Ulvac UTM3400 Series Instruction Manual page 33

Turbo molecular pump
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Alarm history
Instantaneous power interruption
(Note 6)
Water valve for dew interlock
Alarms
Alarm detection
Warnings
Alarms
Protective functions
Warnings
Voltage
Maximum power
Insulation
Input electric
withstand
power
voltage
Short circuit
current ratings
(SCCR)
Flow rate
Pressure
Temperature
Water (Note 7)
Water quality
Admissible ambient
Radial direction
magnetic field
Axial direction
4.1 Standard Specifications for Pump Unit
Remembers date, time, and description of last 99 alarm events.
If power interruption is 1 second or less, pre-interruption
functions are maintained. If interruption exceeds 1 second, the
brake is activated, which allows the pump to be restarted after
resetting.
This valve is closed during power supply OFF, and the coolant
water is stopped.
This valve is opened during power supply ON, and the coolant
water is supplied.
Pump temperature, Pump startup error, Overload and
Overspin for motor, Failure of magnetic bearing,
Control system malfunction (Overtemperature inside control
system or failure of drive circuit), Power interruption,
Dew condensation, etc.
Failure of magnetic bearing, Control system malfunction
(Overtemperature inside control system),
Dew condensation (Water valve close.)
STATUS orange lamp illuminates.
Power Interruption Alarm :
Decelerated while maintaining levitation using regenerative
power.
After decelerating to specified low speed, levitation is
stopped and rotor is supported by touchdown bearing. When
power is restored, the pump can be restarted by resetting.
Dew Alarm :
The pump is decelerated after dew condensation alarm is
detected.
When other alarms occur :
Stops operation or decelerates. Magnetic levitation is
continued.
STATUS orange lamp flashes and pump continues to function.
(Dew Warning : Water valve is closed.)
Single phase 200 to 240 VAC ±10 % (50 / 60 Hz ± 2 Hz)
1500 V, 1 minute
0.2 to 0.4 MPa
19 to 30 degrees C. (above dew point)
Non-corrosive industrial water
Solid particle size (Max) : 0.025 mm
PH (@25 degrees C.) : 6.5-8.2
Electrical conductivity (@25 degrees C.) : 100-800μS/cm
(Electrical resistivity : 1250-10000 Ω•cm)
1.2 kVA
200 A
3 to 4 L/min
2
3 mT
15 mT
4
19

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