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ULVAC
Inlet/Exhaust Filter for Vacuum Pump
For safe and efficient use of this filter, be sure to go to through
this manual before operation.
After reading the manual, keep it in your file for future
reference.
Specifications in this manual are subject to change without
notice due to future improvement.
SGT-100
SGT-200
Instruction Manual
Prior to use
Document No.43500-2-01-15
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Table of Contents
Related Manuals for Ulvac SGT-100
Summary of Contents for Ulvac SGT-100
- Page 1 Document No.43500-2-01-15 ULVAC Inlet/Exhaust Filter for Vacuum Pump SGT-100 SGT-200 Instruction Manual Prior to use For safe and efficient use of this filter, be sure to go to through this manual before operation. After reading the manual, keep it in your file for future reference.
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Page 2: Table Of Contents
Content 0. For safe operation …………………………………………………………………………0-1～04 1. General …………………………………………………………………………1 2. Specification …………………………………………………………………………1 3. Dimensional drawing ……………………………………………………………….1 4. Element ……………………………………………………………..2 5. Cautions in operation ………………………………………………………………2 6. Checking before operation ..……………………………………………………………..3 7. Installation ..……………………………………………………………………….3 8. How to replace the element ………………………………………………………………3 9. Maintenance ………………………………………………………………………...4 10. -
Page 3: For Safe Operation
Please read this instruction manual very carefully before using SGT – ① Before using SGT-100,200 please read this 『For safe operation』 and use it carefully. ② Ensure to observe the safe operation, preventing from the personal damage or damage to the equipment. - Page 4 (If not, it causes the problem for explosion or fire.) Ensure that do not touch to the system during operation. When remove the SGT-100, 200 after using the poisonous, reactive and inflammable gas from the piping system, purge with N...
- Page 5 Ensure that clamp parts or alike are tightened up before using it. (If not, it causes the problem of gas leakage, heat and explosion.) When overhaul the SGT, contact your local agency or ULVAC KIKO. Caution Ensure that not to wet the SGT. (If not, it causes the problem for malfunction of the equipment due to moisture.
- Page 6 How to operate the element Danger Ensure that this element is for the SGT-100, 200 uses only. Warning Ensure that not to press element. (If not, it causes the deformation of the element fabrics.) If failed to attach element SGT-100,200, contact your local agency or ULVAC KIKO.
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Page 7: General
1. General SGT-100, 200 is a disposing system using ion exchange fabrics as filter element which is chosen from our developed high quality resin group. SGT is for purifying the system from the reaction product in the exhaust gas. Since using the SGT-100,200, it reduces the maintenance problem from exhaust system and reduce the overloading to the duct equipment. -
Page 8: Element
4. Element 1) Specification Type Dimension Weight Color Package Outside φ65 x Insideφ25 x H80mm SDL-250 Yellow Filled with N 2) Characteristic of packaging and element The element is packaged with N gas, because the element has tendency to absorb the moisture. -
Page 9: Checking Before Operation
6. Checking before operation ① Ensure that install the INLET and OUTLET of the SGT properly. ② Ensure that the element is in the housing. Ensure that tighten the element properly. ③ Ensure that wing nut is tightened. ④ Ensure that clam for inlet and outlet are tightened. ⑤... -
Page 10: Maintenance
【 Procedure 】 ① When exhaust the poisonous gas (poisonous or inflammable), for safety reason, replace the gas in the SGT into N gas. ② Remove the wing nut and the lid. ③ Remove the wing nut and upper support disc and replace the element. ④... -
Page 11: Caution
･ SGT leak check for Good Satisfactory piping system Unsatisfactory Repair Check the foreign Foreign body Remove body (visual look) No foreign body Satisfactory ※ Element is completely sealed with degas condition by ULVAC KIKO. Open the package just before using SGT-100, 200. -
Page 12: Warranty
This warranty is limited to repair or replacement of defective parts. Conclusion This manual contains only general information about filter and operation. Therefore, if you come up with any questions or trouble, contact your local agency or ULVAC KIKO. - Page 13 1-10-4, Kitashinyokohama, Kohoku-ku, Yokohama-shi, Kanagawa Prf. Japan TEL(81)45-533-0509 FAX(81)45-533-0512 Miyazaki Branch 291-7 Chausubaru, Saito-shi, Miyazaki Prf. Japan TEL(81)983-42-4135 FAX(81)983-43-2159 ULVAC GmbH Klausnerring 4 85551 Kirchheim b. München, Germany TEL(49)89-96-0909-0 FAX(49)89-96-0909-96 ULVAC KIKO,Inc. www.ulvac-kiko.com HEAD OFFICE/ Miyazaki Plant 291-7 Chausubaru, Saito-shi, Miyazaki Prf. Japan...
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