Edwards STP-iXA2205CV Manuals

Manuals and User Guides for Edwards STP-iXA2205CV. We have 1 Edwards STP-iXA2205CV manual available for free PDF download: Instruction Manual

Edwards STP-iXA2205CV Instruction Manual (177 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 3.73 MB

Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
12
Warranty Period
12
Item Warranted
12
Disclaimer
13
Spare Parts
13
Precautions for Safe Operation of the STP Pump
14
Usable Gases
14
Maintenance and Inspection Precautions
15
Labels
15
STP Pump Installation Warning Label
15
Hot Surface Warning Label
15
Tip over Caution Label
16
Heavy Product Caution Label
16
High Voltage Device Caution Label
16
Water Caution Label
17
Rotation Instruction Label
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
23
STP Pump Specifications
23
Maximum Gas Flow-Rate
24
Water Cooling Use Condition
24
Control Unit
25
Power Unit
26
External Appearance of the STP Pump
27
External Appearance of STP-Ixa2205C(V): VG250/ISO250F/ICF305
27
External Appearance of STP-Ixa2205Cp(V): VG250/ISO250F/ICF305
28
External Appearance of STP-Ixa2205Cip: VG250/ISO250F/ICF305
29
External Appearance of the Power Unit
30
External Appearance of Power Unit Ips-1200
30
Label Affixing Positions
31
Installation of the Stp Pump
33
Precautions before Installation
33
Operating Environment
33
Installation Area
35
Bench
36
Insulation Test
36
Unpacking
37
Unpacking the STP Pump
37
Example of Lifting the STP Pump
37
Eyebolt Size
37
Example of Lifting the STP Pump (Horizontal Positioning)
38
Name and Function of each Part
42
Name and Function of the Pump
42
Control Unit (Front Panel)
42
Power Unit (Connector Panel)
42
Power Unit (Front Panel)
42
(STP-Ixa2205C[V])
42
(STP-Ixa2205Cp[V]/Cip)
42
Pump Functions
42
Name and Function of the Control Unit
43
Control Unit Front Panel Functions
44
Name and Function of the Power Unit
45
Power Unit Connector Panel Connection
45
Power Unit Front Panel Function
46
How to Install the STP Pump
47
Cleaning the Seal
49
STP Pump Installation Positions
50
Positions of the Outlet Port on the Horizontally
50
Secure the STP Pump
51
Tightening Torque of Bolt
51
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
52
Shape of Reduced Diameter Shank Bolts
54
Shape of Reduced Diameter Shank Bolts
55
Legs for Securing the Base
56
Installation of the Power Unit
57
Fixed Screw Hole Potion for the Power Unit
57
External Power Supply Unit
58
DC Cable for External Power Supply Unit
58
DC Cable
58
Cable Connection
60
DC Cable
60
External Appearance of DC Cable (STP-Ixa2205C[V])
60
External Appearance of DC Cable (STP-Ixa2205Cp[V]/Cip)
60
Power Cable
61
How to Connect the Cables
63
Precautions of Vacuum Piping
65
Vacuum Piping Method
65
Connecting the Purge Port
66
Connecting the Water Cooling Pipe
67
Positions of the Cooling Water Port
67
Attaching a Baking Heater
68
Installation of the TMS Unit
69
3.13.1 Configuration of the STP Pump with the TMS
69
Configuration of the TMS (STP-Ixa2205Cpv)
70
3.13.2 TMS Heater
71
3.13.3 TMS Valve
71
3.13.4 Installation of the TMS Unit
71
3.13.5 Connecting the TMS Heater Cable
71
3.13.6 Connecting the Pump and TMS Valve
72
3.13.7 TMS Unit Specification
72
Connecting to Semiconductor Equipment
73
3.14.1 Connecting to Power
73
Emergency off Circuit (EMO Circuit)
73
Operation
75
Gas Pumping, Cooling and Baking the STP Pump
75
Gas Pumping
75
How to Introduce a Purge Gas
76
Cooling the STP Pump
76
Water-Cooling Method
76
Baking the STP Pump
77
Before Starting the STP Pump
78
Confirmation before Starting
78
Confirmation of Vacuum System
78
Powering on
79
Pump Operation
79
Input Operation Port Setting
79
Starting/Stopping the STP Pump
80
Pump Operation Method 1 (Contact Input)
80
Pump Operation Method 2 (Contact Input)
80
Starting/Stopping the STP Pump Using Contact Input (X2 REMOTE)
80
Pump Operation Method 1 (Voltage Input)
81
Pump Operation Method 2 (Voltage Input)
81
Starting/Stopping the STP Pump Using Voltage Input (X2 REMOTE) (Voltage Input)
81
How to Start/Stop the STP Pump
82
Starting the STP Pump after Stopping
82
Starting the STP Pump after a Safety Function Operates
82
Powering off
82
Reset Operation (X2 REMOTE)
82
Led
83
Parallel Port Input/Output Signal
84
Input Signal Pins
84
X2 REMOTE Connector
84
X2 REMOTE Input Signal Pins
85
X2 REMOTE Input Signal Pins (Continued)
86
X2 REMOTE Input Signal Pins (Contact Input)
87
X2 REMOTE Input Signal Pins (Voltage Input)
88
X2 REMOTE Input Signal Pins (Voltage Input) (Continued)
89
Rotation INHIBIT Signal Input
89
X2 REMOTE Input Signal Pins (Voltage Input)
90
Input Operation Port Setting
91
Input Operation Port
91
Rotation INHIBIT Signal
92
Output Signal Pins
93
X2 REMOTE Output Signal Pins
94
X2 REMOTE Output Signal Pins
95
Operating the TMS Unit (for Use with the TMS Unit)
97
Before Starting
97
4.10.2 Starting/Stopping
97
4.10.3 Setting the TMS Unit Function
97
Serial Communication Protocol
99
Introduction
99
Serial Port
99
Connection and Setting up
100
Signal Connection
100
Connecting the RS485
102
Communication Parameter Setting
103
Communication Parameters
103
Input Operation Port Setting
104
Serial Communication Timeout Setting
105
Serial Communication Time out Setting
105
Protocol Specifications
106
General Description
106
Standard Transmission Frame
107
Control Command
108
(In the RS232/RS485 Single Point Connection)
108
Query Command
109
(In the RS232/RS485 Single Point Connection)
109
Transmission Data Format
110
Frame Control (Checksum)
111
Error Control
111
Transmission Frame in the RS485 Multi-Point Connection
111
Control Command in the RS485 Multi-Point Connection
113
5.3.10 Query Command in the RS485 Multi-Point Connection
114
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection
115
Pump Operation Commands
115
Command Specifications
116
Command List
116
Readmeas
117
Command
117
Readfailmess
118
Pump Operation Commands
118
Error Message Values
121
Readmodfonct
122
Readversion
124
Readcounters
125
Readsetpoint
126
Readmotortemp
126
5.4.10 Readstatus
127
5.4.11 Readevents
128
Remote Mode
128
5.4.12 Setspeedsetpoint
129
5.4.13 Readspeedsetpoint
130
5.4.14 Readmodfonctwithwarning
131
Pump Operation Mode
131
5.4.15 Readmeasvalue
134
5.4.16 Readoptionfunc
136
5.4.17 Setoptionfunc
139
5.4.18 Readcondition
141
5.4.19 Readeventswithtime
143
Stp-Link and Display Unit
147
STP-Link
147
WARNING Function
147
Display Unit
148
Display Unit Idt-001
148
Safety Functions
149
Power Failure
149
Operation after a Power Recovery
150
States of Leds and X2 REMOTE Output Signals
150
Abnormal State of Magnetic Bearing (Disturbance)
151
Excessive Vibration (Disturbance)
151
Motor Driver Overload (DRV Overload)
151
Overheating Inside the STP Pump (MOTOR Overheat)
151
Overheating Inside the Control Unit (CNT Overheat)
151
Overspeed
152
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
152
WARNING" Function
153
WARNING Output
154
Contents of WARNING Function
155
First Damage Limit
155
Second Damage Limit
155
Pump Run Time over
155
Pump Overload
156
Imbalance
156
WARNING Function Setting
157
Default Setting of WARNING Function
157
Factory Setting and Variable Range
157
Troubleshooting Immediately after Failure Occurs
158
After Power Failure
158
After Other Abnormality/Error
158
Troubleshooting
159
Indication of "FAILURE" LED (Red)
159
Failure Output
159
Indication of "FAILURE" LED (Green)
166
No Indication of the "FAILURE" LED
166
Maintenance and Inspection
167
Cleaning
168
Inspecting the Deposit
168
Overhaul
169
Transporting for Repair or Overhaul
170
Storage and Disposal
173
Storage of the STP Pump
173
Disposal
174
Service, Spares and Accessories
175
Introduction
175
Service
175
Spares
175
Accessories
176

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Edwards STP-iXA2205CV Instruction Manual (177 pages)

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