Ulvac UTM1600 Series Instruction Manual
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Ulvac UTM1600 Series Instruction Manual

Turbo molecular pump
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YK17-0012-101-00 (263-43467)
INSTRUCTION MANUAL
Turbo Molecular Pump
Model
UTM1600 Series
UTM1200 Series
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

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  • Page 1 YK17-0012-101-00 (263-43467) INSTRUCTION MANUAL Turbo Molecular Pump Model UTM1600 Series UTM1200 Series Before using this product, be sure to read this operation manual. Keep this manual with care to use at any time. ULVAC, Inc. Components Division http://www.ulvac.co.jp/...
  • Page 2 This page is intentionally left blank.

  • Page 3: Copyrights And Disclaimers

    Every effort has been made to prepare an accurate and complete manual, but if an error or omission should be discovered, revisions might not be possible immediately. ULVAC does not take responsibility for any effects that may result from the use of this manual. Copyright 2017 ULVAC, Inc.All rights reserved.

  • Page 4: Precautions For Safe Operation

    WARNING Turbo molecular pump repair and/or power supply repair can be very hazardous. Only trained technicians who are authorized by ULVAC may do service of products. WARNING Neither overhaul nor modify the pump proper and power supply unit without admission.
  • Page 5 ・ Improper turbo molecular pump use may be hazardous to operator's health in applications not recommended or approved by ULVAC. In the event removal of the turbo molecular pump from an application is required, full protective measures including purging of the turbo molecular...
  • Page 6 　 WARNING Pacemaker wearers must stay away. ・ Pacemaker may malfunction when pacemaker wearers approach the area whose magnitude of the magnetic field is more than 5 gauss. ・ The area filled with slanted lines in the drawing on the right shows the area where the magnitude of the magnetic field is beyond 5 gauss.
  • Page 7 　 CAUTION The standard power input voltage is 200 to 240 VAC ± 10 %. Connection of the control system to the incorrect input voltage can cause damage to the equipment. Supply the power via a circuit breaker (rating 15 A). Please provide PE (Protective Earth) connection to the terminal of a "PE" marked wire in final application.

  • Page 8: Operating Precautions

    　 CAUTION The following "CAUTIONS" are to prevent operation anomalies. ○ Operating Precautions (1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo molecular pump is in operation. (2) Protect the pump from any and all types of impact during operation. Impacts can also be transmitted via the flange, so be careful of impacts near the pump as well.

  • Page 9: Explanation Of Label

    (6) SECURITY Seal This label certificates that the product was made or maintained by ULVAC or by ULVAC authorized facility. In case "this label is removed" or "there is a mark showing once this label has been removed", ULVAC warranty shall not be applied to...

  • Page 10: Location Of Label

    　 ○ Location of Label viii...

  • Page 11: Table Of Contents

    Outside Drawing of Pump Main Unit......3 1.2.1.1 UTM1600 Series Outside Drawing ......3 1.2.1.2 UTM1200 Series Outside Drawing .

  • Page 12: Table Of Contents

    Instruction and Lifting Method......29 5.1.2.2 Installation of UTM1600 Series......30 5.1.2.3 Installation of UTM1200 Series.
  • Page 13 Table of contents 6.2 Startup Preparation ....... . 44 6.2.1 Start-up Preparation Sequence in LOCAL Mode .
  • Page 14 Table of contents Section 7 GAS PURGE Section 8 TURBO MOLECULAR PUMP RECONDITION 8.1 Recommended Maintenance Intervals ....68 8.2 Turbo Molecular Pump Decontamination ....69 8.3 Touch-down Bearing Replacement .

  • Page 15: Section 1 Outline And Descriptions

    OUTLINE AND DESCRIPTIONS 1.1　Outline 1.2　Descriptions 1.2.1　Outside Drawing of Pump Main Unit 1.2.1.1　UTM1600 Series Outside Drawing 1.2.1.2　UTM1200 Series Outside Drawing 1.2.2　Power Cable 1.2.3　Standard Accessories 1.2.4　Option 1.2.5　Document List...

  • Page 16: Outline

    SECTION 1　OUTLINE AND DESCRIPTIONS Outline The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a backing vacuum pump to create a high vacuum in a vacuum chamber. Typical Applications ; Semiconductor equipments, Industrial equipments, R&D applications, The other ultra high vacuum applications.

  • Page 17: Descriptions

    1.2　Descriptions Descriptions 1.2.1 Outside Drawing of Pump Main Unit 1.2.1.1 UTM1600 Series Outside Drawing Description Inlet flange n-Φd ΦE ΦF UTM1600A-MI-AVWX VG200 263.5 8-Φ13 Φ300 Φ270 UTM1600A-MI-AWWX VG250 263.5 12-Φ13 Φ350 Φ320 UTM1600A-MI-AFWX ISO200F 263.5 12-Φ11 Φ285 Φ260 UTM1600A-MI-AGWX ISO250F 263.5...

  • Page 18: Utm1200 Series Outside Drawing

    SECTION 1　OUTLINE AND DESCRIPTIONS 1.2.1.2 UTM1200 Series Outside Drawing Description Inlet flange n-Φd ΦE ΦF UTM1200A-MI-AVWX VG150 328.5 8-Φ11 Φ235 Φ210 UTM1200A-MI-AFWX ISO160F 441.5 296.5 8-Φ11 Φ225 Φ200 366.5 Fig.1-2　UTM1200 Series...

  • Page 19: Power Cable

    3 AC CABLE, 15 MT 4 AC CABLE, 20 MT • Connector 5 AC CONNECTOR SET • Clamp • Assembling procedure 1.2.3 Standard Accessories UTM1600 Series Description Note VG200 : O-ring gasket Gasket (inlet flange) VG250 : O-ring gasket (Note 1)

  • Page 20: Document List

    SECTION 1　OUTLINE AND DESCRIPTIONS 1.2.4 Option Please select if necessary. Instruction Manual Description Notes 1 Instruction manual for UTM1200/1600 series Booklet English Instruction manual for Serial communication (for UTM1200/1600/ English 4300 series) Booklet Gas Purge Adaptor Joint Orifice size Description 1 KF10 (Clamp / Centering with O-ring) Φ0.5 mm GP ADAPTOR, 0.5 1303 KF...

  • Page 21: Section 2 Identification And Function

    IDENTIFICATION AND FUNCTION 2.1　Pump Main Unit 2.2　AC INPUT Panel 2.3　Local Control Panel 2.4　External I/F Panel...

  • Page 22: Pump Main Unit

    SECTION 2　IDENTIFICATION AND FUNCTION Pump Main Unit Fig. 2-1　Pump Main Unit (1) INLET FLANGE ........Inlet flange, joint the turbo molecular pump, VG200, VG250, ISO200F, ISO250F, VG150 and ISO160F are available. (2) PORT FOR GAS PURGE..... Gas purge adaptor port, KF10, UJR 6.35, Swagelok Φ6.35 and 4-VCR are available.

  • Page 23: Ac Input Panel

    2.2　AC INPUT Panel AC INPUT Panel Fig. 2-2　Outline View of AC INPUT Panel (1) AC INPUT connecter ......Power cable receptacle (2) POWER switch ........Power switch (3) VALVE connector........Water valve connector (Refer to Section 5.3 "Preparation for Operation".)

  • Page 24: Local Control Panel

    SECTION 2　IDENTIFICATION AND FUNCTION Local Control Panel Fig. 2-3　Switch and LED (1) START/STOP button ....Push to accelerate or decelerate, when operation mode is in LOCAL MODE, control by maintained push (about 2 seconds). (2) RESET button......When occur ALARM or WARNING, after remedying the cause of the ALARM, an abnormal state is released by pushing button.

  • Page 25: External I/F Panel

    2.4　External I/F Panel External I/F Panel Fig. 2-4　Outline View of External I/F Panel (1) REMOTE connector......Connector for remote-control. (Refer to Section 6.7 "Remote-control Connector".) (2) SERIAL connector ......Connector for RS-232C or RS-485 communication. (Refer to Section 6.8 "Communication Specifications".) All interfaces are SELV (safety extra-low voltage).
  • Page 26 2.4　External I/F Panel This page is intentionally left blank.

  • Page 27: Section 3 Construction And Principle

    CONSTRUCTION AND PRINCIPLE 3.1　Pump Construction 3.2　Principle of Turbo Molecular Pumping 3.3　Controller...

  • Page 28: Pump Construction

    SECTION 3　CONSTRUCTION AND PRINCIPLE Pump Construction Fig. 3-1 is a sectional drawing of a magnetic bearing type turbo molecular pump. The built-in high frequency motor (1) is accelerated to the specified revolutions (speed) by the high frequency power supply unit. Rotor blades (3) are fitted onto the drive shaft (2) and the stator blades (4) are arranged in between the rotor blades.
  • Page 29 3.2　Principle of Turbo Molecular Pumping Fig.3-1　Pump Sectional Drawing (1) High frequency motor (6) Radial magnetic bearing (11) Outlet flange (2) Drive shaft (7) Axial magnetic bearing (12) Protective net (3) Rotor blade (8) Touch-down bearing (13) Cooling water pipeline (4) Stator blade (9) Gap sensor (14) Controller (5) Spacer...
  • Page 30 SECTION 3　CONSTRUCTION AND PRINCIPLE The movement of an object has 6 degrees of freedom. Levitation can be achieved in a turbo molecular pump by controlling the following 5 degrees of freedom (excluding the rotational degree (Z axis) of freedom). rotational axis Parallel movement Radial displacement Axial displacement...

  • Page 31: Controller

    3.3　Controller Controller This product has a controller comprising a magnetic bearing control system that levitates the rotors in a specific position inside the turbo molecular pump, a high frequency power supply system that rotates the rotor at a specific speed, and a pump temperature control system. The magnetic bearing control system levitates the rotor at a given position by using a gap sensor inside the pump to detect the rotor position and controlling the electromagnet current.
  • Page 32 3.3　Controller This page is intentionally left blank.

  • Page 33: Section 4 Specifications

    SPECIFICATIONS 4.1　Standard Specifications for Pump Unit 4.2　The Maximum Allowable Gas Throughput 4.3　Environmental Conditions 4.4　Standards Fulfilled...

  • Page 34: Standard Specifications For Pump Unit

    SECTION 4　SPECIFICATIONS Standard Specifications for Pump Unit Turbo molecular pump model UTM1600 Series (Note 1) UTM1200 Series (Note 1) VG200 / VG250 / Inlet flange VG150 ISO160F ISO200F ISO250F Outlet flange KF40 Mass 41 kg 43 kg Ultimate pressure (after baking)
  • Page 35 4.1　Standard Specifications for Pump Unit Pump temperature, Pump startup error, Overload and Overspin for motor, Failure of magnetic bearing, Alarm Power supply malfunction (Overtemperature inside control Alarm detection system or failure of drive circuit), Power interruption etc. Failure of magnetic bearing, Warning Dew condensation (Refer to Section 5.3) Alarm lamp illuminates.

  • Page 36: The Maximum Allowable Gas Throughput

    0 mL/min 2200 mL/min (Note 1) Consult your ULVAC representative before using gasses except shown in above table. (Note 2) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.) (Note 3) The maximum allowable gas throughput depends on the gas type, the temperature of a flange connecting to pump inlet flange and the gas purge flow rate.

  • Page 37: Standards Fulfilled

    4.4　Standards Fulfilled Standards Fulfilled Safety EN 61010-1 UL 61010-1 EN 1012-2 EN 61326-1 Class A EN 61000-3-2 Class A EN 61000-6-2...
  • Page 38 4.4　Standards Fulfilled This page is intentionally left blank.

  • Page 39: Section 5 Installation

    INSTALLATION 5.1　Installation 5.1.1　Pump Mounting Direction 5.1.2　Installation of the Pump 5.1.2.1　Instruction and Lifting Method 5.1.2.2　Installation of UTM1600 Series 5.1.2.3　Installation of UTM1200 Series 5.1.3　Example of Piping Connection 5.1.3.1　Connection of Exhaust Line 5.1.3.2　Connection of Cooling Water Line 5.2　Connection of Power Cable 5.3　Preparation for Operation 5.4　Interlock for Vacuum System...

  • Page 40: Installation

    SECTION 5　INSTALLATION Installation 5.1.1 Pump Mounting Direction This turbo molecular pump can be installed in vertical, horizontal, inverted, or oblique position. The outlet port of the turbo molecular pump should face horizontally or vertically when installing the pump horizontally and obliquely. When an installation direction is non-appropriate, reliability of operation may deteriorate.

  • Page 41: Installation Of The Pump

    5.1　Installation 5.1.2 Installation of the Pump WARNING Do not operate the turbo molecular pump until safety is confirmed. ・ The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown torque should be generated when abnormality occurs in the pump by any chance. Incidental accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by insufficient method.
  • Page 42 SECTION 5　INSTALLATION NOTICE Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump would cause deterioration of adequate vacuuming performance. When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum pump, undertake proper anti-vibration measure.

  • Page 43: Instruction And Lifting Method

    5.1　Installation 5.1.2.1 Instruction and Lifting Method This product lift the pump in the manner shown in Fig. 5-2. Vacuum Vacuum chamber chamber PUMP PUMP Fig. 5-2　Lifting Method Table 5-1　Eyebolt Size Position Inlet flange Eyebolt size Number of eyebolts Remark VG200 VG250 VG150 Vertical...

  • Page 44: Installation Of Utm1600 Series

    UTM1600 Series 27500 N•m (Note 1) Rapid shutdown torque is the typical value measured by the ULVAC’s test condition. The torque to transmit to host equipment might be different according to the rigidity of host equipment. Host equipment should be designed to have enough margins in strength.
  • Page 45 5.1　Installation Fig. 5-5　How to Use of the Bolt Table 5-2　The Recommended Fixing Bolt Bolt-Nut (Half thread・All thread)・Tap Fixing method Only by the inlet flange Inlet flange VG250 ISO250F Bolt size, Quantity M12, 12 PC M10, 12 PC Material Stainless steel Grade A2-70 (JIS B 1054 / ISO-3506) Washer...

  • Page 46: Installation Of Utm1200 Series

    UTM1200 Series 27500 N•m (Note 1) Rapid shutdown torque is the typical value measured by the ULVAC’s test condition. The torque to transmit to host equipment might be different according to the rigidity of host equipment. Host equipment should be designed to have enough margins in strength.
  • Page 47 5.1　Installation Fig. 5-7　How to Use of the Bolt Table 5-4　The Recommended Fixing Bolt Bolt-Nut (Half thread・All thread)・Tap Fixing method Only by the inlet flange Inlet flange VG150 ISO160F Bolt size, Quantity M10, 8 PC Material Alloyed steel standardized in AMS6419 Grade (Tensile strength : 1931MPa, AMS6419) Washer...

  • Page 48: Example Of Piping Connection

    SECTION 5　INSTALLATION 5.1.3 Example of Piping Connection 5.1.3.1 Connection of Exhaust Line Connect a backing vacuum pump or its related pipe connection flange to the outlet flange of the pump. (Refer to Fig. 5-8) * marks are not attached to this turbo molecular pump set. Fig.

  • Page 49: Connection Of Cooling Water Line

    5.1　Installation 5.1.3.2 Connection of Cooling Water Line (1) Correctly connect the cooling water pipes so that the cooling water is supplied to IN port and discharged from the OUT port, as shown in Fig. 5-9. The valve to isolate (Lockout / Tagout) cooling water should be installed at user equipment.

  • Page 50: Connection Of Power Cable

    SECTION 5　INSTALLATION Connection of Power Cable CAUTION The standard power input voltage is 200 to 240 VAC ± 10 %. Connection of the control system to the incorrect input voltage can cause damage to the equipment. Supply the power via a circuit breaker (rating 15 A).
  • Page 51 5.2　Connection of Power Cable REFERENCE For the specified power voltage, refer to the side panel of the power supply unit. Fig. 5-12　Power Cable Table 5-6　Power Cable CONNECTION Wire color of power cable Green / Yellow Black White Location...

  • Page 52: Preparation For Operation

    SECTION 5　INSTALLATION Preparation for Operation (1) This product is a water cooled model. Always provide a flow of coolant water that meets the indicated specifications. (2) Make sure no water is leaking from the coolant lines. Do not spill coolant on the pump. (3) Make sure that there is no dew condensation and not high humidity environment at the location indicated in Fig.

  • Page 53: Interlock For Vacuum System

    (an air suspension truck, for example). Especially when passing by rough road, we recommend that the product is transported keeping the packing condition when it ships from ULVAC. When the product is put on the high temperature / humidity environment for a long time, it causes the breakdown of the product due to corrosion of mechanical parts or performance loss of electrical parts.
  • Page 54 5.5　Notes on Transportation This page is intentionally left blank.

  • Page 55: Section 6 Operation

    OPERATION 6.1　Overview 6.1.1　Introduction : Operation Modes 6.2　Startup Preparation 6.2.1　Start-up Preparation Sequence in LOCAL Mode 6.2.2　Start-up Preparation Sequence in REMOTE-control Connector 6.2.3　Start-up Preparation Sequence in Other Communication Means 6.3　Start-up 6.3.1　Start-up Sequence in LOCAL Mode 6.3.2　Start-up Sequence in REMOTE-control Connector 6.3.3　Start-up Sequence in Other Communication Means 6.4　Shutting Down 6.4.1　Preparations Prior to Shutting Down Operation 6.4.2　Shutting Down Sequence in LOCAL Mode...

  • Page 56: Overview

    SECTION 6　OPERATION Overview CAUTION Do not turn off the power during pump operation. If the power is turned off repeatedly, the touch-down bearing may need to be replaced. When the power is turned off during operation, levitation is maintained using regenerative power. After decelerating to a lower speed, levitation is stopped and the rotor is supported by the touch-down bearing.
  • Page 57 6.1　Overview Table 6-1　LOCAL and REMOTE Modes Mode Lamp state START/STOP procedure LOCAL POWER lamp flashes. The pump can be started or stopped by holding down the START/STOP button. REMOTE POWER lamp lights up. The pump can be started or stopped via a remote control RS-232C connector, serial connector (RS-232C, RS-485).

  • Page 58: Startup Preparation

    SECTION 6　OPERATION Startup Preparation NOTICE When turning the POWER switch on or off, a "clunk" sound may be heard from inside the pump. This sound is from the rotor inside the pump being levitated or de-levitated. This is normal. When the power is switched ON, the unit starts up in the REMOTE mode. It also starts up in the REMOTE mode when restoring power after a power interruption.

  • Page 59: Start-Up Preparation Sequence In Other Communication Means

    6.2　Startup Preparation 6.2.3 Start-up Preparation Sequence in Other Communication Means (1) Feed the cooling water into the cooling line. (2) Turn on the POWER switch and check that the POWER lamp. Under this condition, the rotor of the turbo molecular pump is levitated by the magnetic bearing. (3) Online command is demanded from the communication means and confirm the mode was switched to the communication means mode.

  • Page 60: Start-Up

    SECTION 6　OPERATION Start-up 6.3.1 Start-up Sequence in LOCAL Mode (1) Start-up begins when the Section 6.2.1 "Start-up Preparation Sequence in LOCAL Mode" is complete. (2) Maintained push the START/STOP button (Fig. 2-3 (1)). (3) Pump acceleration starts. The NORMAL lamp (Fig. 2-3 (4)) lights blinks. (4) When the rotational speed reaches 80 % rated value, the NORMAL lamp lights.

  • Page 61: Shutting Down

    6.4　Shutting Down Shutting Down CAUTION After having operated the turbo molecular pump for evacuation of corrosive gas, keep the pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by stopping the pump and dispersal of parts.

  • Page 62: Shutting Down Sequence In Local Mode

    SECTION 6　OPERATION 6.4.2 Shutting Down Sequence in LOCAL Mode (1) Maintained push the START/STOP button (Fig. 2-3 (1)) and check that the NORMAL lamp (Fig. 2-3 (4)) blinks slowly (approx. 1 Hx). (2) Wait until the NORMAL lamp (Fig. 2-3 (4)) goes out. (3) Turn off the POWER switch.
  • Page 63 6.4　Shutting Down REFERENCE The NORMAL lamp goes out, "ROTATION" signal (Refer to Table 6-4) turns off, or change to stop status when the pump rotational speed is 60 rpm or less. Turning off the POWER switch permits the pump rotor to be supported by the touch-down bearings.

  • Page 64: Variable Speed Operation

    SECTION 6　OPERATION Variable Speed Operation CAUTION When using the variable speed function to change the pump rotation rate, use a rotation rate that does not cause resonance with other devices installed at the site. 6.5.1 Outline (1) The rotational speed settings function sets the rotational speed by selecting between the NORMAL speed mode or LOW SPEED mode.

  • Page 65: Operation From Start-Up To Low Speed Rotation

    6.5　Variable Speed Operation 6.5.2 Operation from Start-up to Low Speed Rotation This is the procedure until low-speed rotation is achieved when the speed setting is made with the pump stopped. 6.5.2.1 REMOTE Operation (1) Start-up begins when the Section 6.2.2 "Start-up Preparation Sequence in REMOTE- control Connector"...

  • Page 66: Operation From Rated Speed Rotation To Low Speed Rotation

    SECTION 6　OPERATION 6.5.3 Operation from Rated Speed Rotation to Low Speed Rotation The following procedure is used to change the rotation speed setting and operate in the low- speed mode when currently operating at the rated speed or accelerating at a speed greater than low speed rotation.

  • Page 67: Operation From Low Speed Rotation To Rated Speed Rotation

    6.5　Variable Speed Operation 6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation This is the procedure to select normal speed operation during low speed rotation. 6.5.4.1 REMOTE Operation (1) Cancel the "LOW SPEED" signal (Refer to Table 6-4) inputted in the remote-control connector.

  • Page 68: Software Operation

    SECTION 6　OPERATION Software Operation NOTICE Settings data can be read and written via serial interface, but cannot be read or written via remote control connector. Software functions are indicated in Table 6-2 below. Table 6-2　Software Operating Functions Function Descripition Status Operation mode LOCAL, REMOTE or the other communication means...
  • Page 69 6.6　Software Operation (Note 1) List of run status. STATUS Descripition NORMAL Rotating at rated rotation speed ACCELERATION Accelerating BRAKE Decelerating STOP Stopped E-STOP Alarm is active (stopped) E-BRAKE Alarm is active (decelerating) E-IDLE Alarm is active (coasting motor is off)

  • Page 70: Remote-Control Connector

    SECTION 6　OPERATION Remote-control Connector 6.7.1 Specification This turbo molecular pump is provided with remote-control connector for connection with remote operation, ALARM signals, etc. (Refer to Fig. 6-2, Fig. 6-3, Table 6-3) For connection with this connector, cable with shield is necessary. The shield of the cable should be connected to case.

  • Page 71: Pin Assignment

    6.7　Remote-control Connector 6.7.2 Pin Assignment Table 6-4　Remote-control Signals Pin No. Operation Electric Name (Note 1) (Note 2) spec Starting operation on short-circuiting between GND START and pin No.1. (Note 3) Pump stop by opening GND and pin No.2. STOP (Note 3)(Note 5) Contact Resetting operation on short-circuiting between GND RESET (Note 4)

  • Page 72: Connector

    RS-232C and RS-485 operation. Use this setting such as when using hardware interlock. (Note 1) When set to EI-03, behavior of remote-control signals is the same as ULVAC Turbo Molecular Pump power supply "EI-xx03M" and "EI-R04" series. (Note 2) When set to SEMI E74, behavior of remote-control signals conform to SEMI E74 standard "Specification for Vacuum Pumps - Turbomolecular Pumps".

  • Page 73: Communication Specifications

    6.8　Communication Specifications Communication Specifications 6.8.1 RS-232C 6.8.1.1 Transfer Specifications Interface RS-232C Synchronous system Asynchronous Transmission rate 9600 bps (fixed) Start bit : 1 Data bits : 8 Character configuration Parity : None Stop bit : 1 Flow control None 6.8.1.2 Connector Specifications Connector SERIAL connector (shared with RS-485) Connector type...
  • Page 74 SECTION 6　OPERATION (3) Cable length Connection cables can be extended up to 15 meters, but may be subjects to errors depending on actual operational environment. Fig. 6-5　Example of RS-232C Cable Wiring Connections...

  • Page 75: Transfer Specifications

    6.8　Communication Specifications 6.8.2 RS-485 6.8.2.1 Transfer Specifications Interface RS-485 (2-wire) Synchronous system Asynchronous Transmission rate 9600 bps (fixed) Start bit : 1 Data bits : 8 Character configuration Parity : None Stop bit : 1 Flow control None Number of power max 32 supply 6.8.2.2 Connector Specifications...
  • Page 76 6.8　Communication Specifications b. Multi-drop function ON This page is intentionally left blank. Fig. 6-7　Example of RS-485 Cable Wiring Connections (Multi-drop function ON) (2) Cables used RS-485 is a differential transmission and use twisted-pair cables in combinations as shown in Fig. 6-7. The shield of the cable should be connected to case. (3) Connecting the terminator A terminator (120 Ω, 1/4 W min.) is required for connection.

  • Page 77: Connector

    6.8　Communication Specifications 6.8.3 Connector Fig. 6-8　Serial Connector and Pin Configuration NOTICE Serial communication specifications conform to RS-232C and RS-485. These interfaces were tested on a typical condition, but the normal communication with all equipments are not guaranteed.
  • Page 78 6.8　Communication Specifications This page is intentionally left blank.
  • Page 79 GAS PURGE...
  • Page 80 SECTION 7　GAS PURGE This turbo molecular pump incorporates a gas purge port (Fig. 2-1 (2)). In case of using a gas purge, the joint can be selected from Table 7-1. The proper purge gas flow rate is 30 mL/min. Fig. 7-1 is an example of gas purge piping diagram. Use a filter of 5 μm or less in element size. Use flow control valve to control the flow rate.
  • Page 81 TURBO MOLECULAR PUMP RECONDITION 8.1　Recommended Maintenance Intervals 8.2　Turbo Molecular Pump Decontamination 8.3　Touch-down Bearing Replacement 8.4　Check of the Rotor Blades 8.5　Power Supply Unit Parts Replacement 8.6　Turbo Molecular Pump Return Request...

  • Page 82: Recommended Maintenance Intervals

    SECTION 8　TURBO MOLECULAR PUMP RECONDITION Recommended Maintenance Intervals It is different for deterioration progress speed of each part changes greatly by pump condition. (The rotor temperature rises up depending on process, therefore it’s possible the rotor life is short.) Refer to the following list as overhaul of each process. These are not terms of warranty.

  • Page 83: Turbo Molecular Pump Decontamination

    Touch-down Bearing Replacement The touch-down bearing (Fig. 3-1 (8)) is the only component of ULVAC's turbo molecular pump that is subjected to friction and wear, normally occurring only during electrical power failure. Repeated and/or frequent rotor touch down will cause wear and bigger rotational resistance and require replacement of touch down bearings.

  • Page 84: Power Supply Unit Parts Replacement

    To obtain ensure the pump and power supply unit operate safely and perform as designed, have parts that exceed their expected service life be replaced by a ULVAC service representative or an ULVAC authorized service provider. Table 8-1　Estimated Service Life for Parts...

  • Page 85: Turbo Molecular Pump Return Request

    Overhaul, re-manufacturing, refurbishing, or repair of the turbo molecular pump system should always be performed by ULVAC or an approved service company. (A copy of this from is printed at the end of this manuals "Repair of the turbo molecular pump") The following precautions are required before forwarding the turbo molecular pump to ULVAC or an approved service company for all service related requests.
  • Page 86 SECTION 8　TURBO MOLECULAR PUMP RECONDITION CAUTION When pump is removed from a equipment, drain the water from water pipe during pump power on and water valve open. If remained water leak from water pipe, pump body will be corroded. After the water drained, shut water pipe by the cap which is attached at shipment. CAUTION This pump is a heavy equipment.
  • Page 87 When the pump is returned, please pack it surely so as not to damage it by the impact, the vibration, and the high temperature and humidity environment, etc. from the outside. Please use the packing materials which were used at shipment from ULVAC, or use the packing materials having a same quality or better.
  • Page 88 8.6　Turbo Molecular Pump Return Request This page is intentionally left blank.

  • Page 89: Section 9 Troubleshooting

    TROUBLESHOOTING 9.1　Vacuum Pressure Rise 9.2　Abnormal Noise and/or Vibration 9.3　Nothing Happens After an Operation is Made 9.4　Power Failures 9.4.1　Power Failure Counter-operation 9.5　Alarm Detection Capabilities 9.5.1　Movement in Alarm Detection Capabilities (ALARM) 9.5.2　Movement in Alarm Detection Capabilities (WARNING) 9.5.3　Reset Procedure...

  • Page 90: Vacuum Pressure Rise

    SECTION 9　TROUBLESHOOTING Vacuum Pressure Rise A rapid rise of vacuum pressure in the turbo molecular pump causes the internal motor of the turbo molecular pump to start braking and the Alarm lamp lights. Do not suddenly increase the pressure or let atmospheric air enter the pump during pump operation.

  • Page 91: Nothing Happens After An Operation Is Made

    9.3　Nothing Happens After an Operation is Made Nothing Happens After an Operation is Made Table 9-1　Nothing Happens After an Operation is Made Problem Possible causes Corrective action Section Power ON/OFF switch Electrical power cable Properly connect the electrical in the ON position but not properly connected.

  • Page 92: Power Failures

    SECTION 9　TROUBLESHOOTING Power Failures When a power interruption occurs, the motor inside the turbo molecular pump immediately begins regenerative braking. The magnetic bearing will use this generated electricity to keep functioning and the rotor inside the turbo molecular pump will continue being levitated. The rotation will slow down due to the regenerative braking and eventually the rotor will be supported by the touch-down bearing.

  • Page 93: Power Failure Counter-Operation

    9.4　Power Failures 9.4.1 Power Failure Counter-operation Table 9-3 shows the counter-operations against power interruption which occurred while the pump rotor is normally rotating. Table 9-3　Counter-operations Against Power Supply Failure Interruption time 2 seconds or less (Note 2) Over 2 seconds (Note 2) Interrupt / re-supply During interruption After re-supply...

  • Page 94: Alarm Detection Capabilities

    SECTION 9　TROUBLESHOOTING Alarm Detection Capabilities NOTICE Alarm history data can be read via serial interface, but cannot be read via remote control connector. The fault detection functions shown in Table 9-6 "Table of Alarms" and Table 9-7 "Table of Warnings" are incorporated for protection in the event of a problem with the turbo molecular pump or power supply unit.
  • Page 95 TD COUNTER LIMIT The number of high The touch-down bearing may have PF COUNTER LIMIT speed or power failure deteriorated. Consult ULVAC or an touch-downs has approved service company regarding exceeded the replacement of the touch-down prescribed number. bearing.
  • Page 96 SECTION 9　TROUBLESHOOTING Alarm Sec- Alarm name Possible cause Remedy code tion EI:INV. OVERVOLT Defective circuit in the Turn the power on again after the EI:DC-DC LOW VOLT power supply unit. pump stops. The power supply unit EI:DC-DC OVERVOLT must be repaired if the problem EI:BRAKE OVERTIME occurs again.
  • Page 97 9.5　Alarm Detection Capabilities Table 9-5　 If the Alarm Lamp Flashes Alarm Sec- Alarm name Possible cause Remedy code tion EI:DEW WARN Internal condensation Check that the ambient temperature and humidity around the pump and the temperature of cooling water are within the specified range.
  • Page 98 SECTION 9　TROUBLESHOOTING Table 9-6　Table of Alarms Alarm Alarm name Possible cause Protective action code Counts of the high speed touch-down counter Start-up impossible TD COUNTER LIMIT exceeded the specified number. (detected during power supply self- Counts of the power failure touch-down counter PF COUNTER LIMIT diagnostics) exceeded the specified number.
  • Page 99 9.5　Alarm Detection Capabilities Alarm Alarm name Possible cause Protective action code MB:VIBRATION1 X1 Excessive magnetic bearing vibration. Deceleration MB:VIBRATION1 Y1 MB:VIBRATION1 X2 MB:VIBRATION1 Y2 MB:VIBRATION1 Z MB:SENSOR ERR. X1 Abnormal output signal from the magnetic bearing sensor. MB:SENSOR ERR. Y1 MB:SENSOR ERR.
  • Page 100 SECTION 9　TROUBLESHOOTING Table 9-7　Table of Warnings Alarm Alarm name Possible cause Protective action code EI:DEW WARN Dew warning. Operation continued. Water valve is closed. EI:CONT.TEMP.WARN Increased temperature inside power supply unit. Operation continued. MB:SELFCHECK X1 Results of magnetic bearing sensor self- Operation is possible diagnostics are abnormal.
  • Page 101 WARRANTY CLAUSES...

  • Page 102: Warranty Clauses

    ○ Response Procedure a) Domestic business in Japan : ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the Nearest ULVAC Techno, Ltd. for repair. If field service is required, Buyer shall ask ULVAC, Inc.

  • Page 103: Disclaimer

    The "SECURITY seal" certificates that the product was made or maintenanced by ULVAC or by ULVAC authorized facility. In case "this label is removed" or "there is a mark showing once this label has been removed", ULVAC warranty shall not be applied to the product.
  • Page 104 　 This page is intentionally left blank.
  • Page 105 Index Index SERIAL connector ......11 Standards ........23 START/STOP button ......10 AC INPUT connecter ......9 AC INPUT panel ......8 ALARM lamp ........ 10 touch-down bearing ......15 backing vacuum pump ......8 UL ......... 23 cooling water ......8、35 VALVE ........
  • Page 106 Index This page is intentionally left blank. Index-2...
  • Page 107 ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.
  • Page 108 株式会社アルバック http://www.ulvac.co.jp/ サービス拠点一覧 http://www.ulvac.co.jp/support̲info/service/ 販売拠点一覧 http://www.ulvac.co.jp/support̲info/sales̲office/ 株式会社アルバック  規格品事業部 神奈川県茅ケ崎市萩園２５００ TEL:0467-89-2261 アルバック販売株式会社 本社（東京） 東京都港区港南２-３-１３ TEL:03-5769-5511 ulvac . co . jp アルバック販売株式会社 大阪支店 大阪府大阪市淀川区宮原３-３-３１ TEL:06-6397-2286 ULVAC ,Inc. http://www.ulvac.co.jp/en/ Service Centers http://www.ulvac.co.jp/en/support/service-center/ Sales Offices http://www.ulvac.co.jp/en/support/sales-offices/ ULVAC, Inc. Components Division 2500 Hagisono, Chigasaki, Kanagawa, Japan TEL: +81-467-89-2261 ulvac . co . jp / en rev4.0...

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