1.1 Overview................................................................................................................................................... 1- 1
1.2 Control block diagram............................................................................................................................. 1- 2
1.3 Specification list....................................................................................................................................... 1- 3
1.4 Model name .............................................................................................................................................. 1- 3
1.5 System configuration............................................................................................................................... 1- 4
3.3 About power-on ........................................................................................................................................ 3- 6
4.1 Startup...................................................................................................................................................... 4- 1
4.1.1 Startup procedure............................................................................................................................. 4- 1
4.2.1 General precautions ......................................................................................................................... 4- 8
4.3 Operation from controller ...................................................................................................................... 4-15
4.3.1 Operation from controller ............................................................................................................... 4-15
4.3.2 Controller setting............................................................................................................................. 4-15
4.4 Functions ................................................................................................................................................. 4-17
4.4.2 Auto tuning function ....................................................................................................................... 4-18
4.4.4 Test operation .................................................................................................................................. 4-18
CONTENTS
1
1- 1 to 1- 6
2- 1 to 2-30
3- 1 to 3- 6
4- 1 to 4-22