING Vacuum Pressure Rise A rapid rise of vacuum pressure in the turbo molecular pump causes the internal motor of the turbo molecular pump to start braking and the ALARM lamp lights. Abnormal Noise and/or Vibration Should the turbo molecular pump ever generate abnormal noise and/or vibration, the turbo molecular pump operation is to be stopped immediately.
  • Page 61 神奈川県茅ケ崎市萩園２５００ showcase.ulvac.co.jp TEL:0467-89-2416 株式会社アルバック 規格品事業部 営業部 西日本営業課 〒532-0003 大阪府大阪市淀川区宮原３-３-３１上村ニッセイビル5F TEL:06-6397-2286 ULVAC ,Inc. Components Division https://showcase.ulvac.co.jp/en/ Please contact us for products, Service Base or other Inquiries from here. showcase.ulvac.co.jp/en ULVAC, Inc. Components Division 2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan TEL: +81-467-89-2261...

This manual is also suitable for:

Utm300a-msUtm400a-ms

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