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10(2) of appended table 1 of Japan’s Export Trade Control Order as well. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting those products. D/N.MA22ESTE, 2017OR15 ULVAC CRYOGENICS INCORPORATED...
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As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
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ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
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2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
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(3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
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There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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5-1 Cryopump Temperature Indication (When used at room temp.of 20℃)・・・・・・・・・・・・・ 5-3 5-2 Maximum Quantity of Sucked Gas Processable by Cryopump (Guideline Quantity to the Air)・・・・・・・・・・・・・・・・ 5-5 8-1 Maintenance Parts and Intervals・・・・・・・・・・・・・・・・・・・・・・・・・・・ 8-2 8-2 CRYO-U 22P Consumables・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 8-3 ® ULVAC CRYOGENICS INCORPORATED Ⅲ...
Also, it is surely required to install an exhaust duct which is connected to the pressure relief valve in order to process the gas safely. If using a toxic or flammable gas, please consult with us when MA0S001E,2014FY03 ULVAC CRYOGENICS INCORPORATED...
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KF25 flange is mounted on to the pressure relief valve for installing a duct. ☆ Figure 1 Pressure Relief Valve (ULVAC CRYOGENICS products) 2. Confirm the safety of secondary- generated gases in process Some gases would be secondarily generated in vacuum processes. They might ontain flammable gas, explosive gas, toxic gas, or combustion enhancing gas.
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15.5 - 94 38 - 90 Ammonium 15 - 79 25.4 - 75 The high pressure gas safety institute of Japan; "Koatsu-gas Kogyo Gijyutu" (High pressure gas industrial chnology) published by Kyoritsu Shuppan Co., Ltd. 1977 ULVAC CRYOGENICS INCORPORATED...
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Possible causes of ignition in the vacuum equipment are the followings: Ignition by a vacuum gauge filament being turned on Ignition by a heater with heating element(s) exposed into the process circumstance or the like ULVAC CRYOGENICS INCORPORATED...
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In case that a remarkable amount of ozone is generated in the process and accumulated in the cryopump, the following phenomena could be occurred around the pump at the initial stage of regeneration: ① Cracking/popping sounds (as in electrical arching) occurring within the first few ULVAC CRYOGENICS INCORPORATED...
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Moreover, you may have to take additional safety measures depending on the kind of the gas used, the process conditions, or the environment used. Be sure to take required and sufficient safety precautions according to actual conditions. ULVAC CRYOGENICS INCORPORATED...
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At this moment, however, never do evacuation of the hazardous gases remained in the cryopump by using a roughing pump. Because, there is a possibility that such a hazardous gas may explode in the roughing pump. In order to exhaust the dangerous gas from the cryopump safely after ULVAC CRYOGENICS INCORPORATED...
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☆ If the cryopump is used to pump corrosive gases, periodic pressure proof test is recommended. ☆ ULVAC CRYOGENICS INC. executes the pressure proof test of the cylinder by increasing the gas pressure to 1.5 times as high as the operating pressure.
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Earth : D-class grounding with the ground resistance of 100 Ω or less. ② Install ground-fault interrupter on the electric supply line for the compressor unit. ③ Do not connect any devices except a cryopump system on the outlet of the ground-fault interrupter. ULVAC CRYOGENICS INCORPORATED S-11...
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We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request. If you have any questions, please contact our Service Engineering Division or the nearest customer support center. MZIW001E,2010.01 ULVAC CRYOGENICS INCORPORATED IW-1...
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As shown in Figure 1-1, cryopump system consists of a cryopump assembly (including refrigerator unit), a compressor unit, flexible hoses, and several cables. Cryopump assembly Flexible hoses Input power cable Compressor Refrigerator unit Cooling water line unit Refrigerator power cable Typical CRYO-U ® Cryopump System Figure 1-1 ULVAC CRYOGENICS INCORPORATED...
Mounting orientation Can be installed in any orientation (*2) (*1) Shows the weight of standard cryopump. The weight varies depending on the model. (*2) Mounting orientation may be limited depending on kinds or quantity of gases to pump. ULVAC CRYOGENICS INCORPORATED...
(Refer to “Appendix F Dew Point Temperature”). Use an air conditioner to control temperature and humidity to prevent condensation. ◆ Thermometer ・ MBS-C CRYO METER ・ Hydrogen Vapor Pr essure Gauge Charged Pressure :0.35±0.02MPaG at room te K thermocouple Electromotive Force:Approximate 0mV at 20℃ ・ ULVAC CRYOGENICS INCORPORATED...
※Mounting locations of optional parts such as a thermometer and an accessory flange may be changed according to your request. Note: UVG flange is equivalent to VG of JIS standard. UVG-550 φ680 φ609.6 Accessory flange(UVG-40) Accessory flange(C-type) 16-φ19 ® External Drawing of CRYO-U Cryopump (Unit:mm) Figure 1-2 ULVAC CRYOGENICS INCORPORATED...
Shipping List for Cryopump assembly Item Quantity ® CRYO-U cryopump Instruction manual ・This instruction manual 1 each (*3) ・Instruction manual of optional devices for cryopump (*3) MBS-C CRYO-METER, RBH Band Heater, Regeneration Gas Purge PR Unit, etc. ULVAC CRYOGENICS INCORPORATED...
For optional devices such as MBS-C CRYO-METER, please refer to instruction manuals of each device for more information. If you find any missing parts or damages of the product, please contact our Service Engineering Division or the nearest Customer Support Center. ULVAC CRYOGENICS INCORPORATED...
Section 4.9 6 compressor unit. Connect the input power cable from the compressor unit to its power Section 4.9 7 source. Start the cryopump system according to the procedure described in Section 5 8 “Section 5 Operation”. MA03001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
・ Connect input power cable of the compressor unit to main power source. ・ Check the followings. a. Input voltage b. Connection of ground line The system installation is ended! operation. *Move on to Section 5 about an Figure 3-1. Quick Installation Process Flow ULVAC CRYOGENICS INCORPORATED...
If it would be concerned that the rotary pump oil might flow backward by rough pumping for a long time, the following measures are recommended: Insert a fore-line trap into the roughing line Adopt a drypump as the roughing pump ULVAC CRYOGENICS INCORPORATED...
*Install the cryopump not to face directly to the heat source. Elbow Pipe Gate Valve Usable (○) Unusable (×) Heat Source Heat Source Conduit Pipe Water Cooling Cooled Baffle Water Usable (○) Usable (○) Examples of Cryopump Installation Figure 4-2 ULVAC CRYOGENICS INCORPORATED...
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Installation R250 * This shows the minimal maintenance space required for a refrigerator unit. Maintenance Space Figure 4-3 ULVAC CRYOGENICS INCORPORATED...
In this case, our Regeneration Gas Purge PR Unit should not be used. Please design and construct the purge gas inlet and outlet lines so that dangerous gases can be smoothly exhausted. ULVAC CRYOGENICS INCORPORATED...
Be sure to connect an exhaust pipe to the cryopump pressure relief valve also. ◆Do not block the pressure relief valve. See “Safety Instructions” for details. RYO-U Cryopu mp pressure relief valve has KF25 flange to connect the exhaust pipe. ® ULVAC CRYOGENICS INCORPORATED...
2. (see Figure 4-5): a. Connect the helium-gas supply flexible hose to the helium-gas supply connector on the compressor unit. Connect the helium-gas return flexible hose to the ULVAC CRYOGENICS INCORPORATED...
2. Connect the ground. Connect the input power cable from the compressor unit t o its power source. 3. 4.The method of starting the compressor unit different depending on the models. Read the compressor unit instruction manual for more information. ULVAC CRYOGENICS INCORPORATED...
Tighten with Hold with a spanner. spanner. ②Tighten the self-sealing coupling using two spanners until the fittings are firmly sealed. When using torque wrench, the recommended torque value is 20N・m. Connecting Flexible Hoses Figure 4-5 ULVAC CRYOGENICS INCORPORATED...
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Installation This page intentionally left blank 4-10 ULVAC CRYOGENICS INCORPORATED...
80K shield can be measured with K thermocouple also. (Please refer to MBS-C instruction manual for more details.) If Hydrogen Vapor Pressure Gauge is mounted on 15K cryopanel and K thermocouple is mounted on 80K shield, refer to Table 5-1 for their indications and outputs. ULVAC CRYOGENICS INCORPORATED...
Start as follows. Please keep your operating log regularly. 1. Make sure that the 15K cryopanel has reached 20K or lower and the 80K shield has reached 130K or lower. Then turn on the roughing pump and open the roughing valve(RV2). ULVAC CRYOGENICS INCORPORATED...
The maximum allowable crossover pressure can be obtained by the following formula. [Crossover Pressure Calculation] Max. quantity of sucked gas instantaneously processable (Pa•L) Maximum allowable crossove ≦ ssure (Pa Volume of vacuum chamber (L) ULVAC CRYOGENICS INCORPORATED...
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≦ = 1,330(Pa) pressure (Pa) 00(L) † For reference † In order to restrict the stored quantity of gas and extend the regeneration cycle, it is ommended to control the actual crossover pressure to 40Pa or less. ULVAC CRYOGENICS INCORPORATED...
Please refer to Safety Instructions for these hazardous gases. ◆ When transporting cryopumps which have pumped hazardous materials, take ◆ When transporting cryopumps which have pumped hazardous materials, take appropriate measures following applicable laws or regulations. appropriate measures following applicable laws or regulations. ULVAC CRYOGENICS INCORPORATED...
Safety section. ◆Regarding toxic, corrosive, or other dangerous gases, be sure to process them safely so as not to harm the human body etc. Refer to Section 5.8 Handling of Hazardous Materials for the details. MA06001E,2012JE02 ULVAC CRYOGENICS INCORPORATED...
(nitrogen gas that its dew point temperature is -40℃ or below or argon). Refer to Paragraph 6.Regeneration after pumping flammable, explosive, or combustion enhancing gas in the Safety section. ULVAC CRYOGENICS INCORPORATED...
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(The band heater or inner heater is not applicable for certain types of cryopump.) ULVAC CRYOGENICS INC. offers different types of standard band heaters such as RBH type and silicon rubber type. The RBH band heaters self control the temperature around 70 ~ 80℃.
Then rough pump the cryopump Start up cryopump to 40Pa. After closing the roughing valve (RV1), start the cryopump. When the cryopump is cooled down Cool down completed to the prescribed temperature, the regeneration process is completed Regeneration completed ULVAC CRYOGENICS INCORPORATED...
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40Pa. When it reaches 40Pa or less, turn OFF the heater (optional). Then, close the roughing valve (RV1) and check Rough pump to 40 Pa the buildup of pressure in the cryopump. If the pressure buildup value stayed less than 6.5Pa ULVAC CRYOGENICS INCORPORATED...
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・A pump case might dew during warming up depending on the installation environment. In order to prevent a short circuit, please do not place an electric device under the cryopump. ULVAC CRYOGENICS INCORPORATED...
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In this case, the pressure relief valve will open according to the following condition to release the gas. The pressure at which the pressure relief valve begins to open is 10 kPaG, and full open is 20 kPaG. ULVAC CRYOGENICS INCORPORATED...
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Regeneration This page intentioanlly left blank. ULVAC CRYOGENICS INCORPORATED...
・However, only when carrying out heli um circuit dec ontamination procedures for the refrigerator unit, disconnect the flexible hoses from helium gas supply and return connectors at the compressor unit side right after shutdown. Refer to Section 8.5 for more details. MA07001E,2010AT01 ULVAC CRYOGENICS INCORPORATED...
(of 100Pa or less) or under the atmospheric pressure replaced with dry nitrogen. ◆If the cryopump is removed from your vacuum system, After the cryopump has reached room temperature completely, disconnect the flexible hoses. ULVAC CRYOGENICS INCORPORATED...
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◆Connect the refrigerator cable and operate the cryopump about 10 minutes biannually. This work is effective in maintaining the grease lubrication of the bearings used in the refrigerator. When the cryopump has been placed without operating for one year or more, perform cryopump decontamination before resumption of operation. ULVAC CRYOGENICS INCORPORATED...
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Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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S Valve body replacement Intake/Exhaust 16,000h valve body U Other parts replacement Other parts At fault Compressor unit S Adsorber replacement Adsorber Refer to the compressor unit instruction manual. (*1): Only applicable to a cryopump system with heater. ULVAC CRYOGENICS INCORPORATED...
Pressure relief valve O-ring (N5) Notes: 1) Material of O-ring: Viton is recommended. 2) Type N of O-ring is based on the standard enacted by ULVAC Inc. Other types of O-ring are based on JIS, ANSI or ISO standard. ULVAC CRYOGENICS INCORPORATED...
Do not wipe the blackened surface of the 80K shield with alcohol. Otherwise the blackened surface may be peeled off with a solvent. Maintenance of the pressure relief valve ◆ WARNING If the pressure relief valve is kept capped for a long time, it may fail to open at required pressure. ULVAC CRYOGENICS INCORPORATED...
Improperly connected self-sealing coupling might be one of the causes of the leakage. ◇Recommended regulator is the one designed for helium gas (left-hand thread) and has the pressure gauge of 4-6MPaG on low pressure side. ULVAC CRYOGENICS INCORPORATED...
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4.Adjust the outlet pressure of the regulator at 1.8 MPaG. Pressure relief valve has to be mounted as well as the regulator. The set pressure of the pressure relief valve is ULVAC CRYOGENICS INCORPORATED...
It is important to remove the flexible hoses right after shutdown in order to prevent re-diffusion of the impurities that have been coagulated in the refrigerator unit. Attach the charging adaptor to the disconnected end of the helium SUPPLY and RETURN flexible hoses.(See Figure 8-3) ULVAC CRYOGENICS INCORPORATED...
Therefore, ensure to reduce the inner pressure right after shutdown of the refrigerator in order not to work the pressure relief valve. Cryopump Charging Adopter V2 Flexible Hose SUPPLY Release He gas V1 RETURN Release He gas XXXXXXXX ****** Coldhead Cable V3 Figure 8-3 Connecting Charging Adopter ULVAC CRYOGENICS INCORPORATED...
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Charging Adopter Charging Hose High Purity Helium Bottle Flexible Hose V2 SUPPLY Charge helium gas V1 RETURN Release helium gas XXXXXXXX ****** Compressor Unit Cold head cable V3 To Roughing Pump Figure 8-4 Cryopump Decontamination Procedure (1) 8-10 ULVAC CRYOGENICS INCORPORATED...
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After the pressure reaches below the atmospheric pressure, the valve (V3) can be fully opened. Therefore, monitor the pressure of the roughing pump head with an appropriate pressure gauge. The maximum allowable pressure for ULVAC’s small oil-sealed rotary pump and drypump is 0.01MPaG.
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The pressure relief valve on the refrigerator may work if the charge inlet of SUPPLY /RETURN at the compressor unit and SUPPLY /RETURN flexible hoses are connected reversely, and this requires maintenance servicing. Make sure that they are connected properly. 8-12 ULVAC CRYOGENICS INCORPORATED...
Regarding various potential failures, the itemⅠto Ⅶ in Table A-1 explains its cause and measure respectively. When the trouble cannot be solved, please contact our Service Engineering Division or the nearest customer support center. MA0A001E.2012JE01 ULVAC CRYOGENICS INCORPORATED...
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Therefore, check unit. The refrigerator motor may be your control method to judge damaged if this caution is not whether the halt condition of the followed. refrigerator is normal or not. ULVAC CRYOGENICS INCORPORATED...
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If the cryopump still fails to cool down to 20K or lower even when the main valve is closed, the refrigerator unit may be out of order. Contact our Service Engineering Division or the nearest CS center. ULVAC CRYOGENICS INCORPORATED...
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Replacement of the indium sheet is required. ②Mounting bolts of 80K shield, If necessary, disassemble the 80K baffle, and 15K cryopanel. cryopump and retighten all screws. Replacement of the indium sheet is required. ULVAC CRYOGENICS INCORPORATED...
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Replace 15K cryopanel. performed at 13Pa or less for a Be sure not to perform rough long time using the oil-sealed pumping at 40Pa or less for a long rotary pump, the panel has time. been contaminated with oil. ULVAC CRYOGENICS INCORPORATED...
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Optimum voltage of the refrigera- tor unit is 144V for two-phase motor and 200V for three-phase motor. Because it should be a check under the hot line condition, an appropriate maintenance person in charge needs to check. ULVAC CRYOGENICS INCORPORATED...
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CRYO-U POWER OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
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Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
・ Avoid twisting the flexible hose especially when making final connection. ・ Keep away from water and salt to prevent corrosion. Do not put heavy things on the flexible hoses in order to prevent modification and crushing of them. MA0B001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
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Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
CRYO-U Cryopump Instruction Manual ® Appendix C CONVERSION OF THERMOMETER READINGS 1. K(CA) Thermocouple Electromotive Force Temperature E.M.F. (mV) (Ambient Temperature:20℃) MA0C001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
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The indicated value of the hydrogen vapor pressure gauge changes depending on the atmospheric pressure of the altitude. A true temperature can be read by applying the vapor pressure calculated by the following formula to the above figure. Vapor pressure [MPaG] = Indicated pressure-(0.1013-Atmospheric pressure at the altitude) ULVAC CRYOGENICS INCORPORATED...
This operation is called “regeneration” by which the performance of the cryopump can be recovered through the “temperature rise (exhaust of gas) -> degassing -> cooling” process. MA0D001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
Principles of Cryopump Operation Temperature (K) [R.E.Honing and H.O.Hook: RCA Review (Sept. 1960)] Figure D-1 Vapor Pressure of Various Kinds of Gas ULVAC CRYOGENICS INCORPORATED...
In this way, a refrigeration cycle returns to the first state. By repeating this refrigeration cycle, cryogenic temperature is obtained. Compressor unit High Displacer pressure pressure Valve A Valve B Thermal load High temp. temp. Expansion chamber (Low temperature) Regenerator Figure E-1 Principle of Refrigeration MA0E001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
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Therefore, it is a highly efficient and reliable refrigeration cycle. In this manual, the refrigeration cycle with the mechanical driving system adopted by ULVAC CRYOGENICS INC is explained. Figure E-2 shows the principle of G-M cycle & P-V chart (P: pressure, V: volume in the expansion chamber).
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Moreover, since difference pressure is not applied to seals on the 1st stage and 2nd stage, the structure where the load to the seal is light has been adopted. Therefore, a long-lived, high reliability is acquired. ULVAC CRYOGENICS INCORPORATED...
Residual moisture is frozen during Go through the regeneration process Regeneration rough pumping again, confirm that the cryopump passes the pressure buildup check, and start refrigeration. ULVAC CRYOGENICS INCORPORATED...
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23.0 25.2 26.0 27.2 10.5 14.9 18.4 21.4 23.9 26.2 27.0 28.2 * The calculation is based on Sonntag’s equation. * When the ambient relative humidity is above 85%, dew condensation will form on the cryopump case. ULVAC CRYOGENICS INCORPORATED...
Tel : +81-6-6397-0112 Fax: +81-6-6397-0126 <Inquiries about cryostats or LN generators> Kyoto Factory 140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan Tel : +81-774-28-5595 Fax: +81-774-20-2201 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 451-831 Tel : +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. www.ulvac-cryo.com 1-2 Floor, Shuguang Building, No.6 Jingyua Road,...
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“10kPaG or less”. P.6-3 The content of “◇Assisted war-up using a heater” and a CAUTION section have been revised. 2012-06-01 2012JE10 P.4-5 Section 4.4 “Connecting Purge Gas Line” The description of Regeneration Gas Purge PR Unit has been ULVAC CRYOGENICS INCORPORATED...
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P.S-7 Figure 2 The description on "Exhaust line" has been modified. 2017-10-24 2017OR15 “1. Cryopump Description” “1.3 Environmental Requirements” has been added. “8. Maintenance” has been revised. “Appendix F Dew Condensation” has been added. “SERVICE NETWORK” has been revised. ULVAC CRYOGENICS INCORPORATED...