Ulvac UTM3400 Series Instruction Manual page 93

Alarm
Alarm name
code
56 MB:VIBRATION1 X1
57 MB:VIBRATION1 Y1
58 MB:VIBRATION1 X2
59 MB:VIBRATION1 Y2
60 MB:VIBRATION1 Z
61 MB:SENSOR ERR. X1
62 MB:SENSOR ERR. Y1
63 MB:SENSOR ERR. X2
64 MB:SENSOR ERR. Y2
65 MB:SENSOR ERR. Z
66 MB:DSP ERROR
67 MB:DSP OVERFLOW
68 MB:BALANCE AXIS1
69 MB:BALANCE AXIS2
9.5 Alarm Detection Capabilities
Possible cause
Excessive magnetic bearing vibration.
Abnormal output signal from the magnetic
bearing sensor.
Error in the DSP for magnetic bearing control.
Overflow in the magnetic bearing control
calculations.
Rotor is out of balance.
Protective action
Deceleration
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