6
Vacuum System
Vacuum System Components
The parts of the vacuum system are:
•
•
•
•
•
•
•
•
•
•
•
96
Foreline (rough) pump
3 High-vacuum turbo pumps
Analyzer chambers
Collision cell connections
Collision cell plate
Nitrogen purge and vent system
Side plate (analyzer door)
Vacuum seals
EI calibration valve
Vacuum control electronics
Vacuum gauges and gauge control electronics
7250 Accurate-Mass Q-TOF Troubleshooting and Maintenance Manual