Edwards nEXT930 Manuals

Manuals and User Guides for Edwards nEXT930. We have 1 Edwards nEXT930 manual available for free PDF download: Instruction Manual

Edwards nEXT930 Instruction Manual (137 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 6 MB

Table of Contents
4
Safety and Compliance
10
Definition of Warnings and Cautions
10
Safety Symbols
11
Trained Personnel
11
Important Safety Information
12
Mechanical Hazards
12
Electrical Hazards
13
Thermal Hazards
13
Danger through Materials and Substances
13
Dangers in Connection with Safety-Related Measures and Precautions
14
Overview
15
Ordering Information
15
Figure 1 Next Model Overview
16
Motor Controller
17
Operational Features
17
Power Limit Setting
18
Standby Speed
18
Timer
18
Analogue Output
18
Automatic Vent Options
19
Normal Speed Setting
19
Electronic Braking
20
Bearing Monitoring
20
Logic Interface
20
USB Interface
21
Parallel Control and Monitoring
21
Serial Control and Monitoring
21
Serial Control with Parallel Monitoring
22
Parallel Control with Serial Monitoring or Serial Configuration
22
CAN Interface
22
Motor Controller Configuration (Serial Configuration)
22
Technical Data
24
Operating and Storage Conditions
24
General Technical Data
24
Pumping Speed Curves
30
Figure 2 Pumping Speed Curves for Next730H
30
Figure 3 Pumping Speed Curves for Next730Q/730D
30
Figure 4 Pumping Speed Curves for Next930Q/930D
31
Figure 5 Pumping Speed Curves for Next1230H
31
Figure 6 Dimensional Drawing for Next730/930
32
Figure 7 Dimensional Drawing for Next1230H
33
Pumping Media
34
Vent Gas Specification and Vent Control Data
35
Materials Exposed to Gases Pumped
35
Figure 8 Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time
35
Purge Gas Specification
36
Water Cooling
36
Figure 9 Maximum Relative Humidity to Avoid Condensation with Water Cooling
37
Figure 10 Cooling Requirements for Nitrogen for Next730H
38
Figure 11 Cooling Requirements for Argon for Next730H
38
Figure 12 Cooling Requirements for Nitrogen for Next730Q/930Q
39
Figure 13 Cooling Requirements for Argon for Next730Q/930Q
39
Figure 14 Cooling Requirements for Nitrogen for Next730D/930D
40
Figure 15 Cooling Requirements for Argon for Next730D/930D
40
Electrical Data
41
Figure 16 Cooling Requirements for Nitrogen for Next1230H
41
Figure 17 Cooling Requirements for Argon for Next1230H
41
Logic Interface Connector
42
Serial Protocol
44
Figure 18 Interface Circuits for Next Turbo Pump Controllers
44
Command Set
46
Multi-Drop Operation
53
Figure 19 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
53
Motor Controller Auxiliary Connector Socket
54
Figure 20 RS485 Multi-Drop Connection
54
Indicator Leds
55
Figure 21 Valve Connector
55
Installation
57
Unpack and Inspect
57
Connect to the Vacuum System
58
Figure 22 Typical Pumping System with a Next Pump
58
Remove and Replace the Inlet Screen
59
Figure 23 Connections and Controls
59
Mounting Orientation
60
Figure 24 Mounting Orientation for Next1230H
60
Figure 25 Mounting Orientation for Next1230H INV
60
Mount the Pump
61
Figure 26 Mounting High Vacuum ISO-F Flange Connection with Clearance Hole
63
Figure 27 Mounting High Vacuum ISO-F Flange Connection with Blind Hole Thread
64
Figure 28 Mounting High Vacuum Flange ISO-K Flange at ISO-F Flange with Collar Flange
65
Figure 29 Mounting High Vacuum Flange ISO-K Flange at ISO-K Flange
66
Figure 30 Mounting High Vacuum Flange ISO-K Flange at ISO-F Flange with Claws
67
Figure 31 Mounting High Vacuum CF Flange Connection with Clearance Hole
68
Backing Port Connection
69
Figure 32 Mounting High Vacuum CF Flange Connection with Blind Hole Thread
69
Purge Gas Connection
70
Recommended Purge Gas Flow
70
Connect the Purge Gas
70
Electrical Installation
70
Earth (Ground) Connections
71
TIC or TAG Logic Interface Connections
71
Connect the Logic Interface to Control Equipment
71
Figure 33 Controller View
71
Connect the Electrical Supply
72
Connect the Parallel Control and Monitoring
73
Figure 34 Power Supply Connector
73
Connection for Serial Control and Monitoring
74
Figure 35 Logic Interface Connections - Parallel Control
74
Figure 36 Simplified Logic Interface Connections - Parallel Control
74
Connect the Serial Interface to the Customer Control Equipment
75
Serial Enable
76
Figure 37 Logic Interface Connections - RS232 Serial Control
76
Figure 38 Logic Interface Connections - RS485 Serial Control
76
Connection for Mixed Parallel and Serial Operation
77
Cooling
78
Cooling Requirements
78
Figure 39 Logic Interface Connection - Mixed Parallel and Serial Operation
78
Forced Air Cooling
79
Water Cooling
79
Configuration
81
Configure the Pump Using Serial Commands
81
Message Structure
82
Command and Reply Table Definitions
82
Power Limit Setting
83
Powering a Fan from the Motor Controller
84
Controlled Venting Options
84
Standby Speed Setting
85
Normal Speed Setting
85
Timer Setting and Options
86
Analogue Signal Options
87
Electronic Braking Options
87
Factory Settings
88
Assigning a Multi-Drop Address
88
Configure the Pump Using a TIC
89
Operation
90
Before Starting the Pump
90
Close the Vent Valve
90
Pre-Start Sequence
90
Vent Options, Vent Valve Connection and Control
91
Manual Vent Valve
91
TAV5 or TAV6 Solenoid Vent Valve
91
Vent Valve Control
92
Alternative Valve Connected to the Vacuum System
94
Operation with Parallel Control and Monitoring
94
Start the Pump with Parallel Control
94
Run the Pump at Standby Speed with Parallel Control
94
Stop the Pump with Parallel Monitoring
95
Parallel Monitoring
95
Operation with Serial Control and Monitoring
95
Delayed Start with Serial Control
95
Start the Pump with Serial Control
96
Run the Pump at Standby Speed with Serial Control
96
Stop the Pump with Serial Control
97
Monitor Temperature Readings with Serial Control
97
Monitor Link Parameter Readings with Serial Control
97
Monitor Measured Motor Speed with Serial Control
97
Mixed Parallel and Serial Operation
98
Operation with a TIC or TAG
99
Decelerating and Venting
99
Operation at Extreme Conditions
100
Operation with High Inlet Pressure
100
Operation at High Temperatures
100
Protection against Over-Speed
101
Electrical Supply Failure
101
Bakeout
102
Shut down the Pump Manually
103
Maintenance
104
Bearing Maintenance
104
Rotor Life
105
Cleaning the Pump
105
Decoding Service Status Words
105
Controller Run Time
107
Pump Run Time
107
Pump Cycles
107
Bearing Run Time
108
Storage
109
Disposal
110
Fault Finding
111
Command Set Error Codes
114
Flashing Service Codes
115
Flashing Error Codes
115
Flashing Inactivity Service Codes (Blue Bearing LED)
116
Decoding System Status Words
117
Service Information
119
Service
120
Return the Equipment or Components for Service
120
Bearing Monitoring and Conditioning System
121
Bearing On-Site Maintenance
121
Bearing Run in Mode
122
Service Counter Reset
122
Spares
123
Inlet Screen
123
Inlet Flange Seals and Integrated Inlet Screens
123
Accessories
124
Air Cooler
124
Water Cooler
125
Flange Heater
125
TAV5 and TAV6 Vent Valves
125
VRX Vent Restrictor
126
Vent Port Adaptor
126
PRX Purge Restrictor
126
Interface Cable
127
Nst2 PC Program
127
Auxiliary Connector
127
Auxiliary Extension Cable
127
Auxiliary 'Y' Cable Adaptor
128
EPS 800 Power Supply
128

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