Ulvac UTM3400 Series Instruction Manual page 92

SECTION 9 TROUBLESHOOTING
Alarm
Alarm name
code
11 TD COUNTER LIMIT
12 PF COUNTER LIMIT
14 AC LOW VOLTAGE
15 POWER FAILURE
16 TMP:OVERLOAD
21 TMP TEMP/MB CABLE
22 TMP:SENSOR ERROR
23 EI:MOTOR OVERCURR
24 TMP:OVER TEMP
9
30 EI:CONT. TEMP ERR
32 EI:DC-DC OVERTEMP
34 EI:INV. OVERCURR
35 EI:INV. OVERVOLT
36 EI:DC-DC LOW VOLT
37 EI:DC-DC OVERCURR
38 EI:DC-DC OVERVOLT
39 EI:DEW ERROR
43 EI:PARAM ERROR
44 EI:CPU ERROR
45 EI:BRAKE OVERTIME
46 MOTOR OVERSPEED
47 EI:R-SPEED ERROR
48 EI:ACCEL OVERTIME
49 TMP:CAN NOT START
51 MB:VIBRATION2 X1
52 MB:VIBRATION2 Y1
53 MB:VIBRATION2 X2
54 MB:VIBRATION2 Y2
55 MB:VIBRATION2 Z
78
Table 9-6 Table of Alarms
Possible cause
Counts of the high speed touch-down counter
exceeded the specified number.
Counts of the power failure touchdown counter
exceeded the specified number.
Fall in AC input power voltage.
Power failure.
After accelerating to 80 % of the designated
speed or low-speed setting, the speed dropped
below 80 % due to overloading etc.
Increased pump drive motor temperature.
Pump rotation signal could not be detected
correctly.
Overcurrent ran through the motor.
Increased pump Temperature
Increased temperature inside the control system Deceleration
Increased temperature inside control system.
Overcurrent ran through the motor.
Defective circuit.
Defective circuit.
Defective circuit.
Defective circuit.
Dew ERROR
Stored parameters are not correct.
Error in the CPU for inverter control.
Pump does not stop within the specified time
after the stop operation.
Pump rotation speed is too high.
Pump rotation speed cannot be detected.
Pump does not accelerate to 80 % of the
designated speed or low-speed setting within
the specified time after start-up.
Pump fails to rotate within 2 minutes after start-
up.
Continuous excessive vibration of the magnetic
bearing.
Protective action
Start-up impossible
(detected during
power supply self-
diagnostics)
Regenerative
braking
Deceleration
Free run
(motor stop)
Deceleration
Free run
(motor stop)
Regenerative
braking
Deceleration
Deceleration
Start-up impossible
(detected during
power supply self-
diagnostics)
Free run
(motor stop)
Deceleration