Ulvac UTM3400 Series Instruction Manual page 90

SECTION 9 TROUBLESHOOTING
Alarm
code
39 EI:DEW ERROR
9
43 EI:PARAM ERROR
10
44 EI:CPU ERROR
66 MB:DSP ERROR
67 MB:DSP OVERFLOW
11
9
48 EI:ACCEL OVERTIME
12
49 TMP:CAN NOT START
13
51
MB:VIBRATION2 X1
52 MB:VIBRATION2 Y1
53 MB:VIBRATION2 X2
54 MB:VIBRATION2 Y2
55 MB:VIBRATION2 Z
14
56 MB:VIBRATION1 X1
57 MB:VIBRATION1 Y1
58 MB:VIBRATION1 X2
59 MB:VIBRATION1 Y2
60 MB:VIBRATION1 Z
61 MB:SENSOR ERR. X1
62 MB:SENSOR ERR. Y1
15 63 MB:SENSOR ERR. X2
64 MB:SENSOR ERR. Y2
65 MB:SENSOR ERR. Z
68 MB:BALANCE AXIS1
16
69 MB:BALANCE AXIS2
76
Alarm name Possible cause
Internal condensation
Defective circuit in the
power supply unit.
Abnormal operation of
circuit in the power
supply unit.
Rotation speed does
not increase at start-
up.
Pump does not rotate. Adhesion of reaction products or
Strong external shock
or vibrations.
The rotor does not
move due to adhering
matter or a damaged
touchdown bearing.
Rotor inside the pump
is out of balance.
Remedy
Check that the ambient temperature
and humidity around the pump and
the temperature of cooling water are
within the specified range.
Check there are no solids piled up in
the water valve.
Drive again after leave it for a while.
Turn the power on again after the
pump stops. The pump must be
repaired if the problem occurs again.
Check that the ambient temperature
around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Check that equipment causing noise
is not used around the pump and
power cable.
Check that the outlet and inlet
pressures are not too high.
Check for leakage.
Check that too much purge gas is not
flowing.
damage to the protective bearing is
the possible cause. Remove the
pump from the unit and check that the
rotor blades rotate smoothly at the
inlet. An overhaul is required if blades
do not rotate smoothly.
If the shock or vibrations are transient
re-acceleration is possible. If the
shock or vibrations occur frequently,
stop the pump and remove the source
of the shock or vibrations; or re-
examine the pump mounting method.
Remove the pump and check that the
rotor rotates smoothly. The pump
requires an overhaul if the rotor does
not rotate or the resistance to rotation
is large.
Adhesion of reaction products is a
possibility. An overhaul is required.
Sec-
tion
4.1
5.3
4.1
5.2
5.3
6.2
5.2