Edwards nEXT730 Instruction Manual
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Edwards nEXT730 Instruction Manual

Edwards nEXT730 Instruction Manual

Turbomolecular pumps
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Turbomolecular pumps
nEXT730, nEXT930, nEXT1230
INSTRUCTION MANUAL
Original instructions
B8J200880_E

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  • Page 1 Turbomolecular pumps nEXT730, nEXT930, nEXT1230 INSTRUCTION MANUAL Original instructions B8J200880_E...
  • Page 2 Decades of Expertise: With 30+ years in the industry, Ezzi Vision is highly experienced in vacuum technology and its applications. Quality Assurance: We ensure that every Edwards pump meets the highest standards of performance and reliability. Innovative Solutions: Leading in technological advancements, we provide the latest Edwards pumps, known for their innovation and efficiency.
  • Page 3 ©Edwards Limited 2023. All rights reserved. Published: 7/20/2023 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.

  • Page 4: Table Of Contents

    Contents 1. Safety and compliance ................9 1.1 Definition of Warnings and Cautions ..............9 1.1.1 Safety symbols ................... 10 1.2 Trained personnel ................... 10 2. Important safety information ............... 11 2.1 Mechanical hazards..................11 2.2 Electrical hazards .................... 12 2.3 Thermal hazards ....................
  • Page 5 4.7 Water cooling ....................35 4.8 Electrical data ....................40 4.9 Logic interface connector ................41 4.10 Serial protocol ....................43 4.11 Command set ....................45 4.12 Multi-drop operation ..................52 4.13 Motor controller auxiliary connector socket ..........53 4.14 Indicator LEDs ....................54 5.
  • Page 6 6.1.9 Analogue signal options ..............86 6.1.10 Electronic braking options ............... 86 6.1.11 Factory settings ................87 6.1.12 Assigning a multi-drop address............87 6.1.13 Configure the pump using a TIC ............88 7. Operation ....................89 7.1 Before starting the pump ................89 7.1.1 Close the vent valve.
  • Page 7 8.5 Controller run time ..................106 8.6 Pump run time ....................106 8.7 Pump cycles....................106 8.8 Bearing run time ................... 107 9. Storage....................108 10. Disposal ....................109 11. Fault finding ..................110 11.1 Command set error codes................113 11.2 Flashing service codes .................
  • Page 8 Figure 4: Pumping speed curves for nEXT930Q/930D ..............30 Figure 5: Pumping speed curves for nEXT1230H .................30 Figure 6: Dimensional drawing for nEXT730/930 .................31 Figure 7: Dimensional drawing for nEXT1230H ................32 Figure 8: Maximum allowed rate of pressure rise during venting: pressure against time ... 34 Figure 9: Maximum relative humidity to avoid condensation with water cooling .......
  • Page 9 Figure 40: Attaching the water cooling..................78 Figure 41: Serial and parallel control flowchart ................98 Page 8...

  • Page 10: Safety And Compliance

    B8J200880_E - Safety and compliance 1. Safety and compliance 1.1 Definition of Warnings and Cautions Important safety information is highlighted as warning and caution instructions which are defined as follows. Different symbols are used according to the type of hazard. WARNING: If you do not obey a warning, there is a risk of injury or death.

  • Page 11: Safety Symbols

    B8J200880_E - Safety and compliance 1.1.1 Safety symbols The safety symbols on the products show the areas where care and attention is necessary. The safety symbols that we use on the product or in the product documentation have the following meanings: Warning/Caution Risk of injury and/or damage to equipment.

  • Page 12: Important Safety Information

    The vacuum chamber must be able to absorb the torque of max. 5 kNm (nEXT730/930) and 9 kNm (nEXT1230) around the rotor's axis of rotation in the event of sudden rotor destruction.

  • Page 13: Electrical Hazards

    B8J200880_E - Important safety information 2.2 Electrical hazards CAUTION: ELECTRICAL SHOCK Contact with live parts may lead to electrical shock. The electrical connection may only be carried out by a trained person. Observe the national regulations in the user country, e.g. for Europe EN 50110 - 1. Prior to servicing, disconnect the vacuum pump from the power supply.

  • Page 14: Dangers In Connection With Safety-Related Measures And Precautions

    B8J200880_E - Important safety information 2.5 Dangers in connection with safety-related measures and precautions CAUTION: AUTOMATIC START-UP The frequency converter is not equipped with its own emergency shut down switch. This may lead to an unwanted pump start-up. Install an emergency shut down switch in the system. The emergency shut down switch must be ■...

  • Page 15: Overview

    B8J200880_E - Overview 3. Overview A nEXT730, nEXT930 or nEXT1230 pump consists of a turbomolecular pump with a permanently attached motor controller containing drive electronics. The motor controller controls the electrical supply to the pump. It allows manual adjustment of the standby speed and all other controls can only be operated through the logic interface.

  • Page 16: Figure 1 Next Model Overview

    ISO-F200 NW40 INV B8N4A0DU0 nEXT1230H ISO-K200 NW40 INV nEXT730 and 930 pumps can be mounted in any orientation, nEXT1230 pumps can be mounted ▪ horizontally or vertically, with the high-vacuum flange on top and in any orientation in between or ▪...

  • Page 17: Motor Controller

    53. There is a USB port (item 9) which is a service port to be used with the Edwards nST2 PC software, using a standard micro-USB cable. This will enable the pump to be configured, monitored and upgraded without disconnecting from the 48 V d.c. supply. This software is available for download from the Edwards' Upgrade website: www.upgrades.edwardsvacuum.com.

  • Page 18: Power Limit Setting

    B8J200880_E - Overview 3.3.1 Power limit setting Select the maximum power that will be drawn by the pump. The more power supplied, the quicker the pump will accelerate to reach full speed. If the application requires fast cycling or higher gas loads, set the power limit to the maximum value.

  • Page 19: Automatic Vent Options

    B8J200880_E - Overview ▪ Measured pump rotational speed (default condition) ▪ Measured link power ▪ Measured motor temperature ▪ Measured motor controller temperature ▪ Measured bearing temperature The analogue output signal ranges from 0 to 10 V and is directly proportional to the system parameter (refer to Logic interface on page 19).

  • Page 20: Electronic Braking

    B8J200880_E - Overview 3.3.7 Electronic braking The pump has a user selectable electronic braking option that is disabled by default. With this option disabled, the pump will draw power from the electrical supply connected to the pump via the nEXT pump power supply cable when accelerating and running.

  • Page 21: Usb Interface

    The simple parallel interface is a quick and easy way to control the pump. This is the same interface used on existing 24 V Edwards Turbo Pumps. The controls that are available to use are start and standby. The system status can be monitored using the normal, fail and analogue output signals.

  • Page 22: Serial Control With Parallel Monitoring

    USB service port. If using the USB service port in conjunction with Edwards nST2 PC software, the serial enable signal does not need to be linked to 0 V for the serial communications to take place.
  • Page 23 The USB service port can also be used in conjunction with the Edwards nST2 PC software to configure the nEXT pump. The configuration can then be downloaded to another nEXT pump, in the same way as it can with a TIC, which is useful when configuring a number of nEXT pumps.

  • Page 24: Technical Data

    B8J200880_E - Technical data 4. Technical data 4.1 Operating and storage conditions Table 2 Operating and storage conditions Range Data Ambient operating temperature range 5 °C to 40 °C Ambient humidity range max. 85 % RH (non‑condensing) Maximum operating altitude 4000 m (de-rated above 2000 m) Ambient storage temperature range -15 °C to 70 °C...
  • Page 25 B8J200880_E - Technical data Table 3 Technical data nEXT730, nEXT930 nEXT 730D 730D 930D 930D 730H 730H 730Q 930Q High-vacuum connection 160 ISO-K 160 CF 200 ISO-K 200 CF 160 ISO-K 160 CF 160 ISO-K 200 ISO-K Forevacuum connection 25 KF †...
  • Page 26 B8J200880_E - Technical data nEXT 730D 730D 930D 930D 730H 730H 730Q 930Q Power consumption at ultimate pressure Type of protection Type 1 (UL 50E) Cooling standard Convection* Water* Cooling optional Air or water* Cooling water connection plug-in connection for 6x1 hose / alternative G 1/8" Cooling water consumption Permissible cooling water pressure (bar(g): bar (gauge) is overpressure, i.e.
  • Page 27 B8J200880_E - Technical data nEXT 730D 730D 930D 930D 730H 730H 730Q 930Q Magnetic field resistance ▪ for an axial magnetic field ▪ for an radial magnetic field Magnetic stray field at ▪ in axial direction mGauss ▪ in radial direction * Depending on the ambient temperature, the gas throughput and the type of gas, forced air cooling or water cooling may be necessary.
  • Page 28 B8J200880_E - Technical data Table 4 Technical data nEXT1230 nEXT 1230H High-vacuum connection 200 CF 200 ISO-F 200 ISO-K Forevacuum connection 40 KF † Pumping speed for 1250 1150 I · s 1350 1150 Gas throughput mbar · I · s >...
  • Page 29 B8J200880_E - Technical data nEXT 1230H Recommended forevacuum pumps XDS35i or E2M28 Noise level with convection cooling dB(A) < 44 with radial air cooler < 55 Maximum bake-out temperature of the °C – – CF version, water cooled mbar · I · s Purge gas flow sccm Purge gas connection...

  • Page 30: Pumping Speed Curves

    B8J200880_E - Technical data 4.2.1 Pumping speed curves Figure 2 Pumping speed curves for nEXT730H Figure 3 Pumping speed curves for nEXT730Q/730D Page 29...

  • Page 31: Figure 4 Pumping Speed Curves For Next930Q/930D

    B8J200880_E - Technical data Figure 4 Pumping speed curves for nEXT930Q/930D Figure 5 Pumping speed curves for nEXT1230H Page 30...

  • Page 32: Figure 6 Dimensional Drawing For Next730/930

    B8J200880_E - Technical data Figure 6 Dimensional drawing for nEXT730/930 All measurements indicated are shown in mm 1. VENT G 1/8" 2. PURGE G 1/8" 3. DN 25 KF 4. 48 V d.c. power supply cable, 0.6 m long including plug 5.

  • Page 33: Figure 7 Dimensional Drawing For Next1230H

    B8J200880_E - Technical data Figure 7 Dimensional drawing for nEXT1230H Ø A M8-14 DN 40 KF 4x M5-8 All measurements indicated are shown in mm 1. PURGE G 1/8" 2. VENT G 1/8" 3. Water cooling, quick coupling for 8 mm hose 4.

  • Page 34: Pumping Media

    Failure to contact the supplier may invalidate the warranty of the pump. The pump is not suitable for pumping aggressive or corrosive gases. Refer to the Edwards Vacuum Pump and Vacuum Safety manual P40040100 for safety information associated with the specification, design and operation of vacuum pumps and vacuum systems.

  • Page 35: Vent Gas Specification And Vent Control Data

    B8J200880_E - Technical data The pump can be used to pump oxygen and water vapour, subject to the following conditions: ▪ Oxygen - The oxygen concentration must be less than 25% by volume. 4.4 Vent gas specification and vent control data Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the subsequent pump‑down time.

  • Page 36: Purge Gas Specification

    B8J200880_E - Technical data ▪ PTFE 4.6 Purge gas specification Table 8 Purge gas specification Purge gas specification Reference data Purge gas Dry air, nitrogen, argon or other inert gases Maximum dew point at atmospheric -22 °C pressure Maximum size of particulates 1 µm Maximum concentration of oil 0.1 parts per million...

  • Page 37: Figure 9 Maximum Relative Humidity To Avoid Condensation With Water Cooling

    B8J200880_E - Technical data Figure 9 Maximum relative humidity to avoid condensation with water cooling Page 36...

  • Page 38: Figure 10 Cooling Requirements For Nitrogen For Next730H

    B8J200880_E - Technical data Figure 10 Cooling requirements for nitrogen for nEXT730H Figure 11 Cooling requirements for argon for nEXT730H Page 37...

  • Page 39: Figure 12 Cooling Requirements For Nitrogen For Next730Q/930Q

    B8J200880_E - Technical data Figure 12 Cooling requirements for nitrogen for nEXT730Q/930Q Figure 13 Cooling requirements for argon for nEXT730Q/930Q Page 38...

  • Page 40: Figure 14 Cooling Requirements For Nitrogen For Next730D/930D

    B8J200880_E - Technical data Figure 14 Cooling requirements for nitrogen for nEXT730D/930D Figure 15 Cooling requirements for argon for nEXT730D/930D Page 39...

  • Page 41: Electrical Data

    Figure 17 Cooling requirements for argon for nEXT1230H 4.8 Electrical data The nEXT pumps can be driven by either the customers system or by the Edwards TIC Turbo Instrument Controller, TIC Turbo Controller or TAG Controller. If using the customer system, an appropriate, pre-approved, UL/CSA rated 48 V d.c.

  • Page 42: Logic Interface Connector

    Table: Logic interface technical data. If the facility to adjust the power limit setting is not available, use a power supply capable of delivering enough current to meet the Edwards factory default power limit setting, shown in Table: Logic interface technical data.
  • Page 43 B8J200880_E - Technical data Logic interface item < Normal speed (default 80%) Off (2.2 k pull up to 12 V d.c.)  Normal speed On (< 0.8 V d.c. sinking 20 mA) Current rating 20 mA to 0 V Voltage rating 28.8 V d.c.

  • Page 44: Serial Protocol

    B8J200880_E - Technical data Signal Polarity Use Number 8, 13, 14 Electrical supply: 0 V 1, 6, 11 Electrical supply: 24 V - Positive 48 V d.c. Figure 18 Interface circuits for nEXT turbo pump controllers 4.10 Serial protocol The serial interface link is set to 9600 Baud, 8 bits, 1 stop, no parity with no handshaking.
  • Page 45 B8J200880_E - Technical data Note: All alphabetical characters must be sent in upper case format. The response may contain lower case characters. Every complete command message sent will receive a response - either a status code or a data return. The nEXT pump can only process with one message at a time. It will only accept a new message once the response to the previous message has been returned.

  • Page 46: Command Set

    System status word Time setting !S854 1..30 decimal minutes Timeout period for both initial ramp up and if speed drops below 50% ?S854 Power limit setting !S855 nEXT730/930: decimal Watts Link power maximum 190..600 nEXT1230: 300..800 ?S855 Page 45...
  • Page 47 B8J200880_E - Technical data Object name Command Parameter range Factory Data type Units Comments setting Normal speed !S856 50..100 decimal Normal speed as a percentage of full setting speed ?S856 Standby speed !S857 55..100 decimal Standby speed as a percentage of full setting speed ?S857...
  • Page 48 B8J200880_E - Technical data Object name Command Parameter range Factory Data type Units Comments setting Timer options !S870 decimal Timer = disabled ?S870 Timer = enabled Note that the timer is permanently enabled on ramp-up. Analogue signal !S871 decimal Analogue output = measured speed options ?S871 Analogue output = measured power...
  • Page 49 B8J200880_E - Technical data Object name Command Parameter range Factory Data type Units Comments setting Service status ?V881 32 bits flags Service status word Controller run time ?V882 0..999999 decimal hours Hours run by controller 0..999999 decimal hours Hours until controller service due Pump run time ?V883 0..999999...
  • Page 50 B8J200880_E - Technical data Object name Command Parameter range Factory Data type Units Comments setting Same as option 6 Output is permanently energised (Fan Do not use Output is permanently de-energised (Fan OFF) Do not use Do not use Do not use Hard vent when <...
  • Page 51 B8J200880_E - Technical data Object name Command Parameter range Factory Data type Units Comments setting Hard vent if stop or fail Same as option 6 Output is permanently energised (Fan Do not use Output is permanently de-energised (Fan OFF) Do not use Do not use Do not use Hard vent when <...
  • Page 52 B8J200880_E - Technical data Object name Command Parameter range Factory Data type Units Comments setting Bearing inactive ?V893 0..999999 decimal hours Bearing inactive time time !C893 decimal Reset bearing inactivity hours Real Time Clock ?V895 0..3599996400 Date and time This is UTC represented in seconds since start of the year 2000 i.e.

  • Page 53: Multi-Drop Operation

    B8J200880_E - Technical data 4.12 Multi-drop operation Using multi‑drop mode, a single computer system can communicate with more than one nEXT pump. Each nEXT pump must be assigned its own individual address before it can be fitted into a multi‑drop system. The command to assign the multi‑drop address is sent in standard nEXT message format (as detailed in Assigning a multi-drop address page 87).

  • Page 54: Motor Controller Auxiliary Connector Socket

    B8J200880_E - Technical data Figure 20 RS485 multi-drop connection 1. RS485 interface on control 2. nEXT pump logic interface equipment 4.13 Motor controller auxiliary connector socket The nEXT pump has a 4-way auxiliary connector socket on the front of the motor controller.

  • Page 55: Indicator Leds

    91). Aux output 1 has default settings for a normally open vent valve and Aux output 2 has default settings for a fan. Edwards nEXT air coolers and vent valve accessories (refer to Accessories on page 123), which have the corresponding connector fitted, are pre-configured to Aux output 1 and Aux output 2 for convenience and to provide plug and play ability.
  • Page 56 B8J200880_E - Technical data Description This red LED flashes in a sequence to indicate an error code if a FAIL condition is preventing pump operation. The error Alarm LED codes can be used for fault finding as described in Fault finding on page 110.

  • Page 57: Installation

    7. It is advised to retain all packing materials for use, should you return the pump for service. Table 15 Checklist of items Quantity Description Check ❏ nEXT730, nEXT930 or nEXT1230 Turbomolecular Vacuum Pump ❏ Integral mesh centering ring O-ring seal (ISO variants only. Screen will be fitted to CF pumps.) Page 56...

  • Page 58: Connect To The Vacuum System

    B8J200880_E - Installation Figure 22 Typical pumping system with a nEXT pump 1. Vacuum system 2. High vacuum gauge 3. Inlet screen 4. nEXT pump 5. Backing valve 6. Vacuum gauge 7. Flexible bellows 8. Foreline trap *§ § 9. Backing pump 10.

  • Page 59: Remove And Replace The Inlet Screen

    B8J200880_E - Installation CAUTION Ensure that any cabling and or pipe work attached to the pump are routed carefully to avoid causing a slip/trip hazard and to prevent any damage to the cable. Figure 23 Connections and controls 1. Inlet flange 2.

  • Page 60: Mounting Orientation

    If they are not already in place, the tangs must be snapped into the locating groove in the inlet flange using a suitable tool to press them into position. For ISO flanged pumps, Edwards supplies a combination inlet screen/trapped O-ring. 5.2.2 Mounting orientation...

  • Page 61: Mount The Pump

    The vacuum chamber must be able to absorb the torque of max. 5 kNm for the nEXT730/930 and of max. 9 kNm for the nEXT1230 around the rotor's axis of rotation in the event of sudden rotor destruction.
  • Page 62 B8J200880_E - Installation All inlet flange bolts must be re-tightened once the system is under vacuum. Ensure that no torques or other forces are transmitted to the pump from the vacuum system or the associated pipelines. nEXT730 nEXT930 nEXT1230 Mounting position...

  • Page 63: Figure 26 Mounting High Vacuum Iso-F Flange Connection With Clearance Hole

    B8J200880_E - Installation Figure 26 Mounting high vacuum ISO-F flange connection with clearance hole 1. Nut 2. ISO-F flange 3. Vacuum sealing disk consisting of 4. ISO-F flange centering ring and O-ring with outer support ring 5. Bolt nEXT 1230 Flange DN 200 ISO-F Number of bolts...

  • Page 64: Figure 27 Mounting High Vacuum Iso-F Flange Connection With Blind Hole Thread

    B8J200880_E - Installation Figure 27 Mounting high vacuum ISO-F flange connection with blind hole thread 1. ISO-F flange 2. ISO-F flange 3. Bolt 4. Centering ring nEXT 1230 Flange DN 200 ISO-F Number of bolts 12 x M10x35 Minimum bolt strength, yield >640 N/mm strength Bolt quality...

  • Page 65: Figure 28 Mounting High Vacuum Flange Iso-K Flange At Iso-F Flange With Collar Flange

    B8J200880_E - Installation Figure 28 Mounting high vacuum flange ISO-K flange at ISO-F flange with collar flange 1. Outer ring 2. O-ring 3. Centering ring 4. Retaining ring 5. Collar flange 6. Bolt with washer 7. Pump housing with ISO-K flange nEXT 730/930 1230...

  • Page 66: Figure 29 Mounting High Vacuum Flange Iso-K Flange At Iso-K Flange

    B8J200880_E - Installation Figure 29 Mounting high vacuum flange ISO-K flange at ISO-K flange 1. Outer ring 2. O-ring 3. Centering ring 4. Clamp 5. Pump housing with ISO-K flange TURBOVAC 730/930 1230 Flange DN 160 ISO-K DN 200 ISO-K DN 200 ISO-K Number of clamps 12 x M10...

  • Page 67: Figure 30 Mounting High Vacuum Flange Iso-K Flange At Iso-F Flange With Claws

    B8J200880_E - Installation Figure 30 Mounting high vacuum flange ISO-K flange at ISO-F flange with claws 1. Outer ring 2. O-ring 3. Centering ring 4. Claw with bolt 5. Pump housing with ISO-K flange TURBOVAC 730/930 1230 Flange DN 160 ISO-K DN 200 ISO-K DN 200 ISO-K Number of clamps...

  • Page 68: Figure 31 Mounting High Vacuum Cf Flange Connection With Clearance Hole

    B8J200880_E - Installation Figure 31 Mounting high vacuum CF flange connection with clearance hole 1. Copper gasket 2. Bolt with washer and nut 3. Pump housing with CF flange TURBOVAC 730/930/1230 Flange DN 160 CF DN 200 CF Number of bolts 20 x M8 24 x M8 Minimum bolt strength, yield strength...

  • Page 69: Backing Port Connection

    The fastening torque levels apply to lubricated threads. 5.2.4 Backing port connection The pump is suitable for use with Edwards Rotary Vane, Scroll or diaphragm backing pumps. System performance may depend upon which pump is used. Contact Edwards when selecting an appropriate backing pump for the application.

  • Page 70: Purge Gas Connection

    B8J200880_E - Installation NOTICE: Do not use the pump with a backing pressure below 5 x 10 mbar (5 x 10 Pa). Lower backing pressures will increase the evaporation rate of the lubrication reducing the bearing life. Use suitable vacuum tubing and connectors to connect the flange of the backing port to the backing pump.

  • Page 71: Earth (Ground) Connections

    TIC or TAG, and the nEXT pump is powered separately using the Edwards power supply or alternatively the customer power supply connected to the pump via the dedicated nEXT pump power supply cable.

  • Page 72: Connect The Electrical Supply

    B8J200880_E - Installation 5.4.4 Connect the electrical supply CAUTION: This product requires a separate power supply (not included). The power supply should be adequately protected against a hazardous live condition (for example, in case of a short circuit). CAUTION: Incorporate a suitable Emergency Stop Switch in the electrical supply. Locate the switch in an easily accessible position and mark it as the emergency disconnecting device for the pump.

  • Page 73: Connect The Parallel Control And Monitoring

    B8J200880_E - Installation Figure 34 Power supply connector 1. +48V DC Supply 2. 0V Supply 3. Chassis 5.5 Connect the parallel control and monitoring Connections for parallel control and monitoring must be made using a suitable mating half that is not supplied. NOTICE: If using the normal and fail lines to drive the coils of d.c.

  • Page 74: Connection For Serial Control And Monitoring

    B8J200880_E - Installation 4. To monitor the fail status output, connect the customer control equipment to the fail output (pin 7) and to pin 2 of the customer logic interface mating half. The output can be used to control other devices in the pumping system. The output can drive a low power relay of up to 24 V d.c.

  • Page 75: Connect The Serial Interface To The Customer Control Equipment

    B8J200880_E - Installation 5.6.1 Connect the serial interface to the customer control equipment The serial interface is available in RS485 or RS232 options which can be selected using the slide switch located adjacent to the main power lead. To adjust the slide switch, toggle the slide switch using a small tool. The motor controller default setting is RS232 serial interface.

  • Page 76: Serial Enable

    Link the serial enable input signal (pin 5) to pin 2 of the customer logic interface mating half. Edwards recommends incorporating this link into the serial communications cable so that the serial enable is only activated when the serial cable is connected. When the cable is removed, serial enable will become inactive.

  • Page 77: Connection For Mixed Parallel And Serial Operation

    USB service port using the Edwards nST2 PC software. Alternatively, the pump can be controlled using commands sent over the serial interface while at the same time monitoring the normal signal and analogue output over the parallel interface.

  • Page 78: Cooling

    Pump performance may be affected if you do not cool the pump and nEXT motor controller adequately. Edwards recommends that, wherever possible, the pump is cooled by forced air cooling or water cooling.

  • Page 79: Forced Air Cooling

    5.8.2 Forced air cooling The customer controller can be configured to drive an air cooler only if commands can be sent via the serial interface or an Edwards TIC Turbo and Instrument Controller or Turbo Controller. Air cooling accessories are available for nEXT pumps. Fit the air cooler as described in the instruction manual supplied with it.
  • Page 80 B8J200880_E - Installation The nEXT1230H pump has a built-in cooling water block as standard. The nEXT730Q and nEXT930Q has a built-in water cooling system. For nEXT730D, nEXT930D, nEXT730H and nEXT930H: Attach the cooling water block to the pump with four M4 screws, tightening torque is 3 Connect the cooling water hoses.

  • Page 81: Configuration

    Configure the pump using serial commands on page 80 details the commands that will be needed to configure the motor controller. Alternatively use the Edwards TIC Turbo and Instrument Controller, TIC Turbo Controller or TAG Controller. Further information regarding this is detailed in Configure the pump using a TIC on page 88.

  • Page 82: Message Structure

    B8J200880_E - Configuration Standby speed setting The pump can be run at standby speed rather than full rotational speed. The standby speed is a user-configurable option and can be set to any value on page 84 between 55% and 100% full rotational speed. Normal speed setting The normal speed is a user-configurable setting and can be set to any value page 84...

  • Page 83: Power Limit Setting

    Table 17 Power limit setting Maximum value Minimum value Default power setting setting setting nEXT730/930 600 W 190 W 500 W nEXT1230 800 W 300 W 500 W Send the command as follows (where the 'd' characters represent the value in Watts that will be set.

  • Page 84: Powering A Fan From The Motor Controller

    B8J200880_E - Configuration 6.1.4 Powering a fan from the motor controller A fan can be powered from the nEXT motor controller on auxiliary output 2. Send the following command: Command The reply will be in the following format: Reply The permanently enabled fan setting is now stored in memory within the nEXT pump. When the pump is shipped, it is set up to run a vent valve.

  • Page 85: Standby Speed Setting

    B8J200880_E - Configuration The valve type is now stored in memory within the nEXT pump, but a power cycle is required before the auxiliary 1 output circuitry adjusts to the stored request. To check the venting option that is set, send a query as follows: Reply The reply will be in the following format: Reply...

  • Page 86: Timer Setting And Options

    B8J200880_E - Configuration Command The normal speed is now stored in memory within the nEXT pump. To check what normal speed is set, send a query as follows: Command The reply will be as follows: Reply 6.1.8 Timer setting and options The timeout period is a user-configurable option and can be set to any value from 1 to 30 minutes.

  • Page 87: Analogue Signal Options

    B8J200880_E - Configuration Command The reply will be as follows (where d=0 means disabled and d=1 means enabled): Reply 6.1.9 Analogue signal options The analogue output can be used to monitor one of five different parameters. Table 18 Analogue signal options Option number Description of analogue output number Measured pump rotational speed.

  • Page 88: Factory Settings

    B8J200880_E - Configuration Reply To check whether electronic braking is enabled or disabled, send the following query: Command The reply will be as follows (where d=0 means disabled and d=1 means enabled): Reply 6.1.11 Factory settings The nEXT pump can be re‑configured to its original factory settings with one serial command.

  • Page 89: Configure The Pump Using A Tic

    Once multi-drop mode is disabled, the pump will no longer respond to multi-drop commands. 6.1.13 Configure the pump using a TIC The nEXT pump can be configured using the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. Refer to TIC or TAG logic interface connections on page 70.

  • Page 90: Operation

    B8J200880_E - Operation 7. Operation 7.1 Before starting the pump Before starting the pump the vent valve must be closed and pre-start sequence completed. 7.1.1 Close the vent valve The vent valve can be closed manually, by using the customer control system or by TAV solenoid valve.

  • Page 91: Vent Options, Vent Valve Connection And Control

    7.2.1 Manual vent valve Edwards recommends that the manual vent valve is opened only after the pump speed has fallen to 50% of full rotational speed. A manual vent valve is supplied with the nEXT pump. It is not possible to accurately control the rate of pressure rise using the manual vent valve so take care not to open it too quickly.

  • Page 92: Vent Valve Control

    7.2.3 Vent valve control The TAV solenoid valve can be controlled by the nEXT motor controller or by an Edwards TIC Turbo Instrument Controller. The nEXT controller can control the rate of venting, using the vent valve options in...
  • Page 93 The controller can be configured to one of the other venting options provided commands can be sent via the serial interface, an Edwards TIC Turbo and Instrument Controller, TIC Turbo Controller, or the Edwards nST2 PC software can be used via the USB serial port.

  • Page 94: Alternative Valve Connected To The Vacuum System

    B8J200880_E - Operation 7.2.4 Alternative valve connected to the vacuum system When using another vent valve, ensure that a suitable vent restrictor is fitted to the vacuum system to limit the rate of pressure rise. Refer to Table: Vent restrictor orifice diameter if venting the vacuum system chamber information about vent restrictor sizes.

  • Page 95: Stop The Pump With Parallel Monitoring

    B8J200880_E - Operation 1. To run the nEXT pump at standby speed, link the standby control input to the 0 V control reference on the logic interface connector. 2. To return the pump to full speed, disconnect the standby control input from the 0 V control reference on the logic interface connector.

  • Page 96: Start The Pump With Serial Control

    B8J200880_E - Operation 7.4.2 Start the pump with serial control CAUTION: Do not operate the pump with its rotor exposed. Before operating the pump it must first be connected to the vacuum system. If the pump is operated with its rotor exposed, the pump rotor can cause injury as it rotates at very high speeds and the rotating blades might not be visible.

  • Page 97: Stop The Pump With Serial Control

    B8J200880_E - Operation 7.4.4 Stop the pump with serial control On successful receipt of the stop command, the pump rotor will decelerate to rest. To stop the nEXT pump, send the following command over the serial communications link: Command The reply will be in the following format: Reply 7.4.5 Monitor temperature readings with serial control The temperatures of the pump motor, rotor and the internal electronics of the nEXT...

  • Page 98: Mixed Parallel And Serial Operation

    B8J200880_E - Operation Note: The second return number is a 32-bit system status word (set of 8 hexadecimal characters) which is useful for fault finding. Refer to Fault finding on page 110. 7.5 Mixed parallel and serial operation In mixed parallel and serial operation the pump may receive commands from both serial and parallel interfaces.

  • Page 99: Operation With A Tic Or Tag

    B8J200880_E - Operation therefore only in serial control mode. In serial control mode, the pump cannot be commanded to standby speed by the standby line, instead a serial standby command must be used. The parallel normal and analogue output signals provide valid pump status information at all times under mixed parallel and serial operation.

  • Page 100: Operation At Extreme Conditions

    B8J200880_E - Operation CAUTION: Do not open a manual vent valve until the pump rotational speed has fallen below 50%, otherwise the rate of pressure rise may be too high, which could damage the pump. In an emergency only, open the vent valve quickly to decelerate the pump rotor in the shortest possible time.

  • Page 101: Protection Against Over-Speed

    The motor controller will signal a fail condition if over‑speed has been detected. If the pump appears to be running at over-speed, switch it off and consult Edwards or the supplier. 7.8.4 Electrical supply failure If the electrical supply to the nEXT pump fails when the pump is rotating, the pump motor is used as a generator.

  • Page 102: Bakeout

    B8J200880_E - Operation Table 22 Behaviour of a pump when the power is re-instated after an electrical supply failure Length of power failure Control mode Behaviour of pump Regenerative power maintains all output signals Power is reinstated before during the power failure. The pump will ramp to Either parallel or pump rotational speed falls serial control mode...

  • Page 103: Shut Down The Pump Manually

    When baking the pump to above 70 °C at the inlet flange, the pump must be water cooled to prevent damage to the bearing lubricant. The Edwards flange heater may be used to heat the pump (refer to Accessories on page 123).

  • Page 104: Maintenance

    104 The fatigue life of nEXT Turbomolecular pump rotors is typically 40,000 to 50,000 cycles. As a precautionary measure, Edwards recommends that pumps are returned for a major service (rotor re- placement) after 20,000 cycles of acceleration to full speed and back to a stop, or after ten years of use, whichever occurs first.

  • Page 105: Rotor Life

    119. Any organic solvent can be used to clean the external surfaces of the pump. Edwards recommend the use of non-CFC solvents such as isopropanol or ethanol. Only a minimal amount of a cleaning solution is required which is suitable for the contaminants on the pump surfaces.
  • Page 106 B8J200880_E - Maintenance Reply The service status word is made up of 8 hexidecimal digits. To decode this word, convert each digit into a 4-digit binary number in the same manner as the system status word, which is described in Decoding system status words on page 116.

  • Page 107: Controller Run Time

    B8J200880_E - Maintenance Bit number Status flag Active flag means Bearing conditioning Set if Bearing conditioning is automatically automatic enable enabled on bit 8 or 9 set. Typically enabled by default Bearing conditioning Set if Bearing conditioning is presently enabled enabled, refer to Bearing run in mode page 121.

  • Page 108: Bearing Run Time

    B8J200880_E - Maintenance Reply sp d 8.8 Bearing run time The run hours and recommended service time of the bearing in the nEXT pump can be monitored. Send the following query: Command The reply will be as follows, where the first number is the hours run by the bearing and the second is the number of hours until service is recommended: Reply sp d...

  • Page 109: Storage

    B8J200880_E - Storage 9. Storage Avoid long-term storage if possible. When long-term storage is necessary, the pump should be set up and run for at least eight hours every 12 months. Use the following procedure to store the pump. 1. Place protective covers over all ports, the main inlet, inter-stage exhaust, purge and vent ports.

  • Page 110: Disposal

    B8J200880_E - Disposal 10. Disposal WARNING: In the unlikely event of a failure of the pump rotor, there may be some dust created from the rotary components inside the pump touching each other. In this event use appropriate personal protective equipment when handling and disposing of the pump and ensure that all pump inlets and outlets are capped off before disposal.

  • Page 111: Fault Finding

    B8J200880_E - Fault finding 11. Fault finding Table 25 Fault finding Symptom The controller LEDs do not flash for 0.5 seconds when system switched on on page 110 The pump does not rotate after a parallel start command is supplied on page 110 The pump does not rotate after a serial start command is sent on page 110...
  • Page 112 The pump is running too hot. ▪ Increase the cooling to the pump. Change from air cooling to water cooling Remedy (refer to Table: Technical data nEXT730, nEXT930 Table: Technical data nEXT1230 for maximum inlet pressure and cooling requirements). ▪ Increase cooling water flow or decrease the water temperature or do both.
  • Page 113 The inlet pressure is poor. ▪ Remove the pump from the system and test the ultimate pressure of the Remedy pump alone (refer to Table: Technical data nEXT730, nEXT930 Table: Technical data nEXT1230). ▪ If inlet pressure is poor, check the pump for contamination and refer to...

  • Page 114: Command Set Error Codes

    B8J200880_E - Fault finding Cause Slide switch is not in the correct position for RS232 or RS485. Remedy Left for RS485, right for RS232. Right for parallel control and monitoring. Fault Yellow service LED is flashing a repeated sequence Cause A service is required.

  • Page 115: Flashing Service Codes

    In this case, try cycling the power. If cycling the power does not clear the indiwill be required. Contact the supplier or Edwards. If the alarm LED is flashing, identify the error flash code and consult the table in Decoding system status words page 116.

  • Page 116: Flashing Inactivity Service Codes (Blue Bearing Led)

    B8J200880_E - Fault finding Table 28 Flashing error codes Error flash Error flash Comments Actions position code The speed fell below 50% of full Check whether the pump is too ssssss rotational speed with the Timer hot or whether the inlet pressure disabled.

  • Page 117: Decoding System Status Words

    B8J200880_E - Fault finding Table 29 Flashing inactivity service codes Inactivity service flash Comments Actions code The pump has been stored or has not been run LED on 0.25s Bearing conditioning for more than a year. It is recommended that the recommended LED off 0.75s bearing conditioning is performed.
  • Page 118 B8J200880_E - Fault finding Hexadecimal Binary Decimal 1100 1101 1110 1111 Each binary digit (bit) represents a flag that is either active (state 1) or not active (state 0). To help decode the System Status Word, each bit is numbered (starting with 0 for the least significant to 31 for the most significant) as shown below.

  • Page 119: Service Information

    B8J200880_E - Fault finding Table 32 Example decoding of system status words Status of bit (in example) Indication number The pump has not failed The pump is at rest Speed is below normal speed The vent valve is open There is no active start command Serial enable is active Standby is not active Speed is below 50% of full rotational speed...

  • Page 120: Service

    B8J200880_E - Service 12. Service Note: Our policy is to provide support for product after obsolescence through various options including maintenance, repair, enhancement and replacement. Support will be available for several years after product obsolescence and in compliance with any applicable legislation.

  • Page 121: Bearing Monitoring And Conditioning System

    B8J200880_E - Service NOTICE: If we do not receive a completed form, your equipment cannot be serviced. 12.2 Bearing monitoring and conditioning system To ensure maximum reliability and bearing life nEXT pumps have an integrated system to manage the bearing condition. The status is indicated by a blue LED on the pump. The pumps have an integrated battery-backed real time clock that is constantly monitoring pump storage time.

  • Page 122: Bearing Run In Mode

    B8J200880_E - Service Table 33 Service tool kits Service tool kit Item number Bearing exchange tool kit nEXT730/930 B8J200845 Bearing exchange tool kit nEXT1230 B8M200845 Table 34 Service kits Service kit Item number Bearing kit nEXT730/930 B8J200827 Bearing kit nEXT1230 B8M200827 12.4 Bearing run in mode...

  • Page 123: Spares

    B8J200880_E - Spares 13. Spares NOTICE: Use of spares, not supplied by us, may result in reduced reliability and performance and will invalidate product warranty. 13.1 Inlet screen Inlet screens are fitted to the pumps as supplied to prevent damage from the entry of debris into the pump.

  • Page 124: Accessories

    B8J200880_E - Accessories 14. Accessories Air cooler on page The air cooler is available with a pre-wired connector which connects directly to an auxiliary port on the controller. Water cooler on page A water cooler can be fitted to the pump if the water supply is suitable.

  • Page 125: Water Cooler

    Air cooler kit 150 mA B8J200801 14.2 Water cooler A water cooler can be fitted to the nEXT730/930 pump if the water supply is suitable. The nEXT1230 pump has a built-in water cooler. Refer to Forced air cooling on page 78 to check the suitability of the water cooling supply.

  • Page 126: Vrx Vent Restrictor

    B8J200880_E - Accessories TAV5 vent valves have an 0.5 mm diameter orifice and are suitable for venting small vacuum systems of < 5 litres. TAV6 vent valves have an 1.0 mm diameter orifice and are suitable for venting bigger vacuum systems. The vent valves are pre-wired to Vent Option 1 and that the default is set to fully vent at 50% (option 0).

  • Page 127: Interface Cable

    It can be used to control, monitor, configure and data log the nEXT pump, and also to view service status, reset service intervals and upgrade the software embedded in the motor controller. This software is available for download from the Edwards upgrades website: www.upgrades.edwardsvacuum.com 14.10 Auxiliary connector Enables the use of accessories that do not come prewired with a mating plug.

  • Page 128: Auxiliary 'Y' Cable Adaptor

    B8J200880_E - Accessories Table 47 Auxiliary extension cable Item Item Number nEXT auxiliary extension cable B8G200836 14.12 Auxiliary 'Y' cable adaptor Enables either a TAV vent valve and a cooling fan or two cooling fans or 2 TAV vent valves to be operated at the same time.
  • Page 129 B8J200880_E - Accessories Item Item Number Extension cable nEXT, 5 m B8J200825 (between pump and power supply) Bracket for mounting the EPS 800 to the B8J200832 pump (washers and bolts enclosed) Page 128...
  • Page 130 B8J200880_E - Accessories Page 129...
  • Page 131 EU Declaration of Conformity Documentation Officer Edwards Ltd Jana Sigmunda 300 Innovation Drive Lutín , 78349 Burgess Hill Czech Republic West Sussex T: +42(0) 580 582 728 RH15 9TW documentation@edwardsvacuum.com The product specified and listed below  Turbomolecular Pumps with Integrated Frequency Converter...
  • Page 132 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Ian Keech – VP Engineering, Scientific Vacuum Division Rene Rose Stueber –...
  • Page 133 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III:  6(a) Lead as an alloying element in steel for machining purposes and in galvanised steel containing up to 0.35 % lead by weight ...
  • Page 134 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 铅 镉 汞 Part name Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium diphenyl ethers biphenyls (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 Aluminium alloys 钢合金制品 Steel alloys 铜管管件...
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