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SECTION 4 SPECIFICATIONS
Installation conditions
(Refer to UL/EN 61010-1 standard)
Environmental temperatures
Relative humidity
(Note 1) Do not use corrosive gasses because there is a possibility that the rotor blade is damaged
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by corrosion.
(Note 2) Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable
outlet pressure cannot be satisfied at same time.
(Note 3) Without a protective net. Pumping speed for N
(Note 4) The outlet port of the turbo molecular pump should face horizontally or vertically when
installing the pump horizontally and obliquely. (Refer to Section 5.1.1 "Pump Mounting
Direction" for detail.)
(Note 5) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 6) The time can be changed to 2 seconds from 1 second.
(Note 7) Temperature without dew condensation. Refer to Section 5.3 "Preparation for Operation".
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Use : Indoor, Altitude max : 2000 m,
Overvoltage category III, Pollution degree 2
IP classification 40
Operation : 10 to 40 degrees C. /
Storage : -25 to 70 degrees C. (No dew condensation)
40 tso 80 %RH
is 2900 L/s with a protective net.
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