Ulvac UTM3400 Series Instruction Manual page 53

Turbo molecular pump
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Mode
LOCAL
POWER lamp flashes.
REMOTE
POWER lamp lights up. The pump can be started or stopped via a remote control
RS-232C
RS-485
Energization
(When the POWER switch is turned on, or when recovering from power failure)
(2) REMOTE mode
Hold down
the RESET button
(1) LOCAL mode
Fig.6-1 Operation Mode Transition Diagram
Table 6-1 LOCAL and REMOTE Modes
Lamp state
The pump can be started or stopped by holding down
the START/STOP button.
connector, serial connector (RS-232C, RS-485).
When using serial communication, the pump can be
started or stopped by sending an online request
command via the corresponding communication
specification.
To return from a communication mode to the REMOTE
mode, send an offline request command via the
corresponding communication specification.
Online command
/ Offline command
6.1 Overview
START/STOP procedure
(3) RS-232C mode
(4) RS-485 mode
6
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