Ulvac UTM3400 Series Instruction Manual page 6

After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may
result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by
stopping the pump and dispersal of parts.
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation. This pump is not an explosion-proof product. This pump is not
intended to be used in a potentially explosive atmosphere.
The pump surface may get hot, there are risk of burn.
Prevent the installation, operation, maintenance, and service personnel from contacting the
pump surface easily in all tasks that they are intended to perform.
The standard power input voltage is 200 to 240 VAC ± 10 %. Connection to the incorrect input
voltage can cause damage to the equipment. Supply the power via a circuit breaker (rating 15 A).
Please provide PE (Protective Earth) connection to the terminal of a "PE" marked wire in final
application. Please provide PE (Protective Earth) connection to the chassis of pump in final
application.
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CAUTION
CAUTION
CAUTION
CAUTION