Ulvac UTM3400A-MI-CWWX Manuals

Manuals and User Guides for Ulvac UTM3400A-MI-CWWX. We have 1 Ulvac UTM3400A-MI-CWWX manual available for free PDF download: Instruction Manual

Ulvac UTM3400A-MI-CWWX Instruction Manual (102 pages)

TURBO MOLECULAR PUMP

Brand: Ulvac | Category: Water Pump | Size: 3.02 MB

Copyrights and Disclaimers
3
Precautions for Safe Operation
4
Operating Precautions
7
Explanation of Label
9
Location of Label
10
Table of Contents
11
Table of Contents
12
Section 1 OUTLINE and DESCRIPTIONS
15
Outline
16
Descriptions
17
Outside Drawing of Pump Unit
17
Power Cable
18
Standard Accessories
18
Document List
19
Section 2 IDENTIFICATION and FUNCTION
21
Pump Main Unit
22
Control Panel
23
External I/F Panel
24
Section 3 CONSTRUCTION and PRINCIPLE
25
Pump Construction
26
Principle of Turbo Molecular Pumping
26
Controller
29
Section 4 SPECIFICATIONS
31
Standard Specifications for Pump Unit
32
The Maximum Allowable Flow Rate
35
Standards Fulfilled
35
Section 5 INSTALLATION
37
Installation
38
Pump Mounting Direction
38
Installation of the Pump
39
Instruction and Lifting Method
41
Installation of Turbo Molecular Pump
42
Example of Piping Connection
44
Connection of Exhaust Line
44
Connection of Cooling Water Line
45
Connection of Power Cable
46
Preparation for Operation
48
Interlock for Vacuum System
49
Notes on Transportation
49
Section 6 OPERATION
51
Overview
52
Introduction : Operation Modes
52
Startup Preparation
54
Start-Up Preparation Sequence in LOCAL Mode
54
Start-Up Preparation Sequence in REMOTE-Control Connector
54
Start-Up Preparation Sequence in Other Communication Means
55
Start-Up
56
Start-Up Sequence in LOCAL Mode
56
Start-Up Sequence in REMOTE-Control Connector
56
Start-Up Sequence in Other Communication Means
56
Shutting down
57
Preparations Prior to Shutting down Operation
57
Shutting down Sequence in LOCAL Mode
58
Shutting down Sequence in REMOTE-Control Connector
58
Shutting down Sequence in Other Communication Means
58
Variable Speed Operation
59
Outline
59
Operation from Start-Up to Low Speed Rotation
60
REMOTE Operation
60
Serial Interface Operation
60
Operation from Rated Speed Rotation to Low Speed Rotation
61
Remote Control Startup Procedure
61
Serial Interface Operation
61
Operation from Low Speed Rotation to Rated Speed Rotation
62
REMOTE Operation
62
Serial Interface Operation
62
Software Operation
63
Remote-Control Connector
65
Specification
65
Pin Assignment
66
Connector
67
Communication Specifications
68
Rs-232C
68
Transfer Specifications
68
Connector Specifications
68
Cable
68
Transfer Specifications
69
Connector Specifications
69
Cable
70
Connector
71
Section 7 GAS PURGE
73
Section 8 TURBO MOLECULAR PUMP RECONDITION
75
Recommended Maintenance Intervals
76
Turbo Molecular Pump Decontamination
77
Touch-Down Bearing Replacement
77
Check of the Rotor Blades
77
Power Supply Unit Parts Replacement
78
Turbo Molecular Pump Return Request
79
Vacuum Pressure Rise
84
Abnormal Noise And/Or Vibration
84
Nothing Happens after an Operation Is Made
85
Power Failures
86
Power Failure Counter-Operation
87
Alarm Detection Capabilities
88
Movement in Alarm Detection Capabilities (ALARM)
88
Movement in Alarm Detection Capabilities (WARNING)
88
Reset Procedure
88
Warranty Clauses
96
Warranty Items
96
Duration of Guarantee
96
Warrantee Scope
96
Response Procedure
96
Disclaimer
97
Others
97

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Ulvac UTM3400A-MI-CWWX Instruction Manual (102 pages)

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