Ulvac UTM1600 Series Manuals

Manuals and User Guides for Ulvac UTM1600 Series. We have 1 Ulvac UTM1600 Series manual available for free PDF download: Instruction Manual

Ulvac UTM1600 Series Instruction Manual (108 pages)

TURBO MOLECULAR PUMP

Brand: Ulvac | Category: Water Pump | Size: 3.46 MB

Copyrights and Disclaimers
3
Precautions for Safe Operation
4
Operating Precautions
8
Explanation of Label
9
Location of Label
10
Table of Contents
11
Table of Contents
12
Section 1 OUTLINE and DESCRIPTIONS
15
Outline
16
Descriptions
17
Outside Drawing of Pump Main Unit
17
UTM1600 Series Outside Drawing
17
UTM1200 Series Outside Drawing
18
Power Cable
19
Standard Accessories
19
Document List
20
Section 2 IDENTIFICATION and FUNCTION
21
Pump Main Unit
22
AC INPUT Panel
23
Local Control Panel
24
External I/F Panel
25
Section 3 CONSTRUCTION and PRINCIPLE
27
Pump Construction
28
Principle of Turbo Molecular Pumping
28
Controller
31
Section 4 SPECIFICATIONS
33
Standard Specifications for Pump Unit
34
The Maximum Allowable Gas Throughput
36
Environmental Conditions
36
Standards Fulfilled
37
Section 5 INSTALLATION
39
Installation
40
Pump Mounting Direction
40
Installation of the Pump
41
Instruction and Lifting Method
43
Installation of UTM1600 Series
44
Installation of UTM1200 Series
46
Example of Piping Connection
48
Connection of Exhaust Line
48
Connection of Cooling Water Line
49
Connection of Power Cable
50
Preparation for Operation
52
Interlock for Vacuum System
53
Notes on Transportation
53
Section 6 OPERATION
55
Overview
56
Introduction : Operation Modes
56
Startup Preparation
58
Start-Up Preparation Sequence in LOCAL Mode
58
Start-Up Preparation Sequence in REMOTE-Control Connector
58
Start-Up Preparation Sequence in Other Communication Means
59
Start-Up
60
Start-Up Sequence in LOCAL Mode
60
Start-Up Sequence in REMOTE-Control Connector
60
Start-Up Sequence in Other Communication Means
60
Shutting down
61
Preparations Prior to Shutting down Operation
61
Shutting down Sequence in LOCAL Mode
62
Shutting down Sequence in REMOTE-Control Connector
62
Shutting down Sequence in Other Communication Means
62
Variable Speed Operation
64
Outline
64
Operation from Start-Up to Low Speed Rotation
65
REMOTE Operation
65
Serial Interface Operation
65
Operation from Rated Speed Rotation to Low Speed Rotation
66
Remote Control Startup Procedure
66
Serial Interface Operation
66
Operation from Low Speed Rotation to Rated Speed Rotation
67
REMOTE Operation
67
Serial Interface Operation
67
Software Operation
68
Remote-Control Connector
70
Specification
70
Pin Assignment
71
Connector
72
Communication Specifications
73
Rs-232C
73
Transfer Specifications
73
Connector Specifications
73
Cable
73
Transfer Specifications
75
Connector Specifications
75
Cable
75
Connector
77
Recommended Maintenance Intervals
82
Turbo Molecular Pump Decontamination
83
Touch-Down Bearing Replacement
83
Check of the Rotor Blades
83
Power Supply Unit Parts Replacement
84
Turbo Molecular Pump Return Request
85
Section 9 TROUBLESHOOTING
89
Vacuum Pressure Rise
90
Abnormal Noise And/Or Vibration
90
Nothing Happens after an Operation Is Made
91
Power Failures
92
Power Failure Counter-Operation
93
Alarm Detection Capabilities
94
Movement in Alarm Detection Capabilities (ALARM)
94
Movement in Alarm Detection Capabilities (WARNING)
94
Reset Procedure
94
Warranty Clauses
102
Warranty Items
102
Duration of Guarantee
102
Warrantee Scope
102
Response Procedure
102
Disclaimer
103
Others
103

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Ulvac UTM1600 Series Instruction Manual (108 pages)

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