Edwards STP-301 series Instruction Manual
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Edwards STP-301 series Instruction Manual

Turbomolecular pump
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MT-21E-003-D
STP-301/451 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Third Edition- d)
Read through the Safety Precautions and each section
of this Manual carefully before using the STP pump.
Keep this Manual in a place where you can quickly
access it at any time.
BOC Edw ards Japan Limited
Dec. 2003
Copyright 2003 BOC Edw ards Japan Limited. All rights reserved. Printed in Japan.

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  • Page 1 MT-21E-003-D STP-301/451 Series Turbomolecular Pump INSTRUCTION MANUAL (Third Edition- d) Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. BOC Edw ards Japan Limited Dec.
  • Page 2 STP-301/451 Series Instruction Manual SAFETY PRECAUTIONS The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump and its peripheral equipment. To avoid personal injury and prevent product and/or peripheral equipment damage, observe the Safety Precautions as w ell as the general safety rules (your country’s law s, regulations, safety standards and so on).
  • Page 3 STP-301/451 Series Instruction Manual ◇ The STP pump is provided w ith a high-speed rotor. Secure the STP pump according to the specified method. Failure to do so may lead to serious personal injury, product and/or peripheral equipment damage if any abnormality/error occurs in the rotor. ◇...
  • Page 4 STP-301/451 Series Instruction Manual ◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may corrode the STP pump and damage it. ◇ A hazardous live voltage may exist at connector/terminal that marked DO NOT touch the terminal.
  • Page 5 STP-301/451 Series Instruction Manual tuning. Once tuning is completed, re-tuning is not required unless the configuration (the STP pump serial number, the STP control unit serial number, and the STP connection cable length) is changed.
  • Page 6 STP-301/451 Series Instruction Manual ◇ Use the STP connection cable that has a label affixed STP-301/451 Series The use of different cables may result in product damage. ◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so may result in electric shock or product damage.
  • Page 7 STP-301/451 Series Instruction Manual INTRODUCTION Thank you very much for purchasing BOC Edwards’ turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and...
  • Page 8 No part of this manual may be reproduced in any form by any means without prior written permission from BOC Edwards. BOC Edwards pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice.

  • Page 9: Limited Warranty

    This warranty applies only to the product delivered from BOC Edwards to the customer. If any defect is found during this period, BOC Edwards will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at the customer's own charge.
  • Page 10 STP-301/451 Series Instruction Manual SPARE PARTS: Fuse and air cooling fan for control unit Touch down bearing Heater...

  • Page 11: Table Of Contents

    STP-301/451 Series Instruction Manual TABLE of CONTENTS SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY Precautions for Safe Operation of the STP Pump ...... 1-1 Usable Gases ......................1-1 Precautions on Maintenance and Inspection ...............1-1 Labels ..........................1-2 Operation Principle of the STP Pump......... 2-1 Unpacking ..................
  • Page 12 STP-301/451 Series Instruction Manual 6.2.1 Operating Environment..................6-7 6.2.2 Insulation Test.....................6-7 6.2.3 Installation Area ....................6-8 Attaching the STP Control Unit Front Panel to a Rack..........6-9 Cable Connection.......................6-10 6.4.1 Name and Dimensions of Each Cable ...............6-10 6.4.2 How to Connect the Cables ................6-12 Connecting to Semiconductor Equipment..............6-14 6.5.1 Connecting to Pow er ..................6-14 6.5.2 Emergency Off Circuit (EMO Circuit)..............6-14...
  • Page 13 STP-301/451 Series Instruction Manual Safety Functions ..............10-1 10.1 Pow er Failure......................10-1 10.2 Abnormal State of Magnetic Bearing .................10-3 10.3 Excessive Vibration....................10-3 10.4 Motor Driver Overload....................10-3 10.5 Overheating Inside the STP Pump................10-3 10.6 Overheating Inside the STP Control Unit ..............10-3 10.7 Overspeed.........................10-3 Troubleshooting, Maintenance and Inspection ......11-1...
  • Page 14 STP-301/451 Series Instruction Manual TABLES Table 3.1 Accessories ......................3-1 Table 3.2 Accessories for Chemical Specific Pump (Type C)..........3-1 Table 4.1 Tightening torque of bolt ..................4-8 Table 4.2 Maximum Torque predicted and Recommended securing bolt for inlet port flange4-9 Table 4.3 Number of Claw Clamps by Size of Flange ............4-10 Table 6.1 Connecting the Pow er Cable ................6-13 Table 7.1 Starting/Stopping the STP Pump during Remote Operation (I/O TB2).....7-5 Table 7.2 Reset Operation during Remote Operation (I/O TB2) ..........7-6...
  • Page 15 STP-301/451 Series Instruction Manual FIGURES Figure 2.1 Cross Sectional View of the STP Pump ...............2-2 Figure 4.1 Configuration of the STP Pump................4-2 Figure 4.2 Installation of the STP Pump to the Vacuum Equipment........4-5 Figure 4.3 STP Pump Installation Positions................4-7 Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ..4-7 Figure 4.5 Example of securing the STP pump (When securing the inlet port w ith bolts) ............4-9 Figure 4.6 Example of securing the STP pump...

  • Page 16: Precautions For Safe Operation Of The Stp Pump

    (STP-301C/STP-451C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards. ◇ To prevent an accident, confirm the characteristics of gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

  • Page 17: Labels

    STP-301/451 Series Instruction Manual Labels The following labels are affixed to the STP pump and STP control unit. Read the contents of the labels before operation. 1) STP Pump Caution Label This label indicates precautions for operating the STP pump. Follow these precautions.
  • Page 18 STP-301/451 Series Instruction Manual 4) Connector Caution Label i. This label indicates the lock of the connector ii. This label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. 5) STP Control Unit Safety Instruction Label This label indicates instructions before operating the STP control unit.
  • Page 19 STP-301/451 Series Instruction Manual 8) Voltage Rating Label This label indicates the rated voltage of the STP control unit. Use voltage specified in this label. V specification V specification 9) Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump.

  • Page 20: Operation Principle Of The Stp Pump

    STP-301/451 Series Instruction Manual Operation Principle of the STP Pump The STP-301/451 is a series of magnetically-levitated turbomolecular pumps, featuring the following: • Oil free • Low vibration • High reliability The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction.

  • Page 21: Figure 2.1 Cross Sectional View Of The Stp Pump

    STP-301/451 Series Instruction Manual (1) Rotor Blade (2) Stator Blade (7) Touch Down Bearing (3) Radial Sensor (4) Radial Electromagnet (8) Touch Down Bearing (6) Axial Electromagnet (5) Axial Sensor Figure 2.1 Cross Sectional View of the STP Pump...

  • Page 22: Unpacking

    1) Check the package for bruises, breakage, wetness, and other. If there is any abnormality/error or it is judged necessary to return the product, contact BOC Edwards or the selling agency. 2) Check the contents of the package. See Section 3.2, "Accessories."...

  • Page 23: Installation Of The Stp Pump

    STP-301/451 Series Instruction Manual Installation of the STP Pump Name and Function of Each Part (1) Inlet Port Flange (ICF , VG , ISO, and other) Connected to the vacuum equipment (at the high vacuum side). (2) Outlet Port Flange (KF Connected to the inlet port side of the backing pump.

  • Page 24: Figure 4.1 Configuration Of The Stp Pump

    STP-301/451 Series Instruction Manual Figure 4.1 Configuration of the STP Pump...

  • Page 25: Precautions Before Installation

    A place free of a strong electric field. A place free of exposure to radiation. No discharge of high voltage (more than 500V) (If more than 500 V is discharged, contact BOC Edwards.) STP Pump Installation Install the STP pump securely so that foreign particles Equipment Conditions will easily fall into the STP pump (Ex.: Si wafers or...

  • Page 26: Installation Area

    STP-301/451 Series Instruction Manual 4.2.2 Installation Area Leave enough spaces for the following in addition to the space for the STP pump: Space for maintenance and inspection Space for connecting cables ◇ The minimum bending radius of the STP connection cable is 150 mm (see Section 13, "External Appearance of the STP Pump"...
  • Page 27 STP-301/451 Series Instruction Manual The bolt may not be able to be inserted from the low er side of the inlet port according to the shape of the inlet port flange. When the external appearance of the STP pump is not in the manual, contact BOC Edw ards.

  • Page 28: How To Install The Stp Pump

    STP-301/451 Series Instruction Manual How To Install the STP Pump Install the STP pump to the vacuum equipment as shown in Figure 4.2. Figure 4.2 Installation of the STP Pump to the Vacuum Equipment...

  • Page 29: Cleaning The Seal

    STP-301/451 Series Instruction Manual 4.3.1 Cleaning the Seal Inspect the seals of the inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment. Take the following measures for cleaning the seals: Clean off with a pure gas.

  • Page 30: Stp Pump Installation Positions

    STP-301/451 Series Instruction Manual 4.3.2 STP Pump Installation Positions The STP pump can be installed vertically, horizontally, and upside-down and slanted. Upside-down Horizontal Vacuum Equipment Slanted Vertical Figure 4.3 STP Pump Installation Positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.

  • Page 31: How To Secure The Stp Pump

    STP-301/451 Series Instruction Manual 4.3.3 How to Secure the STP Pump ◇ The STP pump is provided w ith a high-speed rotor. The w orst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.
  • Page 32 STP-301/451 Series Instruction Manual 1) When securing the inlet port w ith bolts Refer to Table 4.2 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the boltholes of the size specified in the Inlet Port Flange Standard.

  • Page 33: Table 4.3 Number Of Claw Clamps By Size Of Flange

    STP-301/451 Series Instruction Manual 2) When securing the inlet port flange w ith claw clamps Refer to Table 4.2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure.
  • Page 34 STP-301/451 Series Instruction Manual 3) When installing the damper in the inlet port flange Refer to Table 4.2 for rotational torque. In case of using a damper, secure the base with all 8 screw-holes for legs or all 8 attached legs. Follow "CAUTION" on page 4-9 about legs and bolts for securing the base.

  • Page 35: Vacuum Piping

    STP-301/451 Series Instruction Manual 4.3.4 Vacuum Piping ◇ DO NOT open the STP pump through the flange to atmospheric air w hile the STP pump is running. If atmospheric air flow s into the STP pump, it may not function normally. ◇...

  • Page 36: Connecting The Ground Cable

    STP-301/451 Series Instruction Manual Piping at the Inlet Port Flange Attach the inlet port to the high vacuum side. Maximum working pressure: 6.7×10 Pa［5×10 Torr］ Pressure at the inlet port flange (for natural air cooled) applicable continuously Piping at the Outlet Port Flange Attach the outlet port to the inlet port flange of the backing pump (primary side pump).

  • Page 37: Connecting The Purge Port (For The Chemical Specific Pump, Type C)

    STP-301/451 Series Instruction Manual 4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C) When pumping reactive or corrosive gases, introduce a dry N gas or other gas into the STP pump in order to protect the inside of the STP pump. As shown in Figure4.8, introduce a dry N gas through the electromagnetic vent valve, needle valve or similar valve (must be prepared by the customer) from the purge port.

  • Page 38: Baking, Cooling The Stp Pump And Gas Pumping

    Baking, Cooling the STP Pump and Gas Pumping Baking the STP Pump To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump. ◇ The surfaces of the STP pump and its peripheral equipment w ill become extremely hot w hen performing baking.

  • Page 39: Cooling The Stp Pump

    Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When performing baking, cool the STP pump. Also, when pumping gases, cool the STP pump as well. Select the best method which fits your vacuum equipment. 5.2.1 Water Cooling Method When cooling the STP pump by water cooling, use a water cooling unit (optional...

  • Page 40: Air Cooling Method

    5.2.2 Air Cooling Method When water cooling is not available, use an air cooling unit (optional accessory). Attach the air cooling unit using 4 screws at screw holes for legs (8-M8 , depth 16 mm). (For the positions of the screw holes for legs, see "External Appearance of the STP Pump") ◇...

  • Page 41: Gas Suction

    Gas Suction ◇ When pumping gases, they may remain in the STP pump. Introduce a purge gas and then exhaust all gasses. Residual gases in the STP pump may cause an accident w hen the STP pump is removed. Confirm the characteristics of gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

  • Page 42: Figure 5.1 Attaching Positions Of The Cooling Unit And Baking Heater

    Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater...

  • Page 43: Installation Of The Stp Control Unit

    STP-301/451 Series Instruction Manual Installation of the STP Control Unit Name and Function of Each Part 6.1.1 Front Panel (1) "START" Switch (momentary push button switch, green) STP pump rotating function (valid in MANUAL operation only) Press this switch to accelerate the STP pump when the LCD displays "LEVITATION"...
  • Page 44 STP-301/451 Series Instruction Manual pump's operation state ("LEVITATION", "ACCEL." and other.) or the pump's temperature, the LCD displays the operating hours (cumulative) or an error message which occurred in the past. (See Section 11, "Troubleshooting, Maintenance and Inspection.") (6) LCD The LCD displays a pump's operation state, speed, or other messages.

  • Page 45: Figure 6.1 Stp Control Unit Front Panel

    STP-301/451 Series Instruction Manual (7) (8) (9) (10) (11) (12) (1) (2) (3) Figure 6.1 STP Control Unit Front Panel...

  • Page 46: Rear Panel

    STP-301/451 Series Instruction Manual 6.1.2 Rear Panel ◇ A hazardous live voltage may exist at connector/terminal that marked DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to connector, alw ays pow er OFF the STP pump (Sw itch the breaker "OFF").

  • Page 47: Figure 6.2 Stp Control Unit Rear Panel

    STP-301/451 Series Instruction Manual (14) (21) (18) (15) (13) (16) (19) (20) (17) Figure 6.2 STP Control Unit Rear Panel...

  • Page 48: Top Panel

    STP-301/451 Series Instruction Manual 6.1.3 Top Panel (22) VR1 Volume For setting the rated speed of the STP pump. This volume is normally made ineffective. (See Section 9.2, "Setting the Rated Speed.") (23) DSW-B Dip Switches For optional settings. Figure 6.3 shows the functions and the factory settings of the dip switches. <No.1 switch (Rated speed setting)>...

  • Page 49: Side Panel (Left)

    STP-301/451 Series Instruction Manual 6.1.4 Side Panel (Left) (24) Air Cooling Fan For cooling the inside of the STP control unit. (24) Figure 6.4 STP Control Unit Side Panel (Left)

  • Page 50: Precautions Before Installation

    STP-301/451 Series Instruction Manual Precautions Before Installation 6.2.1 Operating Environment Install the STP control unit in a place meeting the following requirements: 0 to 40 °C Ambient Temperature Ambient Relative 30 to 95% (no dew condensing) Humidity Environment A place free of exposure to direct sunlight. A place free of high humidity.

  • Page 51: Installation Area

    STP-301/451 Series Instruction Manual 6.2.3 Installation Area Leave enough spaces for the following in addition to the space for the STP control unit. • Space for maintenance and inspection • Space for inlet and outlet of air for cooling - Top and side: 5cm or more - Bottom: 1.8cm or more (height of the rubber foot)

  • Page 52: Attaching The Stp Control Unit Front Panel To A Rack

    STP-301/451 Series Instruction Manual Attaching the STP Control Unit Front Panel to a Rack The dimensions of the STP control unit front panel conform to EIA Standard. Therefore, this panel can be attached to any type of commercially-available racks. Attach the front panel unit to the rack according to the following steps: •...

  • Page 53: Cable Connection

    STP-301/451 Series Instruction Manual Cable Connection 6.4.1 Name and Dimensions of Each Cable STP Control unit Side STP Pump Side Ground Terminal( ) Ground Terminal( ) Crimp-Type Terminal Lug(M4 ) Crimp-Type Terminal Lug(M4 ) Yellow / Green Wire φ4.3(L≦20m) L≦20m: 4mm^2 φ6.5(L＞20m) Unit:mm L＞20m: 10mm^2...

  • Page 54: Figure 6.9 External Dimensions Of Stp Connection Cable

    STP-301/451 Series Instruction Manual STP Control Unit Side Power Side (Primary) Crimp-Type Terminal Lug(M4 ) 3pin (Socket) L(L1) PE( ) N(L2) 1.5mm^2 X 3 cores (Brown, Blue, Yellow/Green) a) w ithout pow er plug STP Control Unit Side Power Side (Primary) Plug type: NEMA 6-15 N(L2) GND( )

  • Page 55: How To Connect The Cables

    STP-301/451 Series Instruction Manual 6.4.2 How to Connect the Cables ◇ When connecting/disconnecting cables, alw ays pow er OFF the STP pump (sw itch the breaker "OFF"). Failure to do so may result in electric shock or product damage. ◇ With each connector, align the position of the guide key and insert the pin vertically so as not to bend it.
  • Page 56 STP-301/451 Series Instruction Manual If you plan to use the units having different model names, they may not be used even w hen the tuning is performed. In the latter case, contact service office. ◇ Use the STP connection cable that has a label affixed The use of different cables may result in product damage.

  • Page 57: Figure 6.10 How To Secure The Pow Er Cable

    STP-301/451 Series Instruction Manual Connecting the Power (Primary Side) Cable Connect the power cable to the "AC POWER CON1" on the STP control unit rear panel as shown in Table 6.1. Secure the power cable connector using the cable fitting tool (see Figure 6.10). Table 6.1 Connecting the Pow er Cable CON1...

  • Page 58: Connecting To Semiconductor Equipment

    STP-301/451 Series Instruction Manual Connecting to Semiconductor Equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the followings when designing the semiconductor equipment. 6.4.3 Connecting to Pow er The STP control unit receives its power from the semiconductor equipment electrical distribution system via a circuit breaker.

  • Page 59: How To Start/Stop The Stp Pump

    How to Start/Stop the STP Pump ◇ NEVER connect or disconnect any cables w hile the pow er is ON. ◇ NEVER turn the primary pow er OFF (sw itch the breaker "OFF") w hile the STP pump is in rotation. ◇...

  • Page 60: Start Procedures

    Start Procedures Start the backing pump before or simultaneously with the start of the STP pump. Open the vacuum valve located at the outlet port flange side after starting the backing pump. ◇ DO NOT open the vacuum valve w ithout operating the backing pump. Depending upon the type of the backing pump, doing so may cause a reverse flow of oil, w hich could contaminate the inside of the STP pump.

  • Page 61: Manual Operation

    There are two methods of operating the STP pump: MANUAL and REMOTE. Select one which fits your vacuum equipment. Manual Operation Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front panel to the position opposite to "ON." At this time, the "REMOTE" lamp is off. 7.4.1 Pow ering ON 1) Switch "ON"...
  • Page 62 ◇ The STP pump can be stopped w ith any message displayed in the LCD.

  • Page 63: Starting The Stp Pump After Stopping

    7.4.4 Starting the STP Pump after Stopping Press the "START" switch on the front panel to reaccelerate the STP pump. The STP pump can be reaccelerated even while it is stopping. ◇ The STP pump can be reaccelerated only w hen the LCD displays "LEVITATION" or "BRAKE: ***00rpm."...

  • Page 64: Remote Operation (I/O Tb2)

    Remote Operation (I/O TB2) (Read through Section 8.2, "I/O TB 2 Terminal Block" before use.) Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front panel to "ON." The "REMOTE" lamp lights. 7.5.1 Pow ering ON 1) Switch "ON" the breaker on the STP control unit rear panel. (To prevent incorrect operation, a metal fitting is attached to the breaker.
  • Page 65 ◇ The STP pump can be started by remote operation w ith any message displayed on the LCD. ◇ Although the STP pump sounds for several seconds w hile it is accelerating, this is not an indication of abnormality.

  • Page 66: Starting The Stp Pump After A Safety Function Operates

    7.5.3 Starting the STP Pump After Stopping Perform the rotation procedures to reaccelerate the STP pump. See Section 7.5.2, "Starting/Stopping the STP Pump." The STP pump can be reaccelerated even while it is stopping. ◇ The STP pump can be reaccelerated by remote operation w ith any message displayed on the LCD.
  • Page 67 ensure the safety.

  • Page 68: Remote Operation (Con4: Optional Accessory)

    Remote Operation (CON4: Optional Accessory) (Read through Section 8.3, "CON4 connector" befor use.) The CON4 connector (special accessory) is available in the STP-301/451 series in order to maintain compatibility with the remote specification of the previous model of the STP-200/300/400 series. This connector can maintain compatibility with the remote I/O signal of the STP-200/300/400 series.

  • Page 69: Starting The Stp Pump After Stopping

    is not an indication of abnormality. 7.6.3 Starting the STP Pump After Stopping Perform the rotation procedures to reaccelerate the STP pump. See Section 7.6.2 "Starting/Stopping the STP Pump." The STP pump can be reaccelerated even while it is stopping. ◇...

  • Page 70: Figure 7.1 Stp Pump Operation Procedures

    < LCD Mess age> <O peration> < STP Pump State> Break er O N Version P021* Ver.*.** Exec ute S elf Tes t SELF TEST Self tes t in progres s TEST CO MPLETE Self tes t completed Levitation state LEVITA TION Lev itation s tate S ELECT Switch...

  • Page 71: Remote Input/Output Signal Terminal Blocks

    STP-301/451 Series Instruction Manual Remote Input/Output Signal Terminal Blocks I/O TB1 Terminal Block This is a terminal block for remote output signals. Use it in accordance with Table 8.1 and Figure 8.1. This terminal block functions in both the MANUAL and REMOTE operations.
  • Page 72 STP-301/451 Series Instruction Manual Terminal Description Terminals for outputting the BRAKE state signal. These terminals are closed when the STP pump is in brake. (12) (14) However, when the rotational speed is less than 20,000rpm BRAKE during power failure backup operation, this signal is not N.O OUT output.

  • Page 73: Figure 8.1 I/O Tb1 Remote Output Signal Terminal Block

    STP-301/451 Series Instruction Manual N.O: Normal Open N.C: Normal Close COM: Common L(L1) Power input terminals for AC POWER the air cooling unit N(L2) Terminals for the air cooling unit N.O OUT Not used POWER POWER ON state signal output terminals N.O OUT N.O OUT ALARM state signal...
  • Page 74 STP-301/451 Series Instruction Manual Table 8.2 shows rated contacts for relays CR1, 3, 5, 7, and 8 (see Figure 8.1). Table 8.2 Rated Contacts for Relays CR1, 3, 5, 7, and 8 Induction Load Resistance Load (cos φ=0.4) (cos φ=1) (L/R=7 ms) 250 V AC 10 A...

  • Page 75: I/O Tb2 Terminal Block

    STP-301/451 Series Instruction Manual I/O TB2 Terminal Block This is a terminal block for remote input signals. Use it in accordance with Table 8.4 and Figure 8.2. (See Section 7.5, "Remote Operation (I/O TB2).") This terminal block operates only during the REMOTE operations. Switch "OFF"...
  • Page 76 STP-301/451 Series Instruction Manual Terminals for inputting the abnormality RESET signal. 1) When 1) or 2) above is used, shorting the circuit between (1)-(6) for 0.3 seconds or more turns off the "FAILURE" lamp. 2) When 3) above is used, input 25 V AC or 12 to 48 V DC COMMON RESET between (3)-(6) for 0.3 seconds or more to turn off the...
  • Page 77 STP-301/451 Series Instruction Manual In case of 1 ) in Table 8.4 I/O TB2: Remote Input Sign al Terminal B lock In case of 2) in Table 8.4 Appr ox. 330 oh ms +12V +12V In ca se of 3) in Ta ble 8.4 Approx.

  • Page 78: Con4 Connector (Optional Accessory)

    STP-301/451 Series Instruction Manual CON4 Connector (Optional accessory) This is a connector for remote input/output signals. This connector can maintain compatibility with the remote I/O signal of the STP-200/300/400 series. The remote input signal from the CON 4 connector is valid by setting No.4 switch of the DSW-B on the top panel to "ON".
  • Page 79 STP-301/451 Series Instruction Manual STP Control Unit 24VDC Coil of RESET signal relay CR3 input pins (14) 0VDC 24VDC Coil of START signal relay CR1 input pins (15) 0VDC 24VDC Coil of STOP signal relay CR2 input pins (16) 0VDC Not Used (13) Figure 8.3...

  • Page 80: Remote Output Signals

    STP-301/451 Series Instruction Manual 8.3.2 Remote Output Signals Use output signals according to Table 8.7 and Figure 8.4. This output signal operates in both manual operation and remote operation. No.4 of the DSW-B DIP switch operates in "ON/OFF" both states. Table 8.7 CON 4 Connector (Remote output signal) Description...
  • Page 81 STP-301/451 Series Instruction Manual Pins for outputting the NORMAL OPERATION state signal. (11) (24) These pins are closed when the STP pump is in rated operation. NORMAL OPERATION N.O OUT Not used. (10) (22) (It corresponds to the pin for outputting the "BATTERY OPERATION "...

  • Page 82: Figure 8.4 Con4 Remote Output Signal Connector

    STP-301/451 Series Instruction Manual STP Control Unit Remote selection state signal output pins (17) Rotational state signal output pins (18) EMERGENCY OPERATION state signal output pins (19) CR10 FAILURE state signal output pins (20) OVER TEMPERATURE state signal output pins (21) (11) ACCELERATION state...

  • Page 83: Remote Cables (Optional Accessories)

    Remote cables for CON4 are provided as optional accessories. Remote cables are available in two types: single-side connector type and both-side connector type. Contact BOC Edwards for details. Table 8.9 shows connections of remote cables of single-side connector type. Table 8.9...

  • Page 84: Adjustment Method

    Adjustment Method Tuning For the STP pump, tuning is required to align the position of levitation in the axial direction with the center of the rotor's movable range. The tuning can be performed simply by pressing the "RESET" switch. The tuning is completed before delivery, so it is not required before use. However, re-tuning is required in the following cases in which the position of levitation may deviate from the center of the rotor's movable range:...

  • Page 85: Figure 9.1 Tuning Procedures

    <Operation> <ST P Pump State> < LCD Message > Breaker ON P021* Ver.*.** Execute Self Test SELF TEST TEST COMPLETE Levitation State LEVITATION Press RESET RATING: 48000 rpm switch for 3 sec. PUMP TEMP: ** ℃ Tuning in Progress TUNING! Tuning Complete TUNING COMPLETE Figure 9.1...

  • Page 86: Setting The Rated Speed

    Setting the Rated Speed The STP pump can be set (changed) to the required rated speed in the range of 25,000 to 48,000 rpm, in units of 500 rpm. The setting can be performed even during rotation of the STP pump. The rated speed is set to 48,000 rpm at delivery.

  • Page 87: When Setting Dsw-B No. 1 To On Before Pow Ering On

    9.2.2 When Setting DSW-B No. 1 to ON before Pow ering On 1) Set dip switch 1 of DSW-B to the ON position. 2) Switch "ON" the breaker on the rear panel. After the STP pump completes the self test, the LCD displays the current rated speed in "RATING: ***00rpm."...
  • Page 88 <Operation> < LCD Message > DSW-B No.1 Change speed by turning VR1 volume Rated speed setting mode SET = ***00rpm Determine speed by SELECT Switch pressing “START” switch RATING: **000rpm Set value of rated speed SELECT Switch PUMP TEMP: ** ℃ Pump’s internal temperature SELECT Switch LEVITATION...

  • Page 89: 10 Safety Functions

    STP-301/451 Series Instruction Manual 10 Safety Functions 10.1 Pow er Failure <Operation at a Power Failure> When the power voltage drops below 170 V (in case of 200 V specification) or below 85 V (in case of 100 V specification) due to power failure, the normal operation of the magnetic bearing is maintained using the regenerative energy of the rotating rotor (backup operation during a power failure).
  • Page 90 STP-301/451 Series Instruction Manual < Operation after a Power Recovery> 1) MANUAL operation The STP pump continues decelerating even after a power recovery. Press the "START" switch to reaccelerate the STP pump. 2) REMOTE operation When the START signal is input to the REMOTE input terminal at a power recovery to reaccelerate the STP pump.

  • Page 91: Abnormal State Of Magnetic Bearing

    STP-301/451 Series Instruction Manual 10.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor falls on the touch down bearing and stops. Simultaneously, the "FAILURE"...
  • Page 92 STP-301/451 Series Instruction Manual When the rotational speed of the STP pump exceeds 51,400 rpm due to a failure in the motor driver, the breaker in the STP control unit switches "OFF." The STP pump has no power supplied and stops. Simultaneously, the "FAILURE"...
  • Page 93 STP-301/451 Series Instruction Manual Table 10.3 Safety Functions Operation state Reset by Abnormality Lamp REMOTE Probable causes of an of safety State of the STP pump RESET /Error indication output signal abnormality/error functions operation Power failure Power failure "FAILURE" "POWER "ALARM"...
  • Page 94 STP-301/451 Series Instruction Manual Operation state Reset by Abnormality Lamp REMOTE Probable causes of an of safety State of the STP pump RESET /Error indication output signal abnormality/error functions operation Overload of Excessive "FAILURE" "OVERLOAD" "ALARM" The STP pump Leakage from the Possible motor driver current flows...

  • Page 95: 11 Troubleshooting, Maintenance And Inspection

    11 Troubleshooting, Maintenance and Inspection The STP pump is provided with safety functions for various abnormalities/errors. When an abnormality occurs in the STP pump or STP control unit, a safety function operates with the "FAILURE" lamp lit, and an alarm signal is output from remote output terminals.

  • Page 96: When Error Message Is Displayed

    11.2 When Error Message is Displayed 11.2.1 Error Messages When an abnormality occurs, the "FAILURE" lamp lights and the LCD displays an error message. If an ampersand "&" is shown at the right of the error message, it indicates that more than one error occurs.

  • Page 97: Table 11.1 Error Messages

    Table 11.1 Error Messages LCD Message Probable Cause Countermeasures Refer to CABLE Incorrect connection of the Connect the cable correctly. 6.4.2 DISCONNECT STP connection cable If the cable connector is not locked, lock it securely. Failure of the STP Contact Service office. Malfunction connection cable Information...
  • Page 98 LCD Message Probable Cause Countermeasures Refer to DRIVER ERROR DRIVER HF Hall sensor error Contact Service office. DRIVER OC Motor driver overcurrent Contact Service office. DRIVER OV Motor driver overvoltage Contact Service office. Malfunction DRIVER RA STP pump overspeed Contact Service office. Information (detected in the range of 49,500 to 53,000 rpm)
  • Page 99 LCD Message Probable Cause Countermeasures Refer to 2) Insufficient cooling 2) At the time of baking or gas suction, always cool the STP pump. 3) Leakage of the vacuum 3) Check the piping system 4.3.4 piping system for leakage. 4) Repetitious start/stop 4) Repetitious start/stop operations operations may cause...

  • Page 100: Displaying Past Abnormalities/Errors And Accumulated Running-Time

    11.2.2 Displaying Past Abnormalities/Errors and Accumulated Running-Time (This function is available with the STP pump of "Ver. 2.20" and after. How to check the version is shown on the next page.) The STP pump provides a function that the LCD displays a maximum of eight error messages that occurred in the past, and a total of running-time in hours (acceleration, rated speed operation, and deceleration).
  • Page 101 <How to check the version> The version of the STP pump is displayed on the LCD immediately after the main breaker is switched "ON." < LCD Message> Main breaker “ON” ***** ver.*.** Version SELFTEST TEST COMPLETE LEVITATION...

  • Page 102: Abnormalities When Pow Ering On

    11.2.3 Abnormalities When Pow ering ON Table 11.2 Troubleshooting after Pow ering ON Symptom Probable cause Countermeasures Refer to The "POWER" lamp does Incorrect connection of Connect the power cable 6.4.2 not light, when powering the power cable correctly. Abnormal power voltage Set the voltage to 100 to 6.4.2 120V +/-10% (100V spec.) 13.2...

  • Page 103: Other Abnormalities

    11.2.5 Other Abnormalities Table 11.4 Troubleshooting While the STP Pump is Rotating Symptom Probable causes Countermeasures Refer to The STP pump stops. Check the past errors 11.2.2 referring to Section 11.2.2, "Displaying Past Abnormalities/Errors and Accumulated Running Time." Insufficient ultimate Failure of the backing Check the backing pump 4.3.4...

  • Page 104: Maintenance And Inspection

    11.3 Maintenance and Inspection ◇ When performing maintenance and inspections of the STP pump, exhaust gases inside the STP pump thoroughly. Residual gases may cause an accident w hen removing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

  • Page 105: Replacing The Fuses

    11.3.2 Replacing the Fuses ◇ Remove the probable causes of the blow n fuse (Ex. a problem w ith the remote input signal, and other) before replacing the fuse. ◇ Alw ays use specified and rated fuses. ◇ When you use parts other than those recommended in the above table, contact Service Office.

  • Page 106: Cleaning And Decontamination

    11.3.3 Cleaning and Decontamination The method of cleaning and decontamination of the STP pump and STP control unit is shown below. Table 11.6 Cleaning and Decontamination Area Cleaning and Decontamination STP Pump Exterior Wipe with proper solvent (such as alcohol). Clean off with a pure gas when dust has accumulated in the connector.
  • Page 107 ◇ Contact w ith atmospheric air may cause a reaction of the deposit. DO NOT open the STP pump to atmospheric air as much as possible.

  • Page 108: Overhaul

    Other use (2 years) Dependent on application, contact BOC Edwards. ◇ The touch dow n bearing inside the STP pump w ill be w orn out after a number of full speed touch dow ns. The costs of replacing parts that need to be replaced because of deterioration or abrasion will be at your own charge.

  • Page 109: Transporting For Repair Or Overhaul

    11.3.6 Transporting for Repair or Overhaul ◇ When returning the STP pump w hich has used any kind of gases to Service office, fill the type of gas and handling precautions in the "Malfunction Information " and fax it to Service office. ◇...

  • Page 110: 12 Storage And Disposal

    STP-301/451 Series Instruction Manual 12 Storage and Disposal 12.1 Storage of the STP Pump When the STP pump is left unused over a long period (more than a few months), follow the precautions below: 1) Close the inlet port of the STP pump and vacuum it using an auxiliary pump. 2) Introduce dry N gas or dry air from the outlet port or the purge port.

  • Page 111: Disposal

    STP-301/451 Series Instruction Manual 12.3 Disposal Dispose of the STP pump and the STP control unit as industrial w aste according to the guidelines given by each national and/or local government. ◇ When disposing of the STP pump, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident w hen disposing of the STP pump.

  • Page 112: 13 Specifications And Accessories

    STP-301/451 Series Instruction Manual 13 Specifications and Accessories 13.1 Specifications of the STP Pump Table 13.1 Specifications of the STP Pump Item STP-301 series STP-451 series ICF152/VG100/ISO10 ICF203/VG150/ISO16 Inlet port flange Flange size Outlet port flange KF25 Pumping speed >10...

  • Page 113: Figure 13.1 External Appearance Of The Stp Pump [W Ithout Anti-Corrosion Treatment] (Example: Stp-301)

    STP-301/451 Series Instruction Manual Dimensions List (STP pump and flanges) Model STP-301 Series STP-451 Series Flange 152 VG ISO100 ISO160 Figure 13.1 External Appearance of the STP Pump [w ithout Anti-Corrosion Treatment] (Example: STP-301) 13-2...

  • Page 114: Figure 13.2 External Appearance Of The Stp Pump [Chemical Specific Type C] (Example: Stp-301C)

    STP-301/451 Series Instruction Manual Dimensions List (STP pump and flanges) Model STP-301C Series STP-451C Series Flange 152 VG ISO100 ISO160 Figure 13.2 External Appearance of the STP Pump [Chemical Specific Type C] (Example: STP-301C) 13-3...

  • Page 115: Figure 13.3 Label Affixing Position For The Stp Pump

    MAN UFACTURING DATE : WEI GHT r pm RAT ED SPEED MANUF ACTURED BY:BOC Edwards Techn ologies Ltd.Nar ashino, Japan Manuf acture d by BOC Edward s at th e form er Seiko Seiki plant i n Naras hino,Ja pan Figure 13.3...

  • Page 116: Figure 13.4 Label Affixing Positions For The Optional Accessories

    STP-301/451 Series Instruction Manual Baking Heater Figure 13.4 Label Affixing Positions for the Optional Accessories 13-5...

  • Page 117: Specifications Of The Stp Control Unit

    STP-301/451 Series Instruction Manual 13.2 Specifications of the STP Control Unit Table 13.2 Specifications of the STP Control Unit Item Specifications 100 to 120+/-10% (100V specification) Input voltage 200 to 240+/-10% (200V specification) At start: Input power Under rated operation: Input frequency 50/60 +/-2 Leakage current value...
  • Page 118 STP-301/451 Series Instruction Manual Item Specifications Input/output terminals AC POWER CON1 (3 pins) P.CONNECTOR CON2 (45 pins) I/O TB1 (20 pins) I/O TB2 (6 pins) CON 4 (Optional accessory) (24 pins) Input/output cables Primary power cable STP connection cable Ground cable Safety functions Magnetic bearing abnormality/error detection...

  • Page 119: Figure 13.5 External Appearance Of The The Stp Control Unit

    STP-301/451 Series Instruction Manual 4.85 4.85 Rubber foot (4Piece) (fixed wiht screw (M4) 209.7 4-φ3.6 34.85 34.85 29.85 29.85 Figure 13.5 External Appearance of the the STP Control Unit 13-8...

  • Page 120: Figure 13.6 Label Affixing Positions For The Stp Control Unit

    P OWER SUPP LY(50 /60Hz ):1φ AC POWER CONSU MPTION: W EIGHT : MANUFACTURED BY:BOC Edwards Tecnologies Ltd.Narashino,Japan M anufac tured by BOC Edwar ds at the f ormer Seiko Seiki plant in Nar ashino ,Japan . Figure 13.6 Label Affixing Positions for the STP Control Unit...

  • Page 121: Unit Conversion Table

    UNIT CONVERSION TABLE Length inch 1.00x10 39.4 0.01 10.0 0.394 1x10 0.10 39.4x10 25.4x10 2.54 25.4 Weight 1.00x10 2.20x10 1x10 2.20 0.454 Pressure Torr kgf/cm 7.50x10 1.02x10 1.36x10 9.81 x 10...
  • Page 122 For more information, contact to the nearest Service Office. Manufacture: BOC Edw ards Japan Lim ited 2-4-1, Shibakoen, Minato-ku, Tokyo 105-0011 JAPAN Telephone: Domestic 03-5470-6530 International +81-3-5470-6530 Facsimile: Domestic 03-5470-6521 International +81-3-5470-6521 Copyright 2003 BOC Edw ards Japan Limited. All rights reserved.

This manual is also suitable for:

Stp-451 seriesStp-451cStp-451Stp-301c

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