MICRO-EPSILON capaNCDT 6110 IP Operating Instructions Manual page 41

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Vacuum feed through
UHV/B
capaNCDT 61xx/IP
25 (.98)
13.5 (.53)
6
(.24)
Knit line
Vacuum feed through triax with
CF16 flange
Max. leak rate 1x10e-9 mbar · l s-1
Compatible with connector type B
Page 41

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