Ulvac UTM3400 Series Instruction Manual page 89

Table 9-4 If the STATUS Orange Lamp Lights
Alarm
Alarm name
code
11 TD COUNTER LIMIT
12 PF COUNTER LIMIT
1
14 AC LOW VOLTAGE
15 POWER FAILURE
2
16 TMP:OVERLOAD
3
21 TMP TEMP/MB CABLE
24 TMP:OVER TEMP
4
22 TMP:SENSOR ERROR
46 MOTOR OVERSPEED
5
47 EI:R-SPEED ERROR
23 EI:MOTOR OVERCURR
34 EI:INV. OVERCURR
6
31 EI:BR OVERTEMP
32 EI:DC-DC OVERTEMP
7
35 EI:INV. OVERVOLT
36 EI:DC-DC LOW VOLT
8 37 EI:DC-DC OVERCURR
38 EI:DC-DC OVERVOLT
45 EI:BRAKE OVERTIME
9.5 Alarm Detection Capabilities
Possible cause
The number of high The touch-down bearing may have
speed or power failure deteriorated. Consult ULVAC or an
touch-downs has approved service company regarding
exceeded the replacement of the touch-down
prescribed number. bearing.
Power failure or Wait for the power to be restored. An
reduction in the power unfamiliar sound will be heard a few
supply voltage. minutes after a power failure. This
sound occurs when the rotor contacts
the protective bearing as magnetic
levitation cannot be maintained. This
is not an abnormal sound.
POWER switch was Wait about 5 seconds before turning
turned off by mistake. the POWER switch back on. Re-
acceleration is possible after resetting
and start-up.
Drop in rotation speed Check that the outlet and inlet
during rotation at rated pressures are below the specified
speed (increased maximum pressures.
internal pump Check for leakage.
pressure). Check that too much purge gas is not
flowing.
Check that process gas flow rate is
not too high.
High pump unit Check that the ambient temperature
temperature. around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Check that no load in excess of the
specified range is continuously
applied to the pump.
Rotation detection Check that equipment causing noise
signal from the motor is not used around the pump and
cannot be detected power cable.
correctly.
Overcurrent supplied Check that the ambient temperature
to the motor. around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Temperature increase Check that the ambient temperature
in the control system. around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Defective circuit in the Turn the power on again after the
power supply unit. pump stops. The power supply unit
must be repaired if the problem
occurs again.
Sec-
Remedy
tion
4.1
4.1
5.2
4.1
5.3
4.1
5.3
9
75