Ulvac UTM3400 Series Instruction Manual page 74

SECTION 7 GAS PURGE
This product includes a port for purging gasses in optional specification (Fig. 2-1 (2)). Though
not necessary for normal evacuation, use it to inject purging gas to increase maximum allowable
flow rate. A purge gas flow rate 30 mL/min is appropriate.
Be sure not to use the non-chemical type pumps to exhaust of corrosive gasses such as
chlorine type or fluorine type.
Fig. 7-1 is an example of gas purge piping diagram. Use a filter of 5 μm or less in element size.
Use flow control valve to control the flow rate.
Start Gas Supply
Stop Gas Supply
7
Gas Type
Fig.7-1 Gas Purging Method (adaptor with Φ0.5 mm orifice)
KF10 (Clamp / Centering with O-ring)
KF10 (Dust cap)
UJR 6.35 (Male)
SWAGELOK Φ6.35
4-VCR (Female)
60
After starting backing vacuum pump, but before exhausting process gas
After thoroughly exhuasting process gas, but before shutting off backing
vacuum pump
Nitrogen, purity 4N (99.99 %) or better
Table 7-1 Table of Gas Purge Adaptor
Joint Orifice size
Φ0.5 mm GP ADAPTOR, 0.5 KF10
Φ0.5 mm GP ADAPTOR 0.5, KF DUST CAP
Φ0.5 mm GP ADAPTOR, 0.5 UJR
Φ0.5 mm GP ADAPTOR, 0.5 SWG
Φ0.5 mm GP ADAPTOR, 0.5 VCR
Description