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Appendix A: Specifications
*9: The exhaust system in the Cleanroom-model Manipulator draws air from the base interior and arm cover
interior.
A crack or other opening in the base unit can cause loss of negative air pressure in the outer part of the
arm, which can cause increased dust emission.
Cleanliness level : ISO Class 4 (ISO14644-1)
Exhaust system
Exhaust tube
ESD specification uses resin materials with antistatic treatment. This model controls adhesion of dust
due to electrification.
*10: In general use, Accel setting 100 is the optimum setting that maintains the balance of acceleration and
vibration when positioning. Although values larger than 100 can be set to Accel, it is recommended to
minimize the use of large values to necessary motions since operating the Manipulator continuously with
the large Accel setting may shorten the product life remarkably.
*11: Maximum AccelS setting value varies depending on the load. Refer to the table below for details.
Setting the value which exceeds the maximum AccelS causes an error. In such a case, check the setting
value.
Maximum AccelS setting value
40000
35000
30000
25000
25000
20000
15000
10000
5000
0
254
: Fitting for ø8 mm pneumatic tube
(Reference:C12 Manipulator 3.6 User Wires and Pneumatic Tubes)
60 L/min vacuum
: Polyurethane tube Outer diameter: ø8 mm (Inner diameter: ø5 to 6 mm)
17000
15000
11000
2
4
6
6500
8
10
12
End effector weight
14
(kg)
C series Rev.2
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