Ulvac UTM300B Manuals

Ulvac UTM300B Manuals

Manuals and User Guides for Ulvac UTM300B. We have 1 Ulvac UTM300B manual available for free PDF download: Instruction Manual

Ulvac UTM300B Instruction Manual

Ulvac UTM300B Instruction Manual (113 pages)

TURBO MOLECULAR PUMP

Brand: Ulvac | Category: Water Pump | Size: 1.42 MB

Table of Contents

Introduction
2
Copyrights and Disclaimers
2
Precautions for Safe Operation
3
Operating Precautions
6
Explanation of Label
7
Location of Label
8
Warranty Period
9
Table of Contents
12
Table of Contents
13
Section 1 OUTLINE and DESCRIPTIONS
18
Outline
19
Descriptions
20
- Outside Drawing
  20
- Standard Accessories
  21
- Option Accessories
  21
Section 2 IDENTIFICATION and FUNCTION
22
Pump Main Unit
23
Local Control Panel
24
- Oparational Status
  25
- Operation Modes
  25
Interface Connector
26
Optional Accessories
27
- Venting Valve
  27
  - General Description
    27
  - Installation of Venting Valve
    27
  - Delay Venting Mode
    28
- Cooling Fan
  29
Section 3 CONSTRUCTION and PRINCIPLE
30
Pump Construction
31
Principle of Turbo Molecular Pumping
31
Control System
33
Section 4 SPECIFICATIONS
34
Specification
35
- Pump Main Unit
  35
- Power Supply Unit
  36
Maximum Inlet Pressure
37
Maximum Continuous Backing Pressure
37
Maximum Allowable Flow Rate
38
Environmental Conditions
39
Standards Fulfilled
39
Section 5 INSTALLATION
40
Installation
41
- Pump Mounting Direction
  41
- Installation of the Pump
  42
  - Instruction and Lifting Method
    43
  - Installation
    44
- Example of Piping Connection
  46
  - Connection of Exhaust Line
    46
Connection of Electrical Supply
47
- Connection I/F Connector with Interface Cable (Option)
  49
Interlock for Vacuum System
50
Notes on Transportation
50
Section 6 OPERATION
52
Overview
53
- Introduction : Operation Modes
  53
Startup Preparation
55
Start-Up
56
Shutting down
57
Variable Speed Operation
59
Software Operation
63
Interface Connector
64
- Specification
  64
- Pin Assignment
  66
- Connector
  66
- Setting for Interface Connector Operation
  67
- Delay Venting Mode
  67
Communication Specifications
68
- Transfer Specifications
  68
- Cable
  68
Section 7 GAS PURGE
70
Section 8 TURBO MOLECULAR PUMP RECONDITION
72
Recommended Maintenance Intervals
73
Turbo Molecular Pump Decontamination
74
Bearing Replacement
74
Check of the Rotor Blades
74
Controller Replacement
75
Turbo Molecular Pump Return Request
76
Section 9 TROUBLESHOOTING
78
Vacuum Pressure Rise
79
Abnormal Noise And/Or Vibration
79
Nothing Happens after an Operation Is Made
80
Power Failures
81
Alarm Detection Capabilities
82

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