Ulvac UTM-MS Series Manuals

Manuals and User Guides for Ulvac UTM-MS Series. We have 1 Ulvac UTM-MS Series manual available for free PDF download: Instruction Manual

Ulvac UTM-MS Series Instruction Manual

Ulvac UTM-MS Series Instruction Manual (61 pages)

Turbo Molecular Pump

Brand: Ulvac | Category: Water Pump | Size: 3.38 MB

Table of Contents

Copyrights and Disclaimers
3
Precautions for Safe Operation
4
Operating Precautions
7
Explanation of Label
8
Location of Label
9
Installation Precautions
10
Part Replacement
10
Air Cooled Turbo Molecular Pump
11
Table of Contents
13
Section 1 OUTLINE and DESCRIPTIONS
17
Outline
18
Descriptions
19
Outside Drawing
19
Standard Accessories
23
Section 2 IDENTIFICATION and FUNCTION
25
Pump Main Unit
26
Section 3 CONSTRUCTION and PRINCIPLE
27
Pump Construction
28
Principle of Turbo Molecular Pumping
28
Section 4 SPECIFICATIONS
31
Standard Specifications for Pump Unit
32
Section 5 INSTALLATION
35
Installation
36
Pump Mounting Direction
36
Installation of the Pump
37
Example of Piping Connection
41
Center of Gravity of the Pump
42
Connection of the Pump to the Controller
43
Interlock for Vacuum System
44
Notes on Transportation
44
Section 6 OPERATION
45
Outline
46
Introduction
46
Start-Up Preparation
47
Start-Up
47
Start-Up Sequence
47
Shutting down
48
Baking Operation
49
Section 8 TURBO MOLECULAR PUMP RECONDITION
53
Recommended Maintenance Intervals
54
Turbo Molecular Pump Decontamination
55
Touch-Down Bearing Replacement
55
Check of the Rotor Blades
55
Turbo Molecular Pump Return Request
56
Section 9 TROUBLESHOOTING
59
Vacuum Pressure Rise
60
Abnormal Noise And/Or Vibration
60

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