Edwards STP-301 Series Instruction Manual
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Edwards STP-301 Series Instruction Manual

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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-301/451 Series
Pump Specific Information
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Copyright 2015 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-21E-101-C

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Summary of Contents for Edwards STP-301 Series

  • Page 1 STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information (This Instruction Manual) Instruction Manual (C): STP control unit Instruction Manual Copyright 2015 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards. Manufacture: August. 2015, Yachiyo Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited Date and Place August. 2015, Burgess Hill EU representative: Date and Place...
  • Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: Introduction Installation of the STP pump Installation of the STP control unit Operation Safety functions...
  • Page 4 This page intentionally blank.

  • Page 5: Table Of Contents

    STP-301/451 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP When securing the inlet port with bolts When securing the inlet port flange with claw clamps When installing the damper in the inlet port flange...
  • Page 6 STP-301/451 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page External appearance of STP-301/451 series (Non-corrosion resistant type) External appearance of STP-301/451 series (Corrosion resistant type) External appearance of STP-301/451 series (with water cooling unit) Label affixing positions for the STP pump Example of securing the STP pump (when securing the inlet port with bolts) Example of securing the STP pump...

  • Page 7: Technical Data

    STP-301/451 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-301/451 series High-vacuum type SCU-350 series Naming convention: "C" following a pump model name indicates a corrosion resistant type (e.g. STP-301C). "C1" following a pump model name indicates a corrosion resistant type with water cooling unit (e.g.

  • Page 8: Stp Pump Specifications

    STP-301/451 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item STP-301 series STP-451 series Flange size Inlet port flange ICF152/VG100/ISO100 ICF203/VG150/ISO160 Outlet port flange KF25 KF25 Pumping speed Compression ratio >10 5×10...

  • Page 9: Condition For The Water-Cooling Unit

    1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. Consult Edwards about conditions. A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

  • Page 10: External Appearance Of The Stp Pump

    STP-301/451 Series Turbomolecular Pump External appearance of the STP pump STP-301 series STP-451 series Item Description ICF152 VG100 ISO100 ICF203 VG150 ISO160 Inlet port flange φ A Bending dimension of the STP connection cable Screw hole of legs 8-M8 depth 16...

  • Page 11: External Appearance Of Stp-301/451 Series (Corrosion Resistant Type)

    STP-301/451 Series Turbomolecular Pump STP-301 series STP-451 series Item Description ICF152 VG100 ISO100 ICF203 VG150 ISO160 Inlet port flange φ A Bending dimension of the STP connection cable Screw hole of legs 8-M8 depth 16 Outlet port flange KF25 Screw hole for earth...

  • Page 12: External Appearance Of Stp-301/451 Series (With Water Cooling Unit)

    STP-301/451 Series Turbomolecular Pump STP-301 series STP-451 series Item Description ICF152 VG100 ISO100 ICF203 VG150 ISO160 Inlet port flange φ A Bending dimension of the STP connection cable Screw hole of legs 8-M8 depth 16 Outlet port flange KF25 Screw hole for earth...

  • Page 13: Label Affixing Positions

    STP-301/451 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 4. STP pump installation warning label Connector caution label STP pump/control unit caution label Rotational direction instruction label Name plate Parts number Company logo Figure 4 - Label affixing positions for the STP pump...

  • Page 14: Accessories

    STP-301/451 Series Turbomolecular Pump Accessories Item Q’ty Remarks Primary power cable With a single-side connector STP connection cable With both-side connectors Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 (only for corrosion resistant type) Clamping ring for purge port KF10 (only for corrosion resistant type) O-ring washer for purge port...

  • Page 15: How To Secure The Stp Pump

    Use a material that has a tensile strength of 600 N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-21E-101-C Page 9...

  • Page 16: When Securing The Inlet Port With Bolts

    9. Make sure that the recommended securing bolt is the correct one depending on the method of securing the base. Pump mode STP-301 series Flange type VG100...

  • Page 17: Example Of Securing The Stp Pump (When Securing The Inlet Port With Bolts)

    STP-301/451 Series Turbomolecular Pump (A) When the base is not secured (B) When the base is secured Recommended fitting bolt for flange Secure the base Figure 5 - Example of securing the STP pump (when securing the inlet port with bolts) MT-21E-101-C Page 11...

  • Page 18: When Securing The Inlet Port Flange With Claw Clamps

    STP-301/451 Series Turbomolecular Pump When securing the inlet port flange with claw clamps Refer to Table 2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8 attached legs.

  • Page 19: When Installing The Damper In The Inlet Port Flange

    STP-301/451 Series Turbomolecular Pump When installing the damper in the inlet port flange CAUTION Use a damper only at the vertically upright position. CAUTION DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 2 for rotational torque. When using a damper, secure the base with either the 8 screws for legs or the 8 attached legs.

  • Page 20: Cooling The Stp Pump

    STP-301/451 Series Turbomolecular Pump Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When performing baking, cool the STP pump. Also, when pumping gases, cool the STP pump as well. Select the best method which fits your vacuum equipment.

  • Page 21: Air Cooling Unit And Baking Heater

    STP-301/451 Series Turbomolecular Pump Baking heater (optional accessory) Hot surface warning label (attached to baking heater) Air cooling unit (optional accessory) Figure 8 - Air cooling unit and baking heater MT-21E-101-C Page 15...
  • Page 22 STP-301/451 Series Turbomolecular Pump This page intentionally blank. MT-21E-101-C Page 16...
  • Page 23 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2015 Edwards Japan Limited. All rights reserved.

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Stp-451 series

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