Ulvac UTM3400 Series Instruction Manual page 43

Bolt-Nut (Half thread)
Fixing method
Inlet flange
Bolt size, Quantity
Material
Grade
Washer
Bolt-Nut (All thread)・Tap
Fixing method
Inlet flange
Bolt size, Quantity
Material
Grade
Washer
(Note) The special washers are attached to the inlet flange of TMP when shipping.
Do not remove them at the time of TMP installation.
Refer to Fig. 5-6 for the details of the bolt attaching part.
Fig.5-6 Example of the Fixing Method Using the Special Washer
Table 5-3 Tightening Torque of the Fixing Bolt
Fig.5-5 How to Use of the Bolt
Table 5-2 The Recommended Fixing Bolt
VG300
A2-70 (JIS B 1054 / ISO-3506)
Plain washer and
spring lock washer
VG300
SCM435 (JIS G 4053 / ISO-683) or equivalent
12.9 (JIS B 1051 / ISO-898)
Plain washer and
spring lock washer
Size of bolt
M12
Only by the inlet flange
VG350
M12, 12 PC
Stainless steel
Special washer (Note) and
spring lock washer
Only by the inlet flange
VG350
M12, 12 PC
Special washer (Note) and
spring lock washer
Tightening torque [N•m]
16 to 26
5.1 Installation
ISO320F
ISO320F
29
5