Ulvac UTM3400 Series Instruction Manual page 91

Table 9-5 If the STATUS Orange Lamp Flashes
Alarm
Alarm name
code
78 TMP:VALVE WARN
1
79 EI:DEW WARN
2
80 EI:CONT.TEMP.WARN
3
81 MB:SELFCHECK X1
82 MB:SELFCHECK Y1
4 83 MB:SELFCHECK X2
84 MB:SELFCHECK Y2
85 MB:SELFCHECK Z
86 MB:VIB. WARN. X1
87 MB:VIB. WARN. Y1
88 MB:VIB. WARN. X2
5
89 MB:VIB. WARN. Y2
90 MB:VIB. WARN. Z
91 MB:BALANCE WARN.1
6 92 MB:BALANCE WARN.2
94 MB:AIR RUSH B
7
95 MB:DSP WARNING
8
99 MAINTENANCE TIME
9
9.5 Alarm Detection Capabilities
Possible cause
Cable of water valve is Confirm the cable from water valve is
no connected surely connected to VALVE connector
correctly. of External I/F panel.
Internal condensation Check that the ambient temperature
and humidity around the pump and
the temperature of cooling water are
within the specified range.
Temperature increase Check that the ambient temperature
in the control system. around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Rattling of the Deterioration of the protective bearing
protective bearing is likely. Overhaul as soon as possible
becomes pronounced. to avoid damage to the protective
bearing in the event of a power failure
etc.
Transient strong Continuous operation is possible
external shock or However, if the shock or vibrations
vibrations. occur frequently, stop the pump and
remove the source of the shock or
vibrations; or re-examine the pump
mounting method.
Rotor inside the pump Adhesion of reaction products is a
is out of balance possibility. An overhaul is
recommended.
Atmospheric Create a vacuum system not allowing
penetration has atmospheric penetration by
occurred. reexamining the operating sequence
of the back pump and valves etc.
Abnormal operation of Check that the ambient temperature
circuit in the power around the pump is within the
supply unit. specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Check that equipment causing noise
is not used around the pump and
power cable.
Maintenance call timer Implement maintenance works
has reached the set prescribed by the customer, such an
time. overhaul. The alarm can be cancelled
by resetting the maintenance call
timer after implementing necessary
works.
Sec-
Remedy
tion
4.1
5.3
4.1
5.3
4.1
5.3
5.2
4.1
5.2
5.3
6.6
9
77