Ulvac UTM3400 Series Instruction Manual page 94

SECTION 9 TROUBLESHOOTING
Alarm
Alarm name
code
78 TMP:VALVE WARN
79 EI:DEW WARN
80 EI:CONT.TEMP.WARN
81 MB:SELFCHECK X1
82 MB:SELFCHECK Y1
83 MB:SELFCHECK X2
84 MB:SELFCHECK Y2
85 MB:SELFCHECK Z
86 MB:VIB. WARN. X1
87 MB:VIB. WARN. Y1
88 MB:VIB. WARN. X2
9
89 MB:VIB. WARN. Y2
90 MB:VIB. WARN. Z
91 MB:BAL. WARN. AXIS1
92 MB:BAL. WARN. AXIS2
94 MB:AIR RUSH B
95 DSP WARNING
99 MAINTENANCE TIME
80
Table 9-7 Table of Warnings
Possible cause
Abnormal coolant valve
Dew warning
Increased temperature inside power supply unit. Operation continued.
Results of magnetic bearing sensor self-
diagnostics are abnormal.
Vibrations of the magnetic bearing become
temporarily excessive.
Rotor is slightly out of balance.
Atmospheric penetration.
Error in the DSP for magnetic bearing control.
Maintenance call timer reaches its set time.
Protective action
Operation continued.
Operation continued.
Water valve is closed.
Operation is possible
(detected during
power supply self-
diagnostics).
Operation continued.