Ulvac UTM2300A-MI-BVWX Molecular Pump Manuals

Manuals and User Guides for Ulvac UTM2300A-MI-BVWX Molecular Pump. We have 1 Ulvac UTM2300A-MI-BVWX Molecular Pump manual available for free PDF download: Instruction Manual

Ulvac UTM2300A-MI-BVWX Instruction Manual

Ulvac UTM2300A-MI-BVWX Instruction Manual (102 pages)

TURBO MOLECULAR PUMP

Brand: Ulvac | Category: Water Pump | Size: 2 MB

Table of Contents

Copyrights and Disclaimers
3
Precautions for Safe Operation
4
Operating Precautions
7
Explanation of Label
9
Location of Label
10
Table of Contents
11
Table of Contents
12
Section 1 OUTLINE and DESCRIPTIONS
15
Outline
16
Descriptions
17
- Outside Drawing of Pump Unit
  17
- Power Cable
  18
- Standard Accessories
  18
- Document List
  19
Section 2 IDENTIFICATION and FUNCTION
21
Pump Main Unit
22
Control Panel
23
External I/F Panel
24
Section 3 CONSTRUCTION and PRINCIPLE
25
Pump Construction
26
Principle of Turbo Molecular Pumping
26
Controller
29
Section 4 SPECIFICATIONS
31
Standard Specifications for Pump Unit
32
The Maximum Allowable Flow Rate
35
Standards Fulfilled
35
Section 5 INSTALLATION
37
Installation
38
Connection of Power Cable
46
Preparation for Operation
48
Interlock for Vacuum System
49
Notes on Transportation
49
Section 6 OPERATION
51
Overview
52
- Introduction : Operation Modes
  52
Startup Preparation
54
Start-Up
56
Shutting down
57
Variable Speed Operation
59
Software Operation
63
Remote-Control Connector
65
- Specification
  65
- Pin Assignment
  66
- Connector
  67
Communication Specifications
68
- Rs-232C
  68
  - Transfer Specifications
    68
  - Connector Specifications
    68
  - Cable
    68
  - Transfer Specifications
    69
  - Connector Specifications
    69
  - Cable
    70
- Connector
  71
Section 7 GAS PURGE
73
Section 8 TURBO MOLECULAR PUMP RECONDITION
75
Recommended Maintenance Intervals
76
Turbo Molecular Pump Decontamination
77
Touch-Down Bearing Replacement
77
Check of the Rotor Blades
77
Power Supply Unit Parts Replacement
78
Turbo Molecular Pump Return Request
79
Vacuum Pressure Rise
84
Abnormal Noise And/Or Vibration
84
Nothing Happens after an Operation Is Made
85
Power Failures
86
- Power Failure Counter-Operation
  87
Alarm Detection Capabilities
88
Warranty Clauses
96
Warranty Items
96
Duration of Guarantee
96
Warrantee Scope
96
Response Procedure
96
Disclaimer
97
Others
97

Advertisement

Advertisement

Related Products

Ulvac Categories

Water Pump Air Compressor

Power Supply

Power Supply Measuring Instruments Industrial Equipment

More Ulvac Manuals