Table of Contents
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•Command value (PD_OUT)
Target
Units
L/min
Instantaneous
flow
cfm
Target
Units
L/min
Instantaneous
flow
cfm
10, 25, 50, 100 L/min
Rated control flow range
Range
Min.
10 L/min
25 L/min
50 L/min
100 L/min
10 L/min
25 L/min
50 L/min
100 L/min
Range
Rated control flow range
10, 50, 100 L/min
25 L/min
to
Max.
0.10
to
10.00
0.2
to
25.0
0.5
to
50.0
1.0
to
100.0
0.004
to
0.353
0.009
to
0.883
0.02
to
1.77
0.04
to
3.53
PD value
A
to
B
40
to
4000
32
to
4000
40
to
4000
-57-
Set controlled flow rate range
Min.
to
Max.
0.04
to
10.30
0.1
to
25.8
0.2
to
51.5
0.4
to
103.0
0.002
to
0.364
0.004
to
0.909
0.01
to
1.82
0.02
to
3.64
Set controlled flow rate range
E
to
F
16
to
4120
No.PF※※-OMA1002
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