YK16-0010-DI-002-02 Original instructions INSTRUCTION MANUAL DRY VACUUM PUMP Model CR60B Before using this product, be sure to read this operation manual. Keep this manual with care to use at any time. ULVAC, Inc. Components Division http://www.ulvac.co.jp/...
The performance and safety of the product might not be ensured if any of the devices put together did not conform to same regulations or the product itself was modified. ULVAC shall be not liable to guarantee performance and safety in such cases above. Any modification of the product by the user is out of the scope of guarantee by us and not be guaranteed in any manner.
YK16-0010-DI-002-02 0.1 Safety Symbol Marks We display symbol marks regarding the safety in this manual and on the product to make clear items to observe. Descriptions attached to the symbol are classified as illustrated below; 0.2 Meanings of Safety Symbol Marks If the user makes a mistake in handling, it indicates an imminent possibility that the user is subject to death or heavy injury.
YK16-0010-DI-002-02 0.3 Safety Precautions Descriptions are given as the method to keep away from danger and actions that must be restricted on the use of the product. Use of this product and this instruction manual. Please read this Instruction Manual before starting installation, operation check or maintenance of this product to use it in long term.
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YK16-0010-DI-002-02 Installation and storage (1) Do not push the Pump over sideways because it is shipped with lubrication oil filled up. (2) Give the instruction them further to use the unloading machinery such as crane to take out the product of the cardboard, lift it up with its top eyebolt and transfer it on lifting.
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YK16-0010-DI-002-02 Inlet piping <Mounting> Check and ensure that any of hazardous energy is blocked before starting the operation. WARNING Power Supply wiring <Mounting> (1) Check and ensure that any of hazardous energy is blocked before starting the operation. (2) Entitled staff should conduct the wiring operation. Erroneous wiring work might cause a fire.
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YK16-0010-DI-002-02 Shutdown Do not touch, open the pump cover because the motor, pump or pipe is and remains very hot while after having stopped operation. You have a risk of getting burned if a part of the body touched it. WARNING Check and repair (1) Be sure to turn OFF the MCCB (Molded Case Circuit Breaker) primary side...
YK16-0010-DI-002-02 0.4 Types and Descriptions of Warning Labels Displayed on this Pump and Displayed Positions Warning labels are attached on the warning locations in this Pump. Be sure to check them before starting operation of the Pump. There is a risk of getting electrical shock around the section that this warning label is put.
YK16-0010-DI-002-02 0.5 Acceptance and Storage of the Pump 0.5.1 Unpacking/Acceptance of the Pump (1) Do not push the Pump over sideways because it is shipped with lubrication oil filled up. (2) Give the instruction them further to use the unloading machinery such as crane to take out the product of the cardboard, lift it up with its top eyebolt and transfer it on lifting.
YK16-0010-DI-002-02 0.5.2 Transfer (1) Although this pump is provided with casters, do not move it a long distance using these casters. (2) Weight of this product is as follows. CR 60 : 48 kg You have a risk of giving damage to your back as the load larger than WARNING safety standard shall be required to transfer the product.
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YK16-0010-DI-002-02 Table of Contents INSTRUCTION MANUAL ........................1 0. Before Using This Product .......................... i 0.1 Safety Symbol Marks ........................... ii 0.2 Meanings of Safety Symbol Marks ...................... ii 0.3 Safety Precautions..........................iii 0.4 Types and Descriptions of Warning Labels Displayed on this Pump and Displayed Positions..vii 0.5 Acceptance and Storage of the Pump ....................
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8. Disposal ..............................24 9. Warranty Clauses ........................... 24 9.1 Warrantable Items..........................24 9.2 Warranty period ..........................24 9.3 Warrantee scope ..........................24 9.4 Response procedure ........................25 9.5 Others ............................... 25 Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination Contents-2...
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YK16-0010-DI-002-02 Tables and Illustrations Fig. 1 Vacuum mechanism map ......................4 Fig. 2 CR60B Outline dimensional drawing ..................6 Fig. 3 Name of each part ........................7 Fig. 4 Typical pump layout........................10 Fig. 5 Installation drawings of air filter ....................11 Fig.
YK16-0010-DI-002-02 1. For Your Safety Use 1.1 This Product Intrinsic Hazardous Nature and Safety Measures 1.1.1 Danger Leakage of dangerous gas and dangerous materials Factors Avoidance methods and measures Exhaust gas such has toxic and combustible, burnability, corrosion, explosiveness very danger.
YK16-0010-DI-002-02 1.1.3 Warning Electric shock Factors Avoidance methods and measures (1) Be sure to cut the electricity to do electrical connection. Never fail to take the grounding. (2) Ensure to close the cover of motor terminal box and never open it during operation. Getting electrical shock on touching (3) Be sure to cut the electricity to do checking or the current-carrying.
YK16-0010-DI-002-02 1.2 Chemical Material Safety Data Sheet(SDS) Chemical material used for this Pump; Pump oil: BARRIERTA J100 FLUIDE E (NOK KLUBER) The Safety Data Sheet introduces the chemical material potential to use or IMPORTANT touch on operating this machine. Please contact our Sales division if you are in need.
YK16-0010-DI-002-02 2. Pump Outline 2.1 Features High Reliability: Long-term continuous operation is possible as there are no sliding parts. Forced air-cooled: Can be placed anywhere because cooling water is not required. It is low running cost. Lightweight, compact: Easy to move because of lightweight and it is equipped with casters. Clean vacuum and evacuation: Dry pump without any sliding parts.
YK16-0010-DI-002-02 Table. 2 Details model list Model Rev. Naming External option CR60 ① ② ①Gas ballast Rev. Non : With air filter(Standard) B : Current Rev. : 1 manual valve(Needle valve) : Solenoid valve + manual valve Naming Shows power specifications (Needle valve) Single phase : S ②Rubber feet...
YK16-0010-DI-002-02 2.6 Name and description of each part Fig. 3 Name of each part Inlet flange : To be connected to vacuum chamber or pipe. Outlet flange : Outlet of exhaust gas. Gas ballast gas port : To be used to introduce air or CDA*, N2 gas if intake gas contains moisture.
YK16-0010-DI-002-02 3. Mounting (1) You are requested to install and operate the product in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and region you use the product.
YK16-0010-DI-002-02 3.2 Piping 3.2.1 Piping for inlet side Connect for pipe with KF type O-ring and cramp after removing inlet flange cap. Design the inlet side pipe with enough consideration to conductance. Connect the vacuum chamber, pipe and valve after washing inside them thoroughly. Time to reach to ultimate pressure could be longer or ultimate pressure could be worse if connected with being contaminated.
YK16-0010-DI-002-02 3.2.2 Piping for exhaust side Remove cap from outlet flange. Maximum outlet pressure of this pump is atmosphere pressure. Excessive pressure exerted on the pump causes failure. Open full of the valve if valve is installed in the exhaust side Connect to the exhaust duct from the outlet of the pump if intake gas contains moisture.
YK16-0010-DI-002-02 3.2.3 Gas ballast valve This product has the gas ballast function as standard. Condensed gas shall be liquefied at the final stage if intake gas contains moisture. Air or N2 can be introduced to the final stage, in order to prevent this.
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YK16-0010-DI-002-02 Gas ballast option code: 1 manual valve (Needle valve) and air filter Fig. 6 Explanatory diagram of gas ballast option : 1 manual valve Gas ballast option code: Solenoid valve + manual valve (Needle valve) and air filter Fig. 7 Explanatory diagram of gas ballast option: Solenoid valve + manual valve...
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YK16-0010-DI-002-02 It is an option NC (Normally closed) type solenoid valve driven by DC24V. Will become possibility to remotely open and close, by wiring refer to the following specifications. Fig. 8 Explanatory diagram of method for solenoid valve wiring Install R1/4 tube fittings by removing plug of gas ballast gas port, if N2 purge necessary. Connect to tube fitting the 1/4 inch tube.
YK16-0010-DI-002-02 3.3 Electrical Connection Install and operate this pump in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on. In the country and region you use the product. CAUTION (1) Turn OFF the Power Supply to do the electrical connection.
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YK16-0010-DI-002-02 Solder power supply cable to plug of power connection connector as shown in the table below. Make sure wire size is applicable wire size. Pump model- CR60B-T CR60B-S R phase L phase S phase N phase T phase PE/GND PE/GND Table.
YK16-0010-DI-002-02 3.3.2 Wiring for remote control Pin assignment No. I/O Item Specification OUT Start check CLOSE:Running OPEN:At stop OUT OUT COM Pump start CLOSE:Run OPEN:Stop IN COM 13 OUT Alarm CLOSE:Normal OPEN:Alarm Alarm reset CLOSE:Reset Specifications Connector maker Dai-ichi Denshi Ind., Ltd. Connector part No.
YK16-0010-DI-002-02 4. Operation 4.1 Check points and Preparations before Operation The valve in the outlet side piping line should be fully opened. 2) The main valve should be operated smoothly. After checking the valve operation, the main valve should be fully closed. 3) Confirm the conditions once again in accordance with the pre-starting check points of Table.
YK16-0010-DI-002-02 After completion of the check points and preparations before operation, start the pump according to the following procedure. 4.2.1 Local operation During local operation, keep the remote connector plug delivered with the Pump being connected. 1) Supply power by turning on primary side MCCB (Molded Case Circuit Breaker). Then cooling fan starts.
YK16-0010-DI-002-02 4.4 Operation Stop Follow these steps to stop the pump. 1) In order to prevent the back (reverse) flow of the atmospheric air or the handling gas, fully close the main (isolation) valve at suction piping side. 2) If the handling gas contains condensable gas or water vapor, the pump inside has to be dried.
YK16-0010-DI-002-02 6. Dismantling 6.1 Power Supply Wiring Install and operate the product in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on. In the country and region you use the product. CAUTION 1) Make lockout and tag-out according to the instruction manual of MCCB (Molded Case Circuit Breaker).
YK16-0010-DI-002-02 7. Maintenance 7.1 Check Be sure to check and maintenance shown in the table below, for maintain good running condition. Table. 7 Checking item list Checking cycle Checking item Check the running sound of the pump. (Check the Daily check presence of abnormal sound) Check suction and outlet pressure.
(Refer to 3.3.2 Wiring for remote wired incorrectly. control) Contact service center. To be repaired Electric leak in the pump. by ULVAC. ON/OFF switch is not turned on. Turned on the ON/OFF switch. Pump does not start by Contact service center. To be repaired remote operation.
(1) Scope and exclusion of warranty The scope of warranty is limited to the Pump only. ULVAC will repair this pump free of charge for a period of twelve (12) months from the date of delivery in case it failed due to defects in design or manufacturing during pumping down of air or nitrogen gas.
(1) In case, special agreement or memorandum for specifications is made individually, it comes in first. (2) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime, Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade Law.
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ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.
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This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.
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