2.6.4 G10-65***: For S/N: 1**** or later
The following maintenance parts have been added for G10-65*** manipulator of S/N:
1**** or later.
Standard model
Cleanroom model
Protection model
G series Maintenance Rev.3
G10 G20 Maintenance 2. General Maintenance
G10-65*S*
Radiating unit
Heat sink
G10-65*C*
Radiating unit
Heat sink
G10-65*P*
Radiating unit
Heat sink
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