Table of Contents
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Index
A
AC INPUT connecter .......................... 9
B
backing vacuum pump ......................... 8
C
cooling water ............................. 8、31
G
gas purge ................................... 18
I
inlet flange ............................... 8、13
N
NET lamp .................................... 9
noise ....................................... 18
O
outlet flange .............................. 8、13
P
port for gas purge ............................. 8
POWER lamp ................................ 9
Protective ................................... 13
R
REMOTE connector .......................... 10
RESET button ................................ 9
ROTATION lamp .............................. 9
rotor ........................................ 13
S
SERIAL connector ........................... 10
Standards ................................... 21
STATUS lamp ................................ 9
T
touch-down bearing .......................... 13
U
UL ......................................... 21
V
VALVE connector ........................ 10、34
Index
Index-1
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Table of Contents
