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SECTION 3 CONSTRUCTION AND PRINCIPLE
The movement of an object has 6 degrees of freedom. Levitation can be achieved in a turbo
molecular pump by controlling the following 5 degrees of freedom (excluding the rotational
degree (Z axis) of freedom).
3
Parallel movement
Rotation
14
Z
rotational axis
X
Z
X
Radial displacement
Z
X
Movement of rotor and restricted five degrees of freedom
Z
X
1
X
2
Fig.3-2 Outline of 5-Axes Control
Y
Z
Y
Axial displacement
Z
Y
5-axes control
① Ｘ
１
② Ｙ
１
③ Ｘ
２
④ Ｙ
Y
２
1
⑤ Ｚ
Y
2
Z
Y
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