Specifications
Model
1
Applicable fluids
Fluid temperature range
Detection method
Dry air, N
Rated
control flow
CO
2
2
range
Set
Dry air, N
controlled
flow rate
CO
2
2
range
Min. unit of set controlled flow rate
Set accumulated flow range
Min. unit of accumulated flow rate
Accumulated volume per pulse
(Pulse width = 50 ms)
Accumulated-value hold function
Control accuracy
Analog output accuracy
Repeatability
Temperature characteristics
Pressure characteristics
Settling time
Control spec. method
Operation when power supply is
disconnected
Input type
Voltage
Input impedance
Input type
Current
Input impedance
Output type
Voltage
Output impedance
Output type
Current
Load impedance
PFCA710
(Air quality: JIS B8392-1 1.1.2 to 1.6.2, ISO8573-1 1.1.2 to 1.6.2)
, Ar
0.1 to 10 L/min
2
0.1 to 5
L/min
0.04 to 10.3
, Ar
2
L/min
0.04 to 5.15
L/min
0.01 L/min
0.0 to
99,999,999.9 L
0.1 L
(when the function is not set, power supply OFF reset)
4
±2%F.S. (Operating pressure range, reference operating pressure)
Reaches within ±3%F.S. of the
commanded flow rate in
0.5 seconds or less
(Under reference conditions)
-74-
PFCA725
PFCA750
Dry air/N
/Ar/CO
2
o
0 to 50
C
Heating type sensor
0.2 to 25 L/min
0.5 to 50 L/min
0.2 to 12.5
0.5 to 25
L/min
L/min
0.1 to 25.8
0.2 to 51.5
L/min
L/min
0.1 to 12.9
0.2 to 25.8
L/min
L/min
0.1 L/min
0 to 999,999,999 L
0.1 L/Pulse
Select from every 2 or 5 minutes
±3%F.S.
±3%F.S.
±1%F.S.
o
±5%F.S. (0 to 50
C, Reference: 25
Reaches within ±3%F.S. of the
commanded flow rate in
5
(Under reference conditions)
IO-Link, local setting, analogue input
Fully closed (Normally closed (N.C.))
1 to 5 V
1 MΩ approx.
4 to 20 mA
250 Ω or less
Select from 1 to 5 V or 0 to 10 V
1 kΩ approx.
4 to 20 mA
50 to 600 Ω
PFCA711
2
1 to 100 L/min
1 to 50
L/min
0.4 to 103
L/min
0.4 to 51.5
L/min
1 L
1 L/Pulse
o
C)
1 second or less
5
No.PF※※-OMA1002
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